PLZT capacitor on glass substrate
Abstract
A lead-lanthanum-zirconium-titanate (PLZT) capacitor on a substrate formed of glass. The first metallization layer is deposited on a top side of the substrate to form a first electrode. The dielectric layer of PLZT is deposited over the first metallization layer. The second metallization layer deposited over the dielectric layer to form a second electrode. The glass substrate is advantageous as glass is compatible with an annealing process used to form the capacitor.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1244223
- Patent Number(s):
- 9299496
- Application Number:
- 14/873,532
- Assignee:
- Delphi Technologies, Inc. (Troy, MI) UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01G - CAPACITORS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Oct 02
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 25 ENERGY STORAGE; 36 MATERIALS SCIENCE
Citation Formats
Fairchild, Manuel Ray, Taylor, Ralph S., Berlin, Carl W., Wong, Celine Wk, Ma, Beihai, and Balachandran, Uthamalingam. PLZT capacitor on glass substrate. United States: N. p., 2016.
Web.
Fairchild, Manuel Ray, Taylor, Ralph S., Berlin, Carl W., Wong, Celine Wk, Ma, Beihai, & Balachandran, Uthamalingam. PLZT capacitor on glass substrate. United States.
Fairchild, Manuel Ray, Taylor, Ralph S., Berlin, Carl W., Wong, Celine Wk, Ma, Beihai, and Balachandran, Uthamalingam. Tue .
"PLZT capacitor on glass substrate". United States. https://www.osti.gov/servlets/purl/1244223.
@article{osti_1244223,
title = {PLZT capacitor on glass substrate},
author = {Fairchild, Manuel Ray and Taylor, Ralph S. and Berlin, Carl W. and Wong, Celine Wk and Ma, Beihai and Balachandran, Uthamalingam},
abstractNote = {A lead-lanthanum-zirconium-titanate (PLZT) capacitor on a substrate formed of glass. The first metallization layer is deposited on a top side of the substrate to form a first electrode. The dielectric layer of PLZT is deposited over the first metallization layer. The second metallization layer deposited over the dielectric layer to form a second electrode. The glass substrate is advantageous as glass is compatible with an annealing process used to form the capacitor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {3}
}
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