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Title: Selective layer disordering in III-nitrides with a capping layer

Selective layer disordering in a doped III-nitride superlattice can be achieved by depositing a dielectric capping layer on a portion of the surface of the superlattice and annealing the superlattice to induce disorder of the layer interfaces under the uncapped portion and suppress disorder of the interfaces under the capped portion. The method can be used to create devices, such as optical waveguides, light-emitting diodes, photodetectors, solar cells, modulators, laser, and amplifiers.
Inventors:
;
Issue Date:
OSTI Identifier:
1257205
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
Patent Number(s):
9,368,677
Application Number:
14/540,686
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2014 Nov 13
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

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