Self-assembly of block copolymers on topographically patterned polymeric substrates
Abstract
Highly-ordered block copolymer films are prepared by a method that includes forming a polymeric replica of a topographically patterned crystalline surface, forming a block copolymer film on the topographically patterned surface of the polymeric replica, and annealing the block copolymer film. The resulting structures can be used in a variety of different applications, including the fabrication of high density data storage media. The ability to use flexible polymers to form the polymeric replica facilitates industrial-scale processes utilizing the highly-ordered block copolymer films.
- Inventors:
- Issue Date:
- Research Org.:
- THE UNIVERSITY OF MASSACHUSETTS, Boston, MA (United States) THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1252417
- Patent Number(s):
- 9335629
- Application Number:
- 13/546,378
- Assignee:
- THE UNIVERSITY OF MASSACHUSETTS (Boston, MA) THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (Oakland, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
- DOE Contract Number:
- FG02-96ER45612
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2012 Jul 11
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Russell, Thomas P., Park, Soojin, Lee, Dong Hyun, and Xu, Ting. Self-assembly of block copolymers on topographically patterned polymeric substrates. United States: N. p., 2016.
Web.
Russell, Thomas P., Park, Soojin, Lee, Dong Hyun, & Xu, Ting. Self-assembly of block copolymers on topographically patterned polymeric substrates. United States.
Russell, Thomas P., Park, Soojin, Lee, Dong Hyun, and Xu, Ting. Tue .
"Self-assembly of block copolymers on topographically patterned polymeric substrates". United States. https://www.osti.gov/servlets/purl/1252417.
@article{osti_1252417,
title = {Self-assembly of block copolymers on topographically patterned polymeric substrates},
author = {Russell, Thomas P. and Park, Soojin and Lee, Dong Hyun and Xu, Ting},
abstractNote = {Highly-ordered block copolymer films are prepared by a method that includes forming a polymeric replica of a topographically patterned crystalline surface, forming a block copolymer film on the topographically patterned surface of the polymeric replica, and annealing the block copolymer film. The resulting structures can be used in a variety of different applications, including the fabrication of high density data storage media. The ability to use flexible polymers to form the polymeric replica facilitates industrial-scale processes utilizing the highly-ordered block copolymer films.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {5}
}
Works referenced in this record:
Three-Dimensional Self-Assembly of Spherical Block Copolymer Domains into V-Shaped Grooves
journal, October 2006
- Chuang, Vivian P.; Cheng, Joy Y.; Savas, Tim A.
- Nano Letters, Vol. 6, Issue 10, p. 2332-2337
Orientation-Controlled Self-Assembled Nanolithography Using a Polystyrene−Polydimethylsiloxane Block Copolymer
journal, July 2007
- Jung, Yeon Sik; Ross, C. A.
- Nano Letters, Vol. 7, Issue 7
Nanotailored Crystalline Morphology in Hexagonally Perforated Layers of a Self-Assembled PS-b-PEO Diblock Copolymer
journal, April 2002
- Zhu, Lei; Huang, Ping; Chen, William Y.
- Macromolecules, Vol. 35, Issue 9, p. 3553-3562
Fabrication Approaches for Generating Complex Micro- and Nanopatterns on Polymeric Surfaces
journal, March 2008
- del Campo, Aránzazu; Arzt, Eduard
- Chemical Reviews, Vol. 108, Issue 3, p. 911-945
A Rapid Route to Arrays of Nanostructures in Thin Films
journal, October 2002
- Lin, Z. Q.; Kim, D. H.; Wu, X. D.
- Advanced Materials, Vol. 14, Issue 19
New Approaches to Nanofabrication: Molding, Printing, and Other Techniques
journal, April 2005
- Gates, Byron D.; Xu, Qiaobing; Stewart, Michael
- Chemical Reviews, Vol. 105, Issue 4, p. 1171-1196
Templating the patterning of gold nanoparticles using a stained triblock copolymer film surface
journal, January 2003
- Ansari, Imtiyaz A.; Hamley, Ian W.
- Journal of Materials Chemistry, Vol. 13, Issue 10, p. 2412-2413
Nano-Patterning for Patterned Media using Block-Copolymer
journal, January 2002
- Asakawa, Koji; Hiraoka, Toshiro; Hieda, Hiroyuki
- Journal of Photopolymer Science and Technology, Vol. 15, Issue 3, p. 465-470
Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates
journal, October 2002
- Bal, M.; Ursache, A.; Tuominen, M. T.
- Applied Physics Letters, Vol. 81, Issue 18, p. 3479-3481
Spin-Dependent Tunneling in Self-Assembled Cobalt-Nanocrystal Superlattices
journal, November 2000
- Black, C. T.; Murray, C. B.; Sandstorm, R. L.
- Science, Vol. 290, Issue 5494, p. 1131-1134
Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
journal, July 2001
- Black, C. T.; Guarini, K. W.; Milkove, K. R.
- Applied Physics Letters, Vol. 79, Issue 3, p. 409-411
Block Copolymer Nanocomposites: Perspectives for Tailored Functional Materials
journal, June 2005
- Bockstaller, M. R.; Mickiewicz, R. A.; Thomas, E. L.
- Advanced Materials, Vol. 17, Issue 11, p. 1331-1349
Ordered Bicontinuous Nanoporous and Nanorelief Ceramic Films from Self Assembling Polymer Precursors
journal, November 1999
- Chan, Vanessa Z.-H.; Hoffman, James; Lee, Victor Y.
- Science, Vol. 286, Issue 5445, p. 1716-1719
Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography
journal, August 2001
- Cheng, J.Y.; Ross, C.A.; Chan, V.Z.-H.
- Advanced Materials, Vol. 13, Issue 15, p. 1174-1178
Fabrication of nanostructures with long-range order using block copolymer lithography
journal, November 2002
- Cheng, J. Y.; Ross, C. A.; Thomas, E. L.
- Applied Physics Letters, Vol. 81, Issue 19, p. 3657-3659
A Highly Regular Two-Dimensional Array of Au Quantum Dots Deposited in a Periodically Nanoporous GaAs Epitaxial Layer
journal, November 2002
- Cheng, G.; Moskovits, M.
- Advanced Materials, Vol. 14, Issue 21, p. 1567-1570
Control of Nanoparticle Location in Block Copolymers
journal, April 2005
- Chiu, Julia J.; Kim, Bumjoon J.; Kramer, Edward J.
- Journal of the American Chemical Society, Vol. 127, Issue 14
Sub-10 nm imprint lithography and applications
journal, November 1997
- Chou, Stephen Y.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6
Microdomain patterns from directional eutectic solidification and epitaxy
journal, May 2000
- De Rosa, Claudio; Park, Cheolmin; Thomas, Edwin L.
- Nature, Vol. 405, Issue 6785, p. 433-437
Covalent stabilization of nanostructures: Robust block copolymer templates from novel thermoreactive systems
journal, January 2005
- Drockenmuller, Eric; Li, Lucy Y. T.; Ryu, Du Yeol
- Journal of Polymer Science Part A: Polymer Chemistry, Vol. 43, Issue 5, p. 1028-1037
Additive-Driven Phase-Selective Chemistry in Block Copolymer Thin Films: The Convergence of Top–Down and Bottom–Up Approaches
journal, June 2004
- Du, P.; Li, M.; Douki, K.
- Advanced Materials, Vol. 16, Issue 12, p. 953-957
Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film
journal, February 2003
- Elhadj, S.; Woody, J. W.; Niu, V. S.
- Applied Physics Letters, Vol. 82, Issue 6, p. 871-873
Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006
- Fan, Hong Jin; Werner, Peter; Zacharias, Margit
- Small, Vol. 2, Issue 6, p. 700-717
Observed Substrate Topography-Mediated Lateral Patterning of Diblock Copolymer Films
journal, October 1997
- Fasolka, M. J.; Harris, D. J.; Mayes, A. M.
- Physical Review Letters, Vol. 79, Issue 16, p. 3018-3021
Block Copolymer Thin Films: Physics and Applications
journal, August 2001
- Fasolka, Michael J.; Mayes, Anne M.
- Annual Review of Materials Research, Vol. 31, Issue 1, p. 323-355
Electron Transfer in Self-Assembled Inorganic Polyelectrolyte/Metal Nanoparticle Heterostructures
journal, January 1996
- Feldheim, Daniel L.; Grabar, Katherine C.; Natan, Michael J.
- Journal of the American Chemical Society, Vol. 118, Issue 32
Large-Scale Alignment of ABC Block Copolymer Microdomains via Solvent Vapor Treatment
journal, February 2000
- Fukunaga, Kenji; Elbs, Hubert; Magerle, Robert
- Macromolecules, Vol. 33, Issue 3, p. 947-953
Ultrahigh Pore Density Nanoporous Films Produced by the Phase Separation of Eutectic Al–Si for Template-Assisted Growth of Nanowire Array
journal, August 2004
- Fukutani, K.; Tanji, K.; Motoi, T.
- Advanced Materials, Vol. 16, Issue 16, p. 1456-1460
Highly parallel fabrication of nanopatterned surfaces with nanoscale orthogonal biofunctionalization imprint lithography
journal, February 2007
- Gaubert, Harold E.; Frey, Wolfgang
- Nanotechnology, Vol. 18, Issue 13
Reading and Writing with Electron Beams
journal, October 1997
- Murray Gibson, J.
- Physics Today, Vol. 50, Issue 10
Block copolymer micelle nanolithography on non-conductive substrates
journal, January 2004
- Glass, Roman; Arnold, Marco; Cavalcanti-Adam, Elisabetta Ada
- New Journal of Physics, Vol. 6
Chemical Nanolithography with Electron Beams
journal, June 2001
- Gölzhäuser, A.; Eck, W.; Geyer, W.
- Advanced Materials, Vol. 13, Issue 11
Nano-structured micropatterns by combination of block copolymer self-assembly and UV photolithography
journal, September 2006
- Gorzolnik, B.; Mela, P.; Moeller, M.
- Nanotechnology, Vol. 17, Issue 19
Nanoscale patterning using self-assembled polymers for semiconductor applications
journal, January 2001
- Guarini, K. W.; Black, C. T.; Milkove, K. R.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6, Article No. 2784
Process integration of self-assembled polymer templates into silicon nanofabrication
journal, January 2002
- Guarini, K. W.; Black, C. T.; Zhang, Y.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, Article No. 2788
Cylinder Alignment in Annular Structures of Microphase-Separated Polystyrene-b-Poly(methyl methacrylate)
journal, May 2000
- Hahm, J.; Sibener, S. J.
- Langmuir, Vol. 16, Issue 11, p. 4766-4769
Nanotechnology with Soft Materials
journal, April 2003
- Hamley, I. W.
- Angewandte Chemie International Edition, Vol. 42, Issue 15, p. 1692-1712
Lithography with a mask of block copolymer microstructures
journal, March 1998
- Harrison, Christopher
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 2, Article No. 544
Block copolymers as bilevel resists
journal, September 1985
- Hartney, M. A.; Novembre, A. E.; , F. S. Bates
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 3, Issue 5, Article No. 1346
Controlled Arrangement of Nanoparticle Arrays in Block-Copolymer Domains
journal, May 2006
- Haryono, Agus; Binder, Wolfgang H.
- Small, Vol. 2, Issue 5
Nanoporous Gold Films Created Using Templates Formed from Self-Assembled Structures of Inorganic–Block Copolymer Micelles
journal, May 2003
- Haupt, M.; Miller, S.; Glass, R.
- Advanced Materials, Vol. 15, Issue 10, p. 829-831
Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes
journal, December 2005
- Hawker, Craig J.; Russell, Thomas P.
- MRS Bulletin, Vol. 30, Issue 12, p. 952-966
Thin Diblock Copolymer Films on Chemically Heterogeneous Surfaces
journal, October 1997
- Heier, Jakob; Kramer, Edward J.; Walheim, Stefan
- Macromolecules, Vol. 30, Issue 21, p. 6610-6614
Transfer of a chemical substrate pattern into an island-forming diblock copolymer film
journal, December 1999
- Heier, Jakob; Genzer, Jan; Kramer, Edward J.
- The Journal of Chemical Physics, Vol. 111, Issue 24, p. 11101-11110
Solvent-induced microdomain orientation in polystyrene-b-poly(l-lactide) diblock copolymer thin films for nanopatterning
journal, October 2005
- Ho, Rong-Ming; Tseng, Wen-Hsien; Fan, Hui-Wen
- Polymer, Vol. 46, Issue 22, p. 9362-9377
Impedance Characteristics of the Nanoporous Honeycomb Diamond Electrodes for Electrical Double-Layer Capacitor Applications
journal, May 2001
- Honda, K.; Rao, Tata N.; Tryk, D. A.
- Journal of The Electrochemical Society, Vol. 148, Issue 7, p. A668-A679
Modeling copolymer adsorption on laterally heterogeneous surfaces
journal, February 1991
- Huang, Kanglin; Balazs, Anna C.
- Physical Review Letters, Vol. 66, Issue 5, p. 620-623
Nanodomain control in copolymer thin films
journal, October 1998
- Huang, E.; Rockford, L.; Russell, T. P.
- Nature, Vol. 395, Issue 6704
Catalytic Activity of Supported Au Nanoparticles Deposited from Block Copolymer Micelles
journal, June 2003
- Jaramillo, Thomas F.; Baeck, Sung-Hyeon; Cuenya, Beatriz Roldan
- Journal of the American Chemical Society, Vol. 125, Issue 24, p. 7148-7149
Morphological Development in Solvent-Cast Polystyrene−Polybutadiene−Polystyrene (SBS) Triblock Copolymer Thin Films
journal, April 1998
- Kim, G.; Libera, M.
- Macromolecules, Vol. 31, Issue 8
Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors
journal, January 2011
- Kim, Bokyung; Hong, Sung Woo; Park, Soojin
- Soft Matter, Vol. 7, Issue 2, p. 443-447
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003
- Ouk Kim, Sang; Solak, Harun H.; Stoykovich, Mark P.
- Nature, Vol. 424, Issue 6947, p. 411-414
Highly Oriented and Ordered Arrays from Block Copolymers via Solvent Evaporation
journal, February 2004
- Kim, S. H.; Misner, M. J.; Xu, T.
- Advanced Materials, Vol. 16, Issue 3, p. 226-231
Nanoparticle-Induced Phase Transitions in Diblock-Copolymer Films
journal, November 2005
- Kim, B. J.; Chiu, J. J.; Yi, G.-R.
- Advanced Materials, Vol. 17, Issue 21, p. 2618-2622
Salt Complexation in Block Copolymer Thin Films
journal, November 2006
- Kim, Seung Hyun; Misner, Matthew J.; Yang, Ling
- Macromolecules, Vol. 39, Issue 24, p. 8473-8479
Long-Range Ordering of Diblock Copolymers Induced by Droplet Pinning
journal, November 2003
- Kimura, Masahiro; Misner, Matthew J.; Xu, Ting
- Langmuir, Vol. 19, Issue 23, p. 9910-9913
Characterization of pattern transfer in the fabrication of magnetic nanostructure arrays by block copolymer lithography
journal, June 2007
- Kubo, T.; Parker, J. S.; Hillmyer, M. A.
- Applied Physics Letters, Vol. 90, Issue 23, Article No. 233113
Nanostructured Thin Films of Organic-Organometallic Block Copolymers: One-Step Lithography with Poly(ferrocenylsilanes) by Reactive Ion Etching
journal, January 2000
- Lammertink, R. G. H.; Hempenius, M. A.; van den Enk, J. E.
- Advanced Materials, Vol. 12, Issue 2, p. 98-103
Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications
journal, February 2001
- Lammertink, Rob G. H.; Hempenius, Mark A.; Chan, Vanessa Z.-H.
- Chemistry of Materials, Vol. 13, Issue 2, p. 429-434
Dense arrays of ordered GaAs nanostructures by selective area growth on substrates patterned by block copolymer lithography
journal, March 2000
- Li, R. R.; Dapkus, P. D.; Thompson, M. E.
- Applied Physics Letters, Vol. 76, Issue 13, p. 1689-1691
Spatially Controlled Fabrication of Nanoporous Block Copolymers
journal, October 2004
- Li, Mingqi; Douki, Katsuji; Goto, Ken
- Chemistry of Materials, Vol. 16, Issue 20, p. 3800-3808
Ordered Block-Copolymer Assembly Using Nanoimprint Lithography
journal, September 2004
- Li, Hong-Wei; Huck, Wilhelm T. S.
- Nano Letters, Vol. 4, Issue 9, p. 1633-1636
Patternable Block Copolymers
book, October 2005
- Li, Mingqi; Coenjarts, Christopher A.; Ober, Christopher K.
- Block Copolymers II, p. 183-226
Block copolymer patterns and templates
journal, September 2006
- Li, Mingqi; Ober, Christopher K.
- Materials Today, Vol. 9, Issue 9, p. 30-39
A Rapid Route to Arrays of Nanostructures in Thin Films
journal, October 2002
- Lin, Z. Q.; Kim, D. H.; Wu, X. D.
- Advanced Materials, Vol. 14, Issue 19
Self-directed self-assembly of nanoparticle/copolymer mixtures
journal, March 2005
- Lin, Yao; Böker, Alexander; He, Jinbo
- Nature, Vol. 434, Issue 7029
Hierarchical self-assembly of metal nanostructures on diblock copolymer scaffolds
journal, December 2001
- Lopes, Ward A.; Jaeger, Heinrich M.
- Nature, Vol. 414, Issue 6865, p. 735-738
Self-assembly of functional nanostructures from ABC triblock copolymers
journal, October 2003
- Ludwigs, Sabine; Böker, Alexander; Voronov, Andrej
- Nature Materials, Vol. 2, Issue 11
Plasmonics-A Route to Nanoscale Optical Devices
journal, September 2001
- Maier, S. A.; Brongersma, M. L.; Kik, P. G.
- Advanced Materials, Vol. 13, Issue 19, p. 1501-1505
Controlling Polymer-Surface Interactions with Random Copolymer Brushes
journal, March 1997
- Mansky, P.; Liu, Y.; Huang, E.
- Science, Vol. 275, Issue 5305, p. 1458-1460
Large-Area Domain Alignment in Block Copolymer Thin Films Using Electric Fields
journal, June 1998
- Mansky, P.; DeRouchey, J.; Russell, T. P.
- Macromolecules, Vol. 31, Issue 13
From Nanorings to Nanodots by Patterning with Block Copolymers
journal, June 2008
- Park, Soojin; Wang, Jia-Yu; Kim, Bokyung
- Nano Letters, Vol. 8, Issue 6, p. 1667-1672
Self-Assembled Masks for the Transfer of Nanometer-Scale Patterns into Surfaces: Characterization by AFM and LFM
journal, February 2002
- Meli, Maria-Victoria; Badia, Antonella; Grütter, Peter
- Nano Letters, Vol. 2, Issue 2, p. 131-135
Optical Alignment and Patterning of Nanoscale Microdomains in a Block Copolymer Thin Film
journal, April 2006
- Morikawa, Y.; Nagano, S.; Watanabe, K.
- Advanced Materials, Vol. 18, Issue 7, p. 883-886
Local Control of Microdomain Orientation in Diblock Copolymer Thin Films with Electric Fields
journal, August 1996
- Morkved, T. L.; Lu, M.; Urbas, A. M.
- Science, Vol. 273, Issue 5277
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997
- Park, Miri; Harrison, Christopher; Chaikin, Paul M.
- Science, Vol. 276, Issue 5317, p. 1401-1404
Large Area Orientation of Block Copolymer Microdomains in Thin Films via Directional Crystallization of a Solvent
journal, April 2001
- Park, Cheolmin; De Rosa, Claudio; Thomas, Edwin L.
- Macromolecules, Vol. 34, Issue 8, p. 2602-2606
Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate
journal, August 2001
- Park, Cheolmin; Cheng, Joy Y.; Fasolka, Michael J.
- Applied Physics Letters, Vol. 79, Issue 6, p. 848-850
Large area dense nanoscale patterning of arbitrary surfaces
journal, July 2001
- Park, Miri; Chaikin, P. M.; Register, Richard A.
- Applied Physics Letters, Vol. 79, Issue 2, p. 257-259
Enabling nanotechnology with self assembled block copolymer patterns
journal, October 2003
- Park, Cheolmin; Yoon, Jongseung; Thomas, Edwin L.
- Polymer, Vol. 44, Issue 22, p. 6725-6760
Solvent-Induced Transition from Micelles in Solution to Cylindrical Microdomains in Diblock Copolymer Thin Films
journal, December 2007
- Park, Soojin; Wang, Jia-Yu; Kim, Bokyung
- Macromolecules, Vol. 40, Issue 25, p. 9059-9063
Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films
journal, February 2008
- Park, S.; Kim, B.; Wang, J.-Y.
- Advanced Materials, Vol. 20, Issue 4, p. 681-685
A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates
journal, April 2008
- Park, Soojin; Wang, Jia-Yu; Kim, Bokyung
- ACS Nano, Vol. 2, Issue 4, p. 766-772
Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order
journal, February 2009
- Park, Soojin; Lee, Dong Hyun; Xu, Ji
- Science, Vol. 323, Issue 5917, p. 1030-1033
Aluminum nanowire polarizing grids: Fabrication and analysis
journal, May 2006
- Pelletier, Vincent; Asakawa, Koji; Wu, Mingshaw
- Applied Physics Letters, Vol. 88, Issue 21, Article No. 211114
Diblock Copolymer Thin Film Melts on Striped, Heterogeneous Surfaces: Parallel, Perpendicular and Mixed Lamellar Morphologies
journal, February 1999
- Pereira, G. G.; Williams, D. R. M.
- Macromolecules, Vol. 32, Issue 3, p. 758-764
Polymers on Nanoperiodic, Heterogeneous Surfaces
journal, March 1999
- Rockford, L.; Liu, Y.; Mansky, P.
- Physical Review Letters, Vol. 82, Issue 12, p. 2602-2605
Propagation of Nanopatterned Substrate Templated Ordering of Block Copolymers in Thick Films
journal, February 2001
- Rockford, L.; Mochrie, S. G. J.; Russell, T. P.
- Macromolecules, Vol. 34, Issue 5, p. 1487-1492
Patterned Magnetic Recording Media
journal, August 2001
- Ross, C. A.
- Annual Review of Materials Research, Vol. 31, Issue 1, p. 203-235
Small Angle Neutron Scattering Studies on Ultrathin Films
journal, May 1995
- Russell, Thomas P.; Lambooy, Peter; Barker, John G.
- Macromolecules, Vol. 28, Issue 3
Block copolymers as nanoscopic templates
journal, October 2000
- Russell, Thomas P.; Thurn-Albrecht, Thomas; Tuominen, Mark
- Macromolecular Symposia, Vol. 159, Issue 1, p. 77-88
Graphoepitaxy of Spherical Domain Block Copolymer Films
journal, August 2001
- Segalman, R. A.; Yokoyama, H.; Kramer, E. J.
- Advanced Materials, Vol. 13, Issue 15, p. 1152-1155
Patterning with block copolymer thin films
journal, February 2005
- Segalman, Rachel A.
- Materials Science and Engineering: R: Reports, Vol. 48, Issue 6, p. 191-226
Sluggish Development of Parallel Lamellae at the Strongly Interacting Interface in Thin Films of Symmetric Diblock Copolymers
journal, December 2002
- Sohn, Byeong-Hyeok; Seo, Byung-Wook; Yoo, Seong Il
- Langmuir, Vol. 18, Issue 26, p. 10505-10508
Directed Self-Assembly of Two Kinds of Nanoparticles Utilizing Monolayer Films of Diblock Copolymer Micelles
journal, May 2003
- Sohn, Byeong-Hyeok; Choi, Jeong-Min; Yoo, Seong Il
- Journal of the American Chemical Society, Vol. 125, Issue 21, p. 6368-6369
Faceting Kinetics of Stepped Si(113) Surfaces: A Time-Resolved X-Ray Scattering Study
journal, June 1995
- Song, S.; Mochrie, S. G. J.; Stephenson, G. B.
- Physical Review Letters, Vol. 74, Issue 26, p. 5240-5243
Attractive step-step interactions, tricriticality, and faceting in the orientational phase diagram of silicon surfaces between [113] and [114]
journal, April 1995
- Song, S.; Mochrie, S. G. J.
- Physical Review B, Vol. 51, Issue 15, p. 10068-10084
Ultrathin Diblock Copolymer/Titanium Laminates—A Tool for Nanolithography
journal, August 1998
- Spatz, Joachim P.; Eibeck, Peter; Mößmer, Stefan
- Advanced Materials, Vol. 10, Issue 11, p. 849-852
Micellar Inorganic-Polymer Hybrid Systems—A Tool for Nanolithography
journal, February 1999
- Spatz, Joachim P.; Herzog, Thomas; Mößmer, Stefan
- Advanced Materials, Vol. 11, Issue 2, p. 149-153
A Combined Top–Down/Bottom–Up Approach to the Microscopic Localization of Metallic Nanodots
journal, December 2002
- Spatz, J. P.; Chan, V. Z.-H.; Mößmer, S.
- Advanced Materials, Vol. 14, Issue 24, p. 1827-1832
Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
journal, June 2005
- Stoykovich, Mark P.; Müller, Marcus; Kim, Sang Ouk
- Science, Vol. 308, Issue 5727, p. 1442-1446
Block copolymers and conventional lithography
journal, September 2006
- Stoykovich, Mark P.; Nealey, Paul F.
- Materials Today, Vol. 9, Issue 9, p. 20-29
Long-Range Ordered Thin Films of Block Copolymers Prepared by Zone-Casting and Their Thermal Conversion into Ordered Nanostructured Carbon
journal, May 2005
- Tang, Chuanbing; Tracz, Adam; Kruk, Michal
- Journal of the American Chemical Society, Vol. 127, Issue 19, p. 6918-6919
Spontaneous Vertical Ordering and Pyrolytic Formation of Nanoscopic Ceramic Patterns from Poly(styrene-b-ferrocenylsilane)
journal, February 2003
- Temple, K.; Kulbaba, K.; Power-Billard, K. N.
- Advanced Materials, Vol. 15, Issue 4, p. 297-300
Predicting the Mesophases of Copolymer-Nanoparticle Composites
journal, June 2001
- Thompson, Russell B.; Ginzburg, Valeriy V.; Matsen, Mark W.
- Science, Vol. 292, Issue 5526, p. 2469-2472
Overcoming Interfacial Interactions with Electric Fields
journal, May 2000
- Thurn-Albrecht, T.; DeRouchey, J.; Russell, T. P.
- Macromolecules, Vol. 33, Issue 9, p. 3250-3253
Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates
journal, December 2000
- Thurn-Albrecht, T.; Schotter, J.; Kastle, G. A.
- Science, Vol. 290, Issue 5499, p. 2126-2129
Study of oriented block copolymers films obtained by roll-casting
journal, September 2002
- Villar, Marcelo A.; Rueda, Daniel R.; Ania, Fernando
- Polymer, Vol. 43, Issue 19, p. 5139-5145
Simulations of the Morphology of Cylinder-Forming Asymmetric Diblock Copolymer Thin Films on Nanopatterned Substrates
journal, March 2003
- Wang, Qiang; Nealey, Paul F.; de Pablo, Juan J.
- Macromolecules, Vol. 36, Issue 5, p. 1731-1740
One step fabrication and characterization of platinum nanopore electrode ensembles formed via amphiphilic block copolymer self-assembly
journal, October 2006
- Wang, Chengyin; Shao, Xiaoqiu; Liu, Qingxiu
- Electrochimica Acta, Vol. 52, Issue 2, p. 704-709
Etch rates for micromachining processing-part II
journal, December 2003
- Williams, K.R.; Gupta, K.; Wasilik, M.
- Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778
One-Dimensional Arrangements of Metal Nanoclusters
journal, April 2002
- Wyrwa, Daniel; Beyer, Norbert; Schmid, Günter
- Nano Letters, Vol. 2, Issue 4, p. 419-421
The influence of molecular weight on nanoporous polymer films
journal, October 2001
- Xu, Ting; Kim, Ho-Cheol; DeRouchey, Jason
- Polymer, Vol. 42, Issue 21, p. 9091-9095
Block Copolymer Surface Reconstuction: A Reversible Route to Nanoporous Films
journal, September 2003
- Xu, T.; Stevens, J.; Villa, J.A.
- Advanced Functional Materials, Vol. 13, Issue 9, p. 698-702
Interfacial Energy Effects on the Electric Field Alignment of Symmetric Diblock Copolymers
journal, August 2003
- Xu, Ting; Hawker, Craig J.; Russell, Thomas P.
- Macromolecules, Vol. 36, Issue 16, p. 6178-6182
Guided Self-Assembly of Symmetric Diblock Copolymer Films on Chemically Nanopatterned Substrates
journal, December 2000
- Yang, Xiao M.; Peters, Richard D.; Nealey, Paul F.
- Macromolecules, Vol. 33, Issue 26, p. 9575-9582
Mesoporous Polystyrene Monoliths
journal, February 2001
- Zalusky, Andrew S.; Olayo-Valles, Roberto; Taylor, Charles J.
- Journal of the American Chemical Society, Vol. 123, Issue 7, p. 1519-1520
Ordering and Melting of Block Copolymer Spherical Domains in 2 and 3 Dimensions
journal, May 2003
- Segalman, Rachel A.; Hexemer, Alexander; Hayward, Ryan C.
- Macromolecules, Vol. 36, Issue 9, p. 3272-3288
Poly(alkenyl substituted aromatic) and elastomer containing polymer compositions and process for their preparation
patent, January 1992
- Nelissen, Laurentius Nicolaas Ida Hubertus; De Koning, Gerardus J. M.; Zijderveld, Johannes M.
- US Patent Document 5,079,268
Method for the controlled growth of crystal whiskers and application thereof to the making of tip microcathodes
patent, May 1994
- Pribat, Didier; Leclerc, Pierre; Legagneux, Pierre
- US Patent Document 5,314,569
Indium gallium nitride smoothing structures for III-nitride devices
patent, October 2003
- Goetz, Werner; Camras, Michael D.; Gardner, Nathan
- US Patent Document 6,635,904
Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent, June 2004
- Nealey, Paul Franklin; DePablo, Juan; Cerrina, Francesco
- US Patent Document 6,746,825
Method for fabricating spaced-apart nanostructures
patent, February 2005
- Jin, Sungho
- US Patent Document 6,858,521
Large area orientation of block copolymer microdomains in thin films
patent, May 2005
- Thomas, Edwin L.; DeRosa, Claudio; Park, Cheolmin
- US Patent Document 6,893,705
Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent, August 2005
- Nealey, Paul Franklin; DePablo, Juan; Cerrina, Francesco
- US Patent Document 6,926,953
UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization
patent, September 2005
- Jeong, Jun-Ho; Sohn, HyonKee; Sim, Young-Suk
- US Patent Document 6,943,117
Nanoporous structures produced from self-assembling molecules
patent, April 2006
- Gunther, Janelle
- US Patent Document 7,030,167
Method of fabricating patterned polymer film with nanometer scale
patent, July 2006
- Yang, Seung-Man; Jang, Se Gyu; Choi, Dae-Geun
- US Patent Document 7,081,269
Composition containing a cross-linkable matrix precursor and a poragen, and porous matrix prepared therefrom
patent, September 2006
- Bruza, Kenneth J.; Godschalx, James P.; Shaffer, II, Edward O.
- US Patent Document 7,109,249
Method of manufacturing a wafer
patent, November 2006
- Maleville, Christophe; Arene, Emmanuel
- US Patent Document 7,138,325
Nanofabrication
patent, March 2007
- Tuominen, Mark; Bal, Mustafa; Russell, Thomas P.
- US Patent Document 7,189,435
Nanocylinder arrays
patent, March 2007
- Tuominen, Mark; Schotter, Joerg; Thurn-Albrecht, Thomas
- US Patent Document 7,190,049
Method for manufacturing porous structure and method for forming pattern
patent, April 2009
- Asakawa, Koji; Hiraoka, Toshiro; Akasaka, Yoshihiro
- US Patent Document 7,517,466
Structure and method for stochastic integrated circuit personalization
patent, June 2009
- Clevenger, Lawrence A.; Colburn, Matthew E.; Dalton, Timothy J.
- US Patent Document 7,544,578
Nanopatterned templates from oriented degradable diblock copolymer thin films
patent, December 2009
- Ho, Rong-Ming; Fan, Hui; Tseng, Wen-Hsien
- US Patent Document 7,632,544
Method of producing nanopatterned articles, and articles produced thereby
patent, July 2012
- Russell, Thomas P.; Park, Soojin; Xu, Ting
- US Patent Document 8,211,737
Inorganic nanoporous membranes and methods to form same
patent-application, July 2004
- Black, Charles; Guarini, Kathryn
- US Patent Application 10/331908; 20040124092
Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent-application, September 2004
- Nealey, Paul; DePablo, Juan; Cerrina, Francesco
- US Patent Application 10/800923; 20040175628
Method for catalytic growth of nanotubes or nanofibers comprising a nisi alloy diffusion barrier
patent-application, October 2005
- Legagneux, Pierre; Pribat, Didier; Nedellec, Yannig
- US Patent Application 10/497079; 20050235906
Liquid electrophotographic toners comprising amphipathic copolymers having acidic or basic functionality and wax having basic or acidic functionality
patent-application, May 2006
- Moudry, Ronald; Simpson, Charles; Baker, James
- US Patent Application 10/978635; 20060093954
Materials having predefined morphologies and methods of formation thereof
patent-application, September 2006
- Cha, Jennifer; Hedrick, James; Kim, Ho-Cheol
- US Patent Application 11/077804; 20060205875
Method of preparing catalyst layer for synthesis of carbon nanotubes and method of synthesizing carbon nanotubes using the same
patent-application, November 2006
- Jin, Yong-Wan; Han, In-Taek; Chung, Deuk-Seok
- US Patent Application 11/356240; 20060257565
A method of synthesizing nanoscale filamentary structures and electronic components comprising such structures
patent-application, December 2006
- Pribat, Didier
- US Patent Application 10/574186; 20060292870
Master mold, master mold fabrication method, and method for fabricating liquid crystal display device using the same
patent-application, July 2007
- Jo, Gyoo-Chul; Kim, Jin-Wuk; Lee, Chang-Hee
- US Patent Application 11/477909; 20070153222
Metal compositions, thermal imaging donors and patterned multilayer compositions derived therefrom
patent-application, January 2008
- Bailey, Richard; Blanchet, Graciela; Caspar, Jonathan
- US Patent Application 11/488247; 20080014528
Method of producing nanopatterned templates
patent-application, September 2008
- Park, Soojin; Russell, Thomas; Wang, Jia-Yu
- US Patent Application 12/049541; 20080230514
Orientation-controlled self-assembled nanolithography using a block copolymer
patent-application, December 2008
- Jung, Yeon; Ross, Caroline
- US Patent Application 12/137016; 20080311402
Multilayer antireflection coatings, structures and devices including the same and methods of making the same
patent-application, December 2008
- Marsh, Eugene; Millward, Dan
- US Patent Application 11/766663; 20080315270
Directed assembly of triblock copolymers
patent-application, April 2009
- Nealey, Paul; Bates, Frank; Pablo, Juan
- US Patent Application 11/580694; 20090087664
Self-assembly of block copolymers on topographically patterned polymeric substrates
patent-application, March 2010
- Russell, Thomas; Park, Soojin; Lee, Doug
- US Patent Application 12/553484; 20100075116
Method of producing nanopatterned articles, and articles produced thereby
patent-application, April 2010
- Russell, Thomas; Park, Soojin; Wang, Jia-Yu
- US Patent Application 12/566705; 20100086801
Method of Forming Self-Assembled Patterns Using Block Copolymers, and Articles Thereof
patent-application, March 2011
- Kim, Ho-Cheol; Park, Sang-min; Rettner, Charles
- US Patent Application 12/554175; 20110059299
Method of producing nanopatterned articles, and articles produced thereby
patent-application, November 2013
- Russell, Thomas; Park, Soojin; Wang, Jia-Yu
- US Patent Application 13/944329; 20130302632