skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC)

Abstract

A rolled-up transformer structure comprises a multilayer sheet having a rolled configuration comprising multiple turns about a longitudinal axis. The multilayer sheet comprises more than one conductive pattern layer on a strain-relieved layer, including a first conductive film and a second conductive film separated from the first conductive film in a thickness direction. The first conductive film comprises an even number of primary conductive strips, where each primary conductive strip has a length extending in the rolling direction, and the second conductive film comprises an even number of secondary conductive strips, where each secondary conductive strip has a length extending in the rolling direction. In the rolled configuration, turns of the primary conductive strips and turns of the secondary conductive strips wrap around the longitudinal axis. The primary conductive strips serve as a primary winding and the secondary conductive strips serve as a secondary winding of the rolled-up transformer structure.

Inventors:
;
Issue Date:
Research Org.:
The Board of Trustees of the University of Illinois, Urbana, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1250443
Patent Number(s):
9,330,829
Application Number:
14/565,944
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
DOE Contract Number:  
FG02-07ER46471
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Dec 10
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING

Citation Formats

Li, Xiuling, and Huang, Wen. Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC). United States: N. p., 2016. Web.
Li, Xiuling, & Huang, Wen. Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC). United States.
Li, Xiuling, and Huang, Wen. Tue . "Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC)". United States. https://www.osti.gov/servlets/purl/1250443.
@article{osti_1250443,
title = {Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC)},
author = {Li, Xiuling and Huang, Wen},
abstractNote = {A rolled-up transformer structure comprises a multilayer sheet having a rolled configuration comprising multiple turns about a longitudinal axis. The multilayer sheet comprises more than one conductive pattern layer on a strain-relieved layer, including a first conductive film and a second conductive film separated from the first conductive film in a thickness direction. The first conductive film comprises an even number of primary conductive strips, where each primary conductive strip has a length extending in the rolling direction, and the second conductive film comprises an even number of secondary conductive strips, where each secondary conductive strip has a length extending in the rolling direction. In the rolled configuration, turns of the primary conductive strips and turns of the secondary conductive strips wrap around the longitudinal axis. The primary conductive strips serve as a primary winding and the secondary conductive strips serve as a secondary winding of the rolled-up transformer structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {5}
}

Patent:

Save / Share:

Works referenced in this record:

Out-of-plane spiral-coil inductor self-assembled by locally controlled bimorph actuation
journal, January 2011

  • Mohamed Ali, M. S.; Bycraft, B.; Schlosser, C.
  • Micro & Nano Letters, Vol. 6, Issue 12
  • DOI: 10.1049/mnl.2011.0581

Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
journal, January 2006

  • Arora, William J.; Nichol, Anthony J.; Smith, Henry I.
  • Applied Physics Letters, Vol. 88, Issue 5
  • DOI: 10.1063/1.2168516

Self-organized 1.55 µm InAs/InP quantum dot tube nanoscale coherent light sources
conference, January 2011


Self-Assembled Ultra-Compact Energy Storage Elements Based on Hybrid Nanomembranes
journal, July 2010

  • Bof Bufon, Carlos César; Cojal González, José David; Thurmer, Dominic J.
  • Nano Letters, Vol. 10, Issue 7
  • DOI: 10.1021/nl1010367

Electroless deposition of novel Ag–W thin films
journal, November 2003


A novel low-loss Terahertz waveguide: Polymer tube
journal, January 2010


Controlled Assembly and Dispersion of Strain-Induced InGaAs/GaAs Nanotubes
journal, July 2008


InGaAs/GaAs 3D architecture formation by strain-induced self-rolling with lithographically defined rectangular stripe arrays
journal, April 2008


Geometry Effect on the Strain-Induced Self-Rolling of Semiconductor Membranes
journal, October 2010

  • Chun, Ik Su; Challa, Archana; Derickson, Brad
  • Nano Letters, Vol. 10, Issue 10
  • DOI: 10.1021/nl101669u

Strain-driven self-rolling mechanism for anomalous coiling of multilayer nanohelices
journal, December 2009

  • Dai, L.; Shen, W. Z.
  • Journal of Applied Physics, Vol. 106, Issue 11
  • DOI: 10.1063/1.3267866

Stresses and deformation processes in thin films on substrates
journal, January 1988

  • Doerner, Mary F.; Nix, William D.
  • Critical Reviews in Solid State and Materials Sciences, Vol. 14, Issue 3
  • DOI: 10.1080/10408438808243734

Aligned arrays of single walled carbon nanotubes for transparent electronics
conference, June 2013

  • Du, Frank; Rogers, John A.
  • SPIE Defense, Security, and Sensing, SPIE Proceedings
  • DOI: 10.1117/12.2018312

Terahertz attenuation and dispersion characteristics of coplanar transmission lines
journal, June 1991

  • Frankel, M. Y.; Gupta, S.; Valdmanis, J. A.
  • IEEE Transactions on Microwave Theory and Techniques, Vol. 39, Issue 6
  • DOI: 10.1109/22.81658

Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils
journal, February 2001

  • Golod, S. V.; Prinz, V. Ya; Mashanov, V. I.
  • Semiconductor Science and Technology, Vol. 16, Issue 3
  • DOI: 10.1088/0268-1242/16/3/311

Freestanding SiGe/Si/Cr and SiGe/Si/SixNy/Cr microtubes
journal, April 2004

  • Golod, S. V.; Prinz, V. Ya.; Wägli, P.
  • Applied Physics Letters, Vol. 84, Issue 17
  • DOI: 10.1063/1.1736317

Fabrication and applications of large arrays of multifunctional rolled-up SiO/SiO 2 microtubes
journal, January 2012

  • Harazim, Stefan M.; Xi, Wang; Schmidt, Christine K.
  • J. Mater. Chem., Vol. 22, Issue 7
  • DOI: 10.1039/C1JM14800A

Low-dispersion thin-film microstrip lines with cyclotene (benzocyclobutene) as dielectric medium
journal, April 1997

  • Heiliger, H. -M.; Nagel, M.; Roskos, H. G.
  • Applied Physics Letters, Vol. 70, Issue 17
  • DOI: 10.1063/1.118849

Design of Coil Length of On-Chip Transformer With High Turn Ratio and High Coupling Performance
journal, November 2012


Optical properties of rolled-up tubular microcavities from shaped nanomembranes
journal, April 2009

  • Kiravittaya, S.; Bolaños Quiñones, V. A.; Benyoucef, M.
  • Applied Physics Letters, Vol. 94, Issue 14, Article No. 141901
  • DOI: 10.1063/1.3111813

Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication
journal, December 2005

  • Huang, M.; Boone, C.; Roberts, M.
  • Advanced Materials, Vol. 17, Issue 23, p. 2860-2864
  • DOI: 10.1002/adma.200501353

Thinning and Shaping Solid Films into Functional and Integrative Nanomembranes
journal, April 2012

  • Huang, Gaoshan; Mei, Yongfeng
  • Advanced Materials, Vol. 24, Issue 19, p. 2517-2546
  • DOI: 10.1002/adma.201200574

Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells
journal, January 2009

  • Huang, Gaoshan; Mei, Yongfeng; Thurmer, Dominic J.
  • Lab Chip, Vol. 9, Issue 2
  • DOI: 10.1039/B810419K

Mechano-electronic Superlattices in Silicon Nanoribbons
journal, February 2009

  • Huang, Minghuang; Ritz, Clark S.; Novakovic, Bozidar
  • ACS Nano, Vol. 3, Issue 3
  • DOI: 10.1021/nn8008883

Novel Highly Conductive Silver-Tungsten Thin Films Electroless Deposited from Benzoate Solution for Microelectronic Applications
journal, January 2003

  • Inberg, A.; Bogush, V.; Croitoru, N.
  • Journal of The Electrochemical Society, Vol. 150, Issue 5
  • DOI: 10.1149/1.1562596

Photonic-crystal slab for terahertz-wave integrated circuits
conference, September 2012

  • Ishigaki, Tsukasa; Fujita, Masayuki; Nagai, Masaya
  • 2012 IEEE Photonics Conference (IPC), IEEE Photonics Conference 2012
  • DOI: 10.1109/IPCon.2012.6358852

A 32nm SoC platform technology with 2nd generation high-k/metal gate transistors optimized for ultra low power, high performance, and high density product applications
conference, December 2009

  • Jan, C. -H.; Agostinelli, M.; Buehler, M.
  • 2009 IEEE International Electron Devices Meeting (IEDM)
  • DOI: 10.1109/IEDM.2009.5424258

On-chip spiral inductors suspended over deep copper-lined cavities
journal, January 2000

  • Hongrui Jiang, ; Yeh, J. -L. A.
  • IEEE Transactions on Microwave Theory and Techniques, Vol. 48, Issue 12
  • DOI: 10.1109/22.898992

Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process
journal, January 2013

  • Kobayashi, Toshiyuki; Bando, Masashi; Kimura, Nozomi
  • Applied Physics Letters, Vol. 102, Issue 2
  • DOI: 10.1063/1.4776707

Coherent emission from ultrathin-walled spiral InGaAs/GaAs quantum dot microtubes
journal, January 2009

  • Li, Feng; Mi, Zetian; Vicknesh, Sahmuganathan
  • Optics Letters, Vol. 34, Issue 19
  • DOI: 10.1364/OL.34.002915

Influences of process parameters of low frequency PECVD technology on intrinsic stress of silicon nitride thin film
conference, October 2010

  • Li, Weizhi; Kang, Zhe; Ye, Yun
  • 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, SPIE Proceedings
  • DOI: 10.1117/12.867778

Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties
journal, January 2011

  • Li, Xiuling
  • Advances in Optics and Photonics, Vol. 3, Issue 4, p. 366-387
  • DOI: 10.1364/AOP.3.000366

Strain induced semiconductor nanotubes from formation process to device applications
journal, September 2008


Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes
journal, December 2009

  • Li, Xuesong; Zhu, Yanwu; Cai, Weiwei
  • Nano Letters, Vol. 9, Issue 12
  • DOI: 10.1021/nl902623y

Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer
journal, January 2009

  • Logeeswaran VJ, ; Kobayashi, Nobuhiko P.; Islam, M. Saif
  • Nano Letters, Vol. 9, Issue 1
  • DOI: 10.1021/nl8027476

Toroidal hollow-core microcavities produced by self-rolling of strained polymer bilayer films
journal, February 2008


Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure
journal, November 2006

  • Luo, J. K.; Huang, R.; He, J. H.
  • Sensors and Actuators A: Physical, Vol. 132, Issue 1, p. 346-353
  • DOI: 10.1016/j.sna.2006.03.004

Modeling of silicon nitride deposition by RF plasma-enhanced chemical vapor deposition
journal, January 1994

  • Masi, Maurizio; Besana, Giambattista; Canzi, Lorenzo
  • Chemical Engineering Science, Vol. 49, Issue 5, p. 669-679
  • DOI: 10.1016/0009-2509(94)85013-5

Versatile Approach for Integrative and Functionalized Tubes by Strain Engineering of Nanomembranes on Polymers
journal, November 2008

  • Mei, Yongfeng; Huang, Gaoshan; Solovev, Alexander A.
  • Advanced Materials, Vol. 20, Issue 21, p. 4085-4090
  • DOI: 10.1002/adma.200801589

1.3 – 1.55 µm self-organized InAs quantum dot tube nanoscale lasers on silicon
conference, October 2011

  • Mi, Zetian; Bianucci, Pablo; Dastjerdi, Mohammad H. T.
  • 2011 IEEE Photonics Conference (IPC), IEEE Photonic Society 24th Annual Meeting
  • DOI: 10.1109/PHO.2011.6110658

Reducing Transmission Losses in Hollow THz Waveguides
journal, September 2011

  • Mitrofanov, Oleg; James, Richard; Fernandez, F. Aníbal
  • IEEE Transactions on Terahertz Science and Technology, Vol. 1, Issue 1
  • DOI: 10.1109/TTHZ.2011.2159547

Dielectric-lined cylindrical metallic THz waveguides: mode structure and dispersion
journal, January 2010


Single-mask microfabrication of three-dimensional objects from strained bimorphs
journal, August 2007

  • Moiseeva, E.; Senousy, Y. M.; McNamara, S.
  • Journal of Micromechanics and Microengineering, Vol. 17, Issue 9
  • DOI: 10.1088/0960-1317/17/9/N01

Tuning giant magnetoresistance in rolled-up Co–Cu nanomembranes by strain engineering
journal, January 2012

  • Müller, Christian; Bof Bufon, Carlos Cesar; Makarov, Denys
  • Nanoscale, Vol. 4, Issue 22
  • DOI: 10.1039/C2NR32086J

Advances in Terahertz Waveguides and Sources
journal, April 2011


Transfer printing of flexible hybrid inductor-capacitor filters via pre-etched silicon-on-insulator mother wafer
journal, August 2012

  • Pang, Liang; Seo, Hui-Chan; (Kevin) Kim, Kyekyoon
  • Applied Physics Letters, Vol. 101, Issue 6
  • DOI: 10.1063/1.4742341

The detailed analysis of high Q CMOS-compatible microwave spiral inductors in silicon technology
journal, January 1998

  • Min Park,
  • IEEE Transactions on Electron Devices, Vol. 45, Issue 9
  • DOI: 10.1109/16.711361

Residual stress improvement of platinum thin film in Au/Pt/Ti/p-GaAs ohmic contact by RF sputtering power
journal, November 2012


Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays
journal, February 2000

  • Prinz, V. Ya; Seleznev, V. A.; Gutakovsky, A. K.
  • Physica E: Low-dimensional Systems and Nanostructures, Vol. 6, Issue 1-4, p. 828-831
  • DOI: 10.1016/S1386-9477(99)00249-0

Rolled-up nanotechnology for the fabrication of three-dimensional fishnet-type GaAs-metal metamaterials with negative refractive index at near-infrared frequencies
journal, April 2012

  • Rottler, Andreas; Harland, Malte; Bröll, Markus
  • Applied Physics Letters, Vol. 100, Issue 15
  • DOI: 10.1063/1.4704185

Morphological Differentiation of Neurons on Microtopographic Substrates Fabricated by Rolled-Up Nanotechnology
journal, September 2010

  • Schulze, Sabine; Huang, Gaoshan; Krause, Matthias
  • Advanced Engineering Materials, Vol. 12, Issue 9, p. B558-B564
  • DOI: 10.1002/adem.201080023

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
journal, January 1990

  • Seidel, H.; Csepregi, L.; Heuberger, A.
  • Journal of The Electrochemical Society, Vol. 137, Issue 11, p. 3612-3626
  • DOI: 10.1149/1.2086277

Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors
journal, March 2009

  • Seleznev, V. A.; Prinz, V. Ya.; Aniskin, V. M.
  • Journal of Applied Mechanics and Technical Physics, Vol. 50, Issue 2
  • DOI: 10.1007/s10808-009-0039-5

Electroless Silver and Silver with Tungsten Thin Films for Microelectronics and Microelectromechanical System Applications
journal, January 2000

  • Shacham-Diamand, Yosi; Inberg, Alexandra; Sverdlov, Yelena
  • Journal of The Electrochemical Society, Vol. 147, Issue 9
  • DOI: 10.1149/1.1393904

Generation and registration of disturbances in a gas flow. 2. Experiments with arrays of tubular microheaters and microsensors
journal, May 2009

  • Shiplyuk, A. N.; Aniskin, V. M.; Seleznev, V. A.
  • Journal of Applied Mechanics and Technical Physics, Vol. 50, Issue 3
  • DOI: 10.1007/s10808-009-0060-8

Mechanism of SiN[sub x]H[sub y] Deposition from NH[sub 3]-SiH[sub 4] Plasma
journal, January 1990

  • Smith, Donald L.
  • Journal of The Electrochemical Society, Vol. 137, Issue 2
  • DOI: 10.1149/1.2086517

Lab-in-a-Tube: Detection of Individual Mouse Cells for Analysis in Flexible Split-Wall Microtube Resonator Sensors
journal, October 2011

  • Smith, Elliot J.; Schulze, Sabine; Kiravittaya, Suwit
  • Nano Letters, Vol. 11, Issue 10
  • DOI: 10.1021/nl1036148

From rolled-up Si microtubes to SiOx/Si optical ring resonators
journal, May 2007

  • Songmuang, R.; Rastelli, A.; Mendach, S.
  • Microelectronic Engineering, Vol. 84, Issue 5-8, p. 1427-1430
  • DOI: 10.1016/j.mee.2007.01.089

Miniature 3-D inductors in standard CMOS process
journal, April 2002

  • Chih-Chun Tang,
  • IEEE Journal of Solid-State Circuits, Vol. 37, Issue 4
  • DOI: 10.1109/4.991385

Dual cylindrical metallic grating-cladding polymer hollow waveguide for terahertz transmission with low loss
journal, September 2010

  • Tian, Dongbin; Zhang, Huaiwu; Wen, Qiye
  • Applied Physics Letters, Vol. 97, Issue 13
  • DOI: 10.1063/1.3491291

Single rolled-up InGaAs/GaAs quantum dot microtubes integrated with silicon-on-insulator waveguides
journal, January 2011

  • Tian, Zhaobing; Veerasubramanian, Venkat; Bianucci, Pablo
  • Optics Express, Vol. 19, Issue 13
  • DOI: 10.1364/OE.19.012164

Analysis of Bi-Metal Thermostats
journal, January 1925


Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films
journal, June 2007

  • Walmsley, Byron A.; Liu, Yinong; Hu, Xiao Zhi
  • Journal of Microelectromechanical Systems, Vol. 16, Issue 3
  • DOI: 10.1109/JMEMS.2007.893518

Formulas for the Skin Effect
journal, September 1942


Determination of coupling capacitance of underpasses, air bridges and crossings in MICs and MMICs
journal, January 1987


Chemical control of physical properties in silicon nitride films
journal, October 2012


Semiconductor Nanomembrane Tubes: Three-Dimensional Confinement for Controlled Neurite Outgrowth
journal, March 2011

  • Yu, Minrui; Huang, Yu; Ballweg, Jason
  • ACS Nano, Vol. 5, Issue 4
  • DOI: 10.1021/nn103618d

Physical modeling of spiral inductors on silicon
journal, March 2000

  • Yue, C. P.; Wong, S. S.
  • IEEE Transactions on Electron Devices, Vol. 47, Issue 3
  • DOI: 10.1109/16.824729

Mechanism for Nanotube Formation from Self-Bending Nanofilms Driven by Atomic-Scale Surface-Stress Imbalance
journal, April 2007


Stacked inductors and transformers in CMOS technology
journal, April 2001

  • Zolfaghari, A.; Chan, A.; Razavi, B.
  • IEEE Journal of Solid-State Circuits, Vol. 36, Issue 4
  • DOI: 10.1109/4.913740