Micro electro-mechanical heater
Abstract
A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
- Inventors:
- Issue Date:
- Research Org.:
- Hysitron, Inc., Eden Prairie, MN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1247996
- Patent Number(s):
- 9316569
- Application Number:
- 13/510,825
- Assignee:
- Hysitron, Inc. (Eden Prairie, MN)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- FG02-07ER84812
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2010 Aug 26
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 42 ENGINEERING
Citation Formats
Oh, Yunje, Asif, Syed Amanulla Syed, Cyrankowski, Edward, and Warren, Oden Lee. Micro electro-mechanical heater. United States: N. p., 2016.
Web.
Oh, Yunje, Asif, Syed Amanulla Syed, Cyrankowski, Edward, & Warren, Oden Lee. Micro electro-mechanical heater. United States.
Oh, Yunje, Asif, Syed Amanulla Syed, Cyrankowski, Edward, and Warren, Oden Lee. Tue .
"Micro electro-mechanical heater". United States. https://www.osti.gov/servlets/purl/1247996.
@article{osti_1247996,
title = {Micro electro-mechanical heater},
author = {Oh, Yunje and Asif, Syed Amanulla Syed and Cyrankowski, Edward and Warren, Oden Lee},
abstractNote = {A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {4}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
A New Paradigm for Ultra-High-Resolution Imaging at Elevated Temperatures
journal, August 2008
- Allard, Lf; Bigelow, Wc; Nackashi, D.
- Microscopy and Microanalysis, Vol. 14, Issue S2
In-situ TEM Observations on the Sintering Process of Colloidal Gold Using an Ultra-fast Heating Stage
journal, August 2008
- Briceno, M.; Hattar, K.; Damiano, J.
- Microscopy and Microanalysis, Vol. 14, Issue S2
A MEMS-based Technology Platform for in-situ TEM Heating Studies
journal, August 2008
- Damiano, J.; Nackashi, Dp; Mick, Se
- Microscopy and Microanalysis, Vol. 14, Issue S2
An in situ TEM study of phase formation in gold-aluminum couples
journal, January 2004
- Eakins, D. E.; Bahr, D. F.; Norton, M. G.
- Journal of Materials Science, Vol. 39, Issue 1
A newly developed high resolution hot stage and its application to materials characterization
journal, January 1993
- Kamino, T.; Saka, H.
- Microscopy Microanalysis Microstructures, Vol. 4, Issue 2-3
In-situ high-resolution electron microscopy study on a surface reconstruction of Au-deposited Si at very high temperatures
journal, January 1997
- Kamino, T.; Yaguchi, T.; Tomita, M.
- Philosophical Magazine A, Vol. 75, Issue 1
Crystallization behaviour of ALD-Ta 2 O 5 thin films: the application of in-situ TEM
journal, June 2005
- Min, K. -H.; Sinclair *, R.; Park, I. -S.
- Philosophical Magazine, Vol. 85, Issue 18
In situ Observation of Solid–liquid Interfaces by Transmission Electron Microscopy
journal, July 2005
- Saka, H.; Sasaki, K.; Tsukimoto, S.
- Journal of Materials Research, Vol. 20, Issue 7
In-situ TEM observation of transformation of dislocations from shuffle to glide sets in Si under supersaturation of interstitials
journal, October 2006
- Saka, H.; Yamamoto, K.; Arai, S.
- Philosophical Magazine, Vol. 86, Issue 29-31
In situ high resolution electron microscopy/electron energy loss spectroscopy observation of wetting of a Si surface by molten Al
journal, July 2001
- Tsukimoto, S.; Arai, S.; Konno, M.
- Journal of Microscopy, Vol. 203, Issue 1
Direct Observation of Vapor−Liquid−Solid Nanowire Growth
journal, April 2001
- Wu, Yiying; Yang, Peidong
- Journal of the American Chemical Society, Vol. 123, Issue 13, p. 3165-3166
Specimen heating and positioning device for an electron microscope
patent, July 1975
- Nukui, Shigeru; Mikazuki, Hideaki
- US Patent Document 3,896,314
Anti-drift device for side entry electron microscope specimen holders
patent, October 1987
- Swann, Peter R.; Kraus, Bernd
- US Patent Document 4,703,181
Specimen heating holder for electron microscopes
patent, February 1991
- Jones, Joseph S.; Swann, Peter R.
- US Patent Document 4,996,433
Test specimen/jaw assembly that exhibits both self-resistive and self-inductive heating in response to an alternating electrical current flowing therethrough
patent, April 1993
- Ferguson, Hugo S.
- US Patent Document 5,202,542
Electron microscope specimen holder
patent, November 1994
- Aoyama, Takashi; Hosoi, Kishu; Misawa, Yutaka
- US Patent Document 5,367,171
Hot grip assembly
patent, April 1996
- Myers, Jeffrey Lynn; Aho, Robert W.; Carper, Douglas Melton
- US Patent Document 5,512,727
Variable temperature scanning probe microscope based on a peltier device
patent, August 1997
- Lindsay, Stuart
- US Patent Document 5,654,546
Multi-dimensional capacitive transducer
patent, August 1997
- Bonin, Wayne A.
- US Patent Document 5,661,235
Hot stage for scanning probe microscope
patent, March 1998
- DiBattista, Michael; Patel, Sanjay V.; Gland, John L.
- US Patent Document 5,731,587
Heated stage for a scanning probe microscope
patent, October 1998
- Lindsay, Stuart; Jing, Tianwei
- US Patent Document 5,821,545
Multi-dimensional capacitive transducer
patent, February 1999
- Bonin, Wayne A.
- US Patent Document 5,869,751
Adhesion strength testing using a depth-sensing indentation technique
patent, January 2002
- Tsui, Ting; Joo, Young-Chang
- US Patent Document 6,339,958
Sample heating holder, method of observing a sample and charged particle beam apparatus
patent, December 2002
- Yaguchi, Toshie; Kamino, Takeo; Tomita, Masahiro
- US Patent Document 6,495,838
Test apparatus and method of measuring mar resistance of film or coating
patent, February 2003
- Lin, Li-Chi
- US Patent Document 6,520,004
Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems
patent, September 2007
- Green, Steven E.; He, Ping; Pfeiffer, Galen L.
- US Patent Document 7,274,450
Nanoindentation surface analysis tool and method
patent, November 2008
- Bradshaw, Richard L.; Duerig, Urs T.; Gotsmann, Bernd W.
- US Patent Document 7,451,636
Measuring head for nanoindentation instrument and measuring method using same
patent, March 2010
- Woirgard, Jacques; Bellaton, Bertand; Consiglio, Richard
- US Patent Document 7,685,868
Double tilt transmission electron microscope sample holder for in-situ measurement of microstructures
patent, October 2013
- Han, Xiaodong; Yue, Yonghai; Zhang, Yuefei
- US Patent Document 8,569,714
Indenter assembly
patent, January 2014
- Patten, Justin D.; Young, Christopher David; Keranen, Lucas Paul
- US Patent Document 8,631,687
System and method for testing of bonds of a semiconductor assembly
patent, September 2014
- Peecock, Benjamin Kingsley Stuart; King, Philip J.
- US Patent Document 8,844,368
Heat emitting probe and heat emitting probe apparatus
patent-application, August 2002
- Nakayama, Yoshikazu; Harada, Akio
- US Patent Application 10/074624; 20020110177
TEM MEMS device holder and method of fabrication
patent-application, February 2006
- Zhang, Ming; Petrov, Ivan; Wen, Jianguo
- US Patent Application 11/192300; 20060025002
Technique for applying direct resistance heating current to a specific location in a specimen under test while substantially reducing thermal gradients in the specimen gauge length
patent-application, August 2006
- Lindeman, Norman A.
- US Patent Application 11/351524; 20060180577
Microfabricated Cantilever Chip
patent-application, December 2007
- Molhave, Kristian
- US Patent Application 11/737295; 20070278420
Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
patent-application, April 2008
- Majumdar, Arun; Shakouri, Ali; Sands, Timothy D.
- US Patent Application 11/645236; 20080092938
Mems Nanoindenter
patent-application, November 2008
- Enoksson, Peter; Nafari, Alexandra; Olin, Hakan
- US Patent Application 10/586729; 20080276727
Heating Stage For A Micro-Sample
patent-application, November 2008
- Nagakubo, Yasuhira; Tanigaki, Toshiaki; Itou, Katsuji
- US Patent Application 12/123168; 20080290290
Method Of Preparing A Substrate With A Composition Including An Organoborane Initiator
patent-application, April 2009
- Ahn, Dongchan; Wier, Kevin
- US Patent Application 12/258139; 20090111701
Nanoindentation Surface Analysis Method
patent-application, May 2009
- Bradshaw, Richard L.; Duerig, Urs T.; Gotsmann, Bernd W.
- US Patent Application 12/251136; 20090120172
Method And System For Measuring Properties Of Microstructures And Nanostructures
patent-application, August 2009
- Abramson, Alexis; Prakash, Vikas; Singh, Utkarsha
- US Patent Application 12/303506; 20090194689
Electron Beam Observation Device Using Pre-Specimen Magnetic Field As Image-Forming Lens And Specimen Observation Method
patent-application, August 2009
- Kashai, Hiroto; Harada, Ken
- US Patent Document 12/270422; 20090206258
Probe Card Thermal Conditioning System
patent-application, November 2009
- Ondricek, Douglas S.
- US Patent Application 12/267735; 20090289050
Micro/Nano-Mechanical Test System Employing Tensile Test Holder With Push-To-Pull Transformer
patent-application, April 2010
- Oh, Yunje; Cyrankowski, Edward; Shan, Zhiwei
- US Patent Application 12/575368; 20100095780
Micromachined Comb Drive For Quantitative Nanoindentation
patent-application, June 2010
- Oh, Yunje; Syed Asif, Syed Amanula; Warren, Oden
- US Patent Application 12/497834; 20100132441
Nanoindenter
patent-application, July 2010
- Bonilla, Flavio Alejandro; Proksch, Roger; Cleveland, Jason
- US Patent Application 12/729339; 20100180356
Microtesting Rig with Variable Compliance Loading Fibers for Measuring Mechanical Properties of Small Specimens
patent-application, July 2010
- Wheeler, IV, Robert; Shade, Paul A.; Uchic, Michael D.
- US Patent Application 12/617655; 2010018652
Tip Indenting Apparatus for Testing a Block of Material
patent-application, August 2010
- Passilly, Bruno; Bejet, Michel
- US Patent Application 12/447412; 20100212411
Apparatus and methods for preparing identification features including pharmaceutical applications
patent-application, November 2010
- Loiret-Bernal, Cedric; Rosner, Bjoern; Cruchon-Dupeyrat, Sylvain
- US Patent Application 11/305327; 20100294147
Sensor For Quantitative Measurement Of Electromechanical Properties And Microstructure Of Nano-Materials And Method For Making The Same
patent-application, May 2011
- Han, Xiaodong; Liu, Pan; Yue, Yonghai
- US Patent Application 12/756131; 20110107472
Methods And Instruments For Assessing Bone Fracture Risk
patent-application, June 2011
- Hansma, Paul K.; Rehn, Douglas J.; Fantner, Georg
- US Patent Application 13/006974; 20110152724
Indenter Assembly
patent-application, October 2011
- Patten, Justin D.; Young, Christopher David; Keranen, Lucas Paul
- US Patent Application 13/090036; 20110252874
System And Method For Testing Of Bonds Of A Semiconductor Assembly
patent-application, November 2011
- Peecock, Benjamin K.; King, Philip John
- US Patent Application 13/093262; 20110277555
System And Method For Testing Of Bonds Of A Semiconductor Assembly
patent-application, November 2011
- Peecock, Benjamin K.; King, Philip John
- US Patent Application 13/093264; 20110277556
Probe Tip Heating Assembly
patent-application, November 2014
- Schmitz, Roger William; Oh, Yunje
- US Patent Application 14/358065; 20140326707
High Temperature Heating System
patent-application, November 2014
- Keranen, Lucas Paul; Asif, Syed Amanulla Syed; Major, Ryan
- US Patent Application 14/361094; 20140331782
High Temperature Heating System
patent-application, February 2015
- Asif, Syed Amanulla Syed; Cyrankowski, Edward; Keranen, Lucas Paul
- US Patent Application 14/361133; 20150033835
Microscopy Support Structures
patent-application, June 2015
- Damiano, Jr., John; Mick, Stephen E.; Nackashi, David P.
- US Patent Application 14/525894; 20150179397
Environmental Conditioning Assembly For Use In Mechanical Testing At Micron Or Nano-Scales
patent-application, July 2015
- Schmitz, Roger William; Hangen, Ude D.
- US Patent Application 14/407783; 20150185117