Beam imaging sensor

Title: Beam imaging sensor

The present invention relates generally to the field of sensors for beam imaging and, in particular, to a new and useful beam imaging sensor for use in determining, for example, the power density distribution of a beam including, but not limited to, an electron beam or an ion beam. In one embodiment, the beam imaging sensor of the present invention comprises, among other items, a circumferential slit that is either circular, elliptical or polygonal in nature.

Inventors:: McAninch, Michael D.; Root, Jeffrey J.

Issue Date:: 2016-07-05

OSTI Identifier:: 1260239

Assignee:: Babcock & Wilcox Nuclear Operations Group, Inc. ORNL

Patent Number(s):: 9,383,460

Application Number:: 13/826,907

Contract Number:: AC11-07PN38361

Resource Relation:: Patent File Date: 2013 Mar 14

Research Org:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 43 PARTICLE ACCELERATORS

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URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6881969

Electron beam welding method
patent, May 2005

Murphy, John
US Patent Document 6,888,090
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6888090

Beam profile monitor with accurate horizontal and vertical beam profiles
patent, December 2005

Havener, Charles; Al-Rejoub, Riad
US Patent Document 6,972,551
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6972551

Method for measuring the intensity profile of an electron beam, in particular a beam of an electron-beam machining device, and/or for measuring an optical system for an electron beam and/or for adjusting an optical system for an electron beam, measuring structure for such a method and electron-beam machining device
patent, December 2005

Lower, Thorsten
US Patent Document
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/6977382

Fast Faraday cup with high bandwidth
patent, March 2006

Deibele, Craig
US Patent Document 7,012,419
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7012419

Radio frequency Langmuir probe
patent, March 2006

Hopkins, Michael; Heynen, Paul
US Patent Document 7,015,703
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7015703

Impedance monitoring system and method
patent, March 2006

Quon, Bill
US Patent Document 7,019,543
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7019543

Surface treating device and surface treating method
patent, April 2006

Nagaseki, Kazuya; Onishi, Tadashi; Murakami, Koichi
US Patent Document 7,023,002
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7023002

Processor and method for processing
patent, May 2006

Yamaguchi, Masonori; Yoshioka, Masaki
US Patent Document 7,038,364
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7038364

Source for energetic electrons
patent, December 2006

Dally, Edgar; Gagne, Donald; Espinosa, Robert
US Patent Document 7,148,613
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7148613

Beam current measuring device and apparatus using the same
patent, January 2007

Sasaki, Yuichiro
US Patent Document 7,161,352
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7161352

Thin film processing method and system
patent, March 2007

Onishi, Tadashi; Hama, Manabu; Honda, Minoru
US Patent Document 7,195,936
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7195936

Trigger probe for determining the orientation of the power distribution of an electron beam
patent, July 2007

Elmer, John; Palmer, Todd; Teruya, Alan
US Patent Document 7,244,950
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7244950

Method and apparatus for measuring properties of particle beams using thermo-resistive material properties
patent, October 2007

Degtiarenko, Pavel; Dotson, Danny
US Patent Document 7,279,882
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7279882

Charged particle beam detection system
patent, October 2007

Darling, Robert; Scheidemann, Adi; Schumacher, IV, Frank
US Patent Document 7,282,709
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7282709

Diagnostic system for profiling micro-beams
patent, October 2007

Elmer, John; Palmer, Todd; Teruya, Alan
US Patent Document 7,288,772
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7288772

Plasma potential measuring method and apparatus, and plasma potential measuring probe
patent, October 2007

Zhang, Xin; Sato, Naoyuki; Ikehata, Takashi
US Patent Document 7,288,942
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7288942

Particle beam current measurement system
patent, March 2008

Kitchen, Richard
US Patent Document 7,339,180
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7339180

Apparatus and method for controlling the beam current of a charged particle beam
patent, March 2008

Sellmair, Josef
US Patent Document 7,345,436
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7345436

Electron beam diagnostic for profiling high power beams
patent, March 2008

Elmer, John; Palmer, Todd; Teruya, Alan
US Patent Document 7,348,568
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7348568

Multilayer detector and method for sensing an electron beam
patent, May 2008

Kristiansson, Anders; Naslund, Lars-.ANG.ke; Hallstadius, Hans
US Patent Document 7,368,739
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7368739

Miniature modified Faraday cup for micro electron beams
patent, May 2008

Teruya, Alan; Elmer, John; Palmer, Todd
US Patent Document 7,378,830
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7378830

Controlling plasma processing using parameters derived through the use of a planar ion flux probing arrangement
patent, August 2008

Keil, Douglas
US Patent Document 7,413,672
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7413672

Measurement method of electron beam current, electron beam writing system and electron beam detector
patent, September 2008

Sakakibara, Makoto; Nakayama, Yoshinori; Ohta, Hiroya
US Patent Document 7,425,714
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7425714

Beam current meter
patent, October 2008

Watanabe, Tamaki; Katayama, Takeshi; Kase, Masayuki
US Patent Document 7,435,970
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7435970

Magnetic monitoring of a Faraday cup for an ion implanter
patent, April 2009

Dzengeleski, Joseph; Evans, Morgan; Scheuer, Jay
US Patent Document 7,521,691
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7521691

Automated faraday sensor test system
patent, July 2009

Dzengeleski, Joseph; Gibilaro, Greg; Norris, Gregg
US Patent Document 7,564,048
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7564048

Beam current measuring instrument and beam current measuring method using same
November 2009

Sasaki, Yuichiro; Mizuno, Bunji; Hatanaka, Kichiji
US Patent Document 7,619,223
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7619223

Device for outputting high and/or low energy X-rays
patent, January 2010

Tang, Chuanxiang; Chen, Huaibi; Liu, Yinong
US Patent Document 7,645,994
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7645994

Electron beam systems
patent, April 2010

Zosel, Karsten
US Patent Document 7,692,390
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7692390

Irradiating device and method for controlling the same
patent, April 2010

Liu, Yaohong; Tang, Huaping; Yan, Xinshui
US Patent Document 7,696,488
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7696488

Focusing system and method for a charged particle imaging system
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Rogers, Steven
US Patent Document 7,696,497
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7696497

Charged particle beam profile measurement
patent, January 2011

Koehn, Jason; Russell, Dennis
US Patent Document 7,875,860
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7875860

Beam current sensor
patent, February 2011

Watanabe, Tamaki; Katayama, Takeshi; Kase, Masayuki
US Patent Document 7,888,937
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7888937

Slit disk for modified faraday cup diagnostic for determining power density of electron and ion beams
patent, March 2011

Teruya, Alan; Elmer, John; Palmer, Todd
US Patent Document 7,902,503
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/7902503

Planar type frequency shift probe for measuring plasma electron densities and method and apparatus for measuring plasma electron densities
patent, October 2011

Sugai, Hideo; Yajima, So; Nakamura, Keiji
US Patent Document 8,040,138
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8040138

Method for the precise measurement of dependency on amplitude and phase of plurality of high frequency signals and device for carrying out said method
patent, November 2011

Solar, Borut; Lemut, Primoz; Poucki, Vladimir
US Patent Document 8,063,626
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8063626

Electron beam processing device
patent, December 2011

Vokurka, Franz
US Patent Document 8,076,658
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8076658

Wide-dynamic range electrometer with a fast response
patent, October 2012

Fletcher, William
US Patent Document 8,278,909
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8278909

Use of beam deflection to control an electron beam wire deposition process
patent, January 2013

Taminger, Karen; Hofmeister, William; Hafley, Robert
US Patent Document 8,344,281
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8344281

Integrated optical element and Faraday cup
patent, February 2013

Knuffman, Brenton; Steele, Adam; McClelland, Jabez
US Patent Document 8,350,556
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8350556

Wide-dynamic range electrometer with a fast response
patent, April 2013

Fletcher, William
US Patent Document 8,415,942
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8415942

Plasma monitoring method
patent, April 2013

Tatsumi, Tomohiko; Samukawa, Seiji
US Patent Document 8,427,168
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8427168

Shielded capacitive electrode
patent, July 2013

Kireeff Covo, Michel
US Patent Document 8,481,961
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8481961

Method and system for hybrid direct manufacturing
patent, August 2013

Bichsel, Steve
US Patent Document 8,513,562
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8513562

Electron beam profile measurement system and method with optional Faraday cup
patent, September 2013

Abgaryan, Artush; Levi, Eli; Leddy, Thomas
US Patent Document 8,530,851
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8530851

Electron beam layer manufacturing
patent, October 2013

Stecker, Scott
US Patent Document 8,546,717
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8546717

Stage for working, focused beam working apparatus and focused beam working method
patent, December 2013

Adachi, Tatsuya
US Patent Document 8,598,485
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8598485

Electron beam layer manufacturing using scanning electron monitored closed loop control
patent, December 2013

Stecker, Scott; Wollenhaupt, Phillip
US Patent Document 8,598,523
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/8598523

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