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Title: Release strategies for making transferable semiconductor structures, devices and device components

Provided are methods for making a device or device component by providing a multi layer structure having a plurality of functional layers and a plurality of release layers and releasing the functional layers from the multilayer structure by separating one or more of the release layers to generate a plurality of transferable structures. The transferable structures are printed onto a device substrate or device component supported by a device substrate. The methods and systems provide means for making high-quality and low-cost photovoltaic devices, transferable semiconductor structures, (opto-)electronic devices and device components.
Inventors:
; ; ; ; ; ;
Issue Date:
OSTI Identifier:
1254133
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL) CHO
Patent Number(s):
9,349,900
Application Number:
14/246,962
Contract Number:
FG02-91ER45439
Resource Relation:
Patent File Date: 2014 Apr 07
Research Org:
The Board of Trustees of the University of Illinois, Urbana, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 14 SOLAR ENERGY

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Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999
  • Xia, Younan; Rogers, John A.; Paul, Kateri E.
  • Chemical Reviews, Vol. 99, Issue 7, p. 1823-1848
  • DOI: 10.1021/cr980002q

Ge/Si nanowire heterostructures as high-performance field-effect transistors
journal, May 2006
  • Xiang, Jie; Lu, Wei; Hu, Yongjie
  • Nature, Vol. 441, Issue 7092, p. 489-493
  • DOI: 10.1038/nature04796

Polymer-controlled growth of Sb2Se3 nanoribbons via a hydrothermal process
journal, May 2003

Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties
journal, December 2000
  • Yu, Jae-Young; Chung, Sung-Wook; Heath, James R.
  • The Journal of Physical Chemistry B, Vol. 104, Issue 50, p. 11864-11870
  • DOI: 10.1021/jp002595q

Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps
journal, February 2003
  • Zaumseil, Jana; Someya, Takao; Bao, Zhenan
  • Applied Physics Letters, Vol. 82, Issue 5, p. 793-795
  • DOI: 10.1063/1.1541941

Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
journal, September 2003
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  • Nano Letters, Vol. 3, Issue 9, p. 1223-1227
  • DOI: 10.1021/nl0344007

Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons
journal, October 2005
  • Zhang, Zengxing; Wang, Jianxiong; Yuan, Huajun
  • The Journal of Physical Chemistry B, Vol. 109, Issue 39, p. 18352-18355
  • DOI: 10.1021/jp052199d

Anomalous Coiling of SiGe/Si and SiGe/Si/Cr Helical Nanobelts
journal, July 2006
  • Zhang, Li; Ruh, Elisabeth; Grützmacher, Detlev
  • Nano Letters, Vol. 6, Issue 7, p. 1311-1317
  • DOI: 10.1021/nl052340u

Oxide-Assisted Growth of Semiconducting Nanowires
journal, April 2003
  • Zhang, R.-Q.; Lifshitz, Y.; Lee, S.-T.
  • Advanced Materials, Vol. 15, Issue 78, p. 635-640
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Structure and photoluminescence of ZnSe nanoribbons grown by metal organic chemical vapor deposition
journal, April 2004
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  • Applied Physics Letters, Vol. 84, Issue 14, p. 2641-2643
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Electronic transport in nanometre-scale silicon-on-insulator membranes
journal, February 2006
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  • Nature, Vol. 439, Issue 7077, p. 703-706
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p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks
journal, October 2004
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  • Nano Letters, Vol. 4, Issue 10, p. 2031-2035
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Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates
journal, March 2005
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Process and apparatus for continuous production of lightweight arrays of photovoltaic cells
patent, May 1987

Alpha-particle protection of semiconductor devices
patent, August 1988

Trench etch process for a single-wafer RIE dry etch reactor
patent, November 1988

Trench etch process for a single-wafer RIE dry etch reactor
patent, August 1989

Reworkable high density interconnect structure incorporating a release layer
patent, July 1995

Method of anisotropically etching silicon
patent, March 1996

Method for making bonded metal back-plane substrates
patent, May 2000

Multilayered wafer with thick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof
patent, August 2001

Lattice matched solar cell and method for manufacturing the same
patent, October 2001

Batch manufacturing method for photovoltaic cells
patent, November 2001

Low emitter resistance contacts to GaAs high speed HBT
patent, December 2003

Graded base GaAsSb for high speed GaAs HBT
patent, August 2004

Method of selective removal of SiGe alloys
patent, May 2005

AlGaAs or InGaP low turn-on voltage GaAs-based heterojunction bipolar transistor
patent, July 2005

Epitaxy/substrate release layer
patent, April 2006

Thermally transferable image protective sheet, method for protective layer formation, and record produced by said method
patent, January 2007

Bipolar transistor with lattice matched base layer
patent, March 2007

Composite patterning devices for soft lithography
patent, March 2007

Mold release layer transferring film and laminate film
patent, August 2007

Thermal transfer recording material and thermal transfer recording method
patent, September 2008

Stretchable form of single crystal silicon for high performance electronics on rubber substrates
patent, April 2009

Stretchable semiconductor elements and stretchable electrical circuits
patent, July 2009

Method for production of a film
patent, April 2010

Methods and devices for fabricating three-dimensional nanoscale structures
patent, April 2010

Multispectral plasmonic crystal sensors
patent, April 2010

Printable semiconductor structures and related methods of making and assembling
patent, September 2010

Release strategies for making transferable semiconductor structures, devices and device components
patent, April 2011

Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp
patent, May 2011

Optical systems fabricated by printing-based assembly
patent, July 2011

Methods and devices for fabricating and assembling printable semiconductor elements
patent, July 2011

Printable semiconductor structures and related methods of making and assembling
patent, October 2011

Stretchable form of single crystal silicon for high performance electronics on rubber substrates
patent, June 2012

Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics
patent, July 2012

Methods of making spatially aligned nanotubes and nanotube arrays
patent, February 2013

Printable semiconductor structures and related methods of making and assembling
patent, March 2013

Methods and devices for fabricating and assembling printable semiconductor elements
patent, May 2013

Printable, flexible and stretchable diamond for thermal management
patent, June 2013

Stretchable and foldable electronic devices
patent, October 2013

High resolution sensing and control of electrohydrodynamic jet printing
patent, October 2013

Methods and devices for fabricating and assembling printable semiconductor elements
patent, March 2014

Implantable biomedical devices on bioresorbable substrates
patent, March 2014

Arrays of ultrathin silicon solar microcells
patent, March 2014

Optical systems fabricated by printing-based assembly
patent, May 2014

Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics
patent, May 2014

Stretchable form of single crystal silicon for high performance electronics on rubber substrates
patent, June 2014

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