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Title: Microresonator electrode design

Abstract

A microresonator with an input electrode and an output electrode patterned thereon is described. The input electrode includes a series of stubs that are configured to isolate acoustic waves, such that the waves are not reflected into the microresonator. Such design results in reduction of spurious modes corresponding to the microresonator.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1252195
Patent Number(s):
9,337,800
Application Number:
13/649,025
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Oct 10
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE

Citation Formats

Olsson, III, Roy H., Wojciechowski, Kenneth, and Branch, Darren W. Microresonator electrode design. United States: N. p., 2016. Web.
Olsson, III, Roy H., Wojciechowski, Kenneth, & Branch, Darren W. Microresonator electrode design. United States.
Olsson, III, Roy H., Wojciechowski, Kenneth, and Branch, Darren W. Tue . "Microresonator electrode design". United States. https://www.osti.gov/servlets/purl/1252195.
@article{osti_1252195,
title = {Microresonator electrode design},
author = {Olsson, III, Roy H. and Wojciechowski, Kenneth and Branch, Darren W.},
abstractNote = {A microresonator with an input electrode and an output electrode patterned thereon is described. The input electrode includes a series of stubs that are configured to isolate acoustic waves, such that the waves are not reflected into the microresonator. Such design results in reduction of spurious modes corresponding to the microresonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {5}
}

Patent:

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Works referenced in this record:

Super-high-frequency two-port AlN contour-mode resonators for RF applications
journal, January 2010

  • Rinaldi, M.; Zuniga, C.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 57, Issue 1
  • DOI: 10.1109/TUFFC.2010.1376

Suppression of spurious modes via dummy electrodes and 2% frequency shift via cavity size selection for 1 GHz AlN MEMS contour-mode resonators
conference, May 2012

  • Yazici, Serkan; Giovannini, Marco; Kuo, Nai-Kuei
  • 2012 IEEE International Frequency Control Symposium (FCS), 2012 IEEE International Frequency Control Symposium Proceedings
  • DOI: 10.1109/FCS.2012.6243620

Lithography and Other Patterning Techniques for Future Electronics
journal, February 2008


The radial bulk annular resonator: towards a 50Ω RF MEMS filter
conference, January 2003

  • Bircumshaw, B.; Liu, G.; Takeuchi, H.
  • IEEE International Solid-State Sensors and Actuators Conference, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • DOI: 10.1109/SENSOR.2003.1215614

PS-4 GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators
conference, October 2006


GHZ higher order contour mode ALN annular resonators
conference, January 2007

  • Stephanou, P. J.; Pisano, A. P.
  • 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
  • DOI: 10.1109/MEMSYS.2007.4433093

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
journal, January 2006

  • Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P.
  • Journal of Microelectromechanical Systems, Vol. 15, Issue 6
  • DOI: 10.1109/JMEMS.2006.886012

One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing
journal, November 2007

  • Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P.
  • Solid-State Electronics, Vol. 51, Issue 11-12, p. 1596-1608
  • DOI: 10.1016/j.sse.2007.09.037

Green's function analysis of Lamb wave resonators
conference, November 2008


Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q
conference, January 2010

  • Harrington, B. P.; Shahmohammadi, M.; Abdolvand, R.
  • 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
  • DOI: 10.1109/MEMSYS.2010.5442310

Low loss SAW double-mode structure suppressing spurious radiation
conference, January 2004