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Title: Microresonator electrode design

A microresonator with an input electrode and an output electrode patterned thereon is described. The input electrode includes a series of stubs that are configured to isolate acoustic waves, such that the waves are not reflected into the microresonator. Such design results in reduction of spurious modes corresponding to the microresonator.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1252195
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
Patent Number(s):
9,337,800
Application Number:
13/649,025
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2012 Oct 10
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE

Other works cited in this record:

One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing
journal, November 2007
  • Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P.
  • Solid-State Electronics, Vol. 51, Issue 11-12, p. 1596-1608
  • DOI: 10.1016/j.sse.2007.09.037

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