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Title: Methods of producing strain in a semiconductor waveguide and related devices

Abstract

Quasi-phase matched (QPM), semiconductor photonic waveguides include periodically-poled alternating first and second sections. The first sections exhibit a high degree of optical coupling (abbreviated "X.sup.2"), while the second sections have a low X.sup.2. The alternating first and second sections may comprise high-strain and low-strain sections made of different material states (such as crystalline and amorphous material states) that exhibit high and low X.sup.2 properties when formed on a particular substrate, and/or strained corrugated sections of different widths. The QPM semiconductor waveguides may be implemented as silicon-on-insulator (SOI), or germanium-on-silicon structures compatible with standard CMOS processes, or as silicon-on-sapphire (SOS) structures.

Inventors:
;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1240405
Patent Number(s):
9,261,647
Application Number:
14/012,877
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Aug 28
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE

Citation Formats

Cox, Johathan Albert, and Rakich, Peter Thomas. Methods of producing strain in a semiconductor waveguide and related devices. United States: N. p., 2016. Web.
Cox, Johathan Albert, & Rakich, Peter Thomas. Methods of producing strain in a semiconductor waveguide and related devices. United States.
Cox, Johathan Albert, and Rakich, Peter Thomas. Tue . "Methods of producing strain in a semiconductor waveguide and related devices". United States. https://www.osti.gov/servlets/purl/1240405.
@article{osti_1240405,
title = {Methods of producing strain in a semiconductor waveguide and related devices},
author = {Cox, Johathan Albert and Rakich, Peter Thomas},
abstractNote = {Quasi-phase matched (QPM), semiconductor photonic waveguides include periodically-poled alternating first and second sections. The first sections exhibit a high degree of optical coupling (abbreviated "X.sup.2"), while the second sections have a low X.sup.2. The alternating first and second sections may comprise high-strain and low-strain sections made of different material states (such as crystalline and amorphous material states) that exhibit high and low X.sup.2 properties when formed on a particular substrate, and/or strained corrugated sections of different widths. The QPM semiconductor waveguides may be implemented as silicon-on-insulator (SOI), or germanium-on-silicon structures compatible with standard CMOS processes, or as silicon-on-sapphire (SOS) structures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {2}
}

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Works referenced in this record:

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