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Title: Programmable electroacoustic filter apparatus and method for its manufacture

An acoustically coupled frequency selective radio frequency (RF) device is provided. The device includes a piezoelectric substrate overlain by a plurality of electrodes. The device further includes a pair of RF input terminals at least one of which is electrically connected to at least one of the electrodes, and a pair of output RF terminals, at least one of which is electrically connected to at least one other of the electrodes. At least one of the electrodes is electromechanically reconfigurable between a state in which it is closer to a face of the piezoelectric substrate and at least one state in which it is farther from the face of the piezoelectric substrate.
Inventors:
; ; ; ;
Issue Date:
OSTI Identifier:
1240426
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
Patent Number(s):
9,276,557
Application Number:
13/932,859
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2013 Jul 01
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Other works cited in this record:

Applications of surface acoustic and shallow bulk acoustic wave devices
journal, January 1989
  • Campbell, C.K.
  • Proceedings of the IEEE, Vol. 77, Issue 10, p. 1453-1484
  • DOI: 10.1109/5.40664

MEMS technology for timing and frequency control
journal, January 2007
  • Nguyen, Clark
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 54, Issue 2, p. 251-270
  • DOI: 10.1109/TUFFC.2007.240

Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
conference, June 2009
  • Wojciechowski, K. E.; Olsson, R. H.; Tuck, M. R.
  • Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • DOI: 10.1109/SENSOR.2009.5285626

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