Laser processing of solar cells with anti-reflective coating

Harley, Gabriel; Smith, David D.; Dennis, Tim; Waldhauer, Ann; Kim, Taeseok; Cousins, Peter John

Title: Laser processing of solar cells with anti-reflective coating

Abstract

Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.

Inventors:: Harley, Gabriel; Smith, David D.; Dennis, Tim; Waldhauer, Ann; Kim, Taeseok; Cousins, Peter John

Issue Date:: 2016-02-16

Research Org.:: SunPower Corporation, San Jose, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1240400

Patent Number(s):: 9263602

Application Number:: 14/061,584

Assignee:: SunPower Corporation (San Jose, CA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/022441 - {Electrode arrangements specially adapted for back-contact solar cells}
H01L31/1804 - {comprising only elements of Group IV of the Periodic System}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/52 - PV systems with concentrators
Y02E10/547 - Monocrystalline silicon PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/0682 - {back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells}
H01L31/02168 - {the coatings being antireflective or having enhancing optical properties for the solar cells}

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DOE Contract Number:: FC36-07GO17043

Resource Type:: Patent

Resource Relation:: Patent File Date: 2013 Oct 23

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY; 36 MATERIALS SCIENCE

Citation Formats


                    Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Laser processing of solar cells with anti-reflective coating.  United States: N. p., 2016. 
        Web.

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                    Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, & Cousins, Peter John. Laser processing of solar cells with anti-reflective coating.  United States.

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                    Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Tue .  
        "Laser processing of solar cells with anti-reflective coating".  United States.  https://www.osti.gov/servlets/purl/1240400.

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@article{osti_1240400,

  title        = {Laser processing of solar cells with anti-reflective coating},

  author       = {Harley, Gabriel and Smith, David D. and Dennis, Tim and Waldhauer, Ann and Kim, Taeseok and Cousins, Peter John},

  abstractNote = {Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2016},

  month        = {2}

}

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Works referenced in this record:

Decoupling charge carrier collection and metallization geometry of back-contacted back-junction silicon solar cells by using insulating thin films
conference, June 2010

Reichel, C.; Reusch, M.; Granek, F.
2010 35th IEEE Photovoltaic Specialists Conference (PVSC)
https://doi.org/10.1109/PVSC.2010.5614640

Laser ablation and contact formation for Cu-plated large area C-silicon industrial solar cells
conference, June 2010

Hernandez, J. L.; Allebe, C.; Tous, L.
2010 35th IEEE Photovoltaic Specialists Conference (PVSC)
https://doi.org/10.1109/PVSC.2010.5615920

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Title: Laser processing of solar cells with anti-reflective coating

Abstract

Citation Formats

Decoupling charge carrier collection and metallization geometry of back-contacted back-junction silicon solar cells by using insulating thin films conference, June 2010

Laser ablation and contact formation for Cu-plated large area C-silicon industrial solar cells conference, June 2010

Decoupling charge carrier collection and metallization geometry of back-contacted back-junction silicon solar cells by using insulating thin films
conference, June 2010

Laser ablation and contact formation for Cu-plated large area C-silicon industrial solar cells
conference, June 2010