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Title: Nanostructures having high performance thermoelectric properties

Abstract

The invention provides for a nanostructure, or an array of such nanostructures, each comprising a rough surface, and a doped or undoped semiconductor. The nanostructure is an one-dimensional (1-D) nanostructure, such a nanowire, or a two-dimensional (2-D) nanostructure. The nanostructure can be placed between two electrodes and used for thermoelectric power generation or thermoelectric cooling.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1233515
Patent Number(s):
9,219,215
Application Number:
14/226,569
Assignee:
The Regents of The University of California
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Mar 26
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; 24 POWER TRANSMISSION AND DISTRIBUTION

Citation Formats

Yang, Peidong, Majumdar, Arunava, Hochbaum, Allon I., Chen, Renkun, and Delgado, Raul Diaz. Nanostructures having high performance thermoelectric properties. United States: N. p., 2015. Web.
Yang, Peidong, Majumdar, Arunava, Hochbaum, Allon I., Chen, Renkun, & Delgado, Raul Diaz. Nanostructures having high performance thermoelectric properties. United States.
Yang, Peidong, Majumdar, Arunava, Hochbaum, Allon I., Chen, Renkun, and Delgado, Raul Diaz. Tue . "Nanostructures having high performance thermoelectric properties". United States. https://www.osti.gov/servlets/purl/1233515.
@article{osti_1233515,
title = {Nanostructures having high performance thermoelectric properties},
author = {Yang, Peidong and Majumdar, Arunava and Hochbaum, Allon I. and Chen, Renkun and Delgado, Raul Diaz},
abstractNote = {The invention provides for a nanostructure, or an array of such nanostructures, each comprising a rough surface, and a doped or undoped semiconductor. The nanostructure is an one-dimensional (1-D) nanostructure, such a nanowire, or a two-dimensional (2-D) nanostructure. The nanostructure can be placed between two electrodes and used for thermoelectric power generation or thermoelectric cooling.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {12}
}

Patent:

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Works referenced in this record:

Synthesis of Large-Area Silicon Nanowire Arrays via Self-Assembling Nanoelectrochemistry
journal, August 2002


Synthesis of Ordered Single Crystal Silicon Nanowire Arrays
journal, August 2001


Thermoelectric Cooling and Power Generation
journal, July 1999


Thermal conductivity of individual silicon nanowires
journal, October 2003

  • Li, Deyu; Wu, Yiying; Kim, Philip
  • Applied Physics Letters, Vol. 83, Issue 14, p. 2934-2936
  • DOI: 10.1063/1.1616981

Transport properties of silicon
journal, August 1991

  • Weber, L.; Gmelin, E.
  • Applied Physics A Solids and Surfaces, Vol. 53, Issue 2
  • DOI: 10.1007/BF00323873

Dendrite-Assisted Growth of Silicon Nanowires in Electroless Metal Deposition
journal, February 2003

  • Peng, K.; Yan, Y.; Gao, S.
  • Advanced Functional Materials, Vol. 13, Issue 2, p. 127-132
  • DOI: 10.1002/adfm.200390018

Uniform, Axial-Orientation Alignment of One-Dimensional Single-Crystal Silicon Nanostructure Arrays
journal, April 2005

  • Peng, Kuiqing; Wu, Yin; Fang, Hui
  • Angewandte Chemie International Edition, Vol. 44, Issue 18, p. 2737-2742
  • DOI: 10.1002/anie.200462995

Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications
journal, September 2005


Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy
journal, September 2003

  • Tao, Andrea; Kim, Franklin; Hess, Christian
  • Nano Letters, Vol. 3, Issue 9, p. 1229-1233
  • DOI: 10.1021/nl0344209

Phonon-boundary scattering in thin silicon layers
journal, September 1997

  • Asheghi, M.; Leung, Y. K.; Wong, S. S.
  • Applied Physics Letters, Vol. 71, Issue 13
  • DOI: 10.1063/1.119402

Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates
journal, February 1998

  • Asheghi, M.; Touzelbaev, M. N.; Goodson, K. E.
  • Journal of Heat Transfer, Vol. 120, Issue 1
  • DOI: 10.1115/1.2830059

Phonon scattering in silicon films with thickness of order 100 nm
journal, May 1999

  • Ju, Y. S.; Goodson, K. E.
  • Applied Physics Letters, Vol. 74, Issue 20
  • DOI: 10.1063/1.123994

Controlled Growth of Si Nanowire Arrays for Device Integration
journal, March 2005

  • Hochbaum, Allon I.; Fan, Rong; He, Rongrui
  • Nano Letters, Vol. 5, Issue 3, p. 457-460
  • DOI: 10.1021/nl047990x

Measuring Thermal and Thermoelectric Properties of One-Dimensional Nanostructures Using a Microfabricated Device
journal, September 2003

  • Shi, Li; Li, Deyu; Yu, Choongho
  • Journal of Heat Transfer, Vol. 125, Issue 5
  • DOI: 10.1115/1.1597619

MATERIALS SCIENCE: Enhanced: Thermoelectricity in Semiconductor Nanostructures
journal, February 2004


Cubic AgPbmSbTe2+m: Bulk Thermoelectric Materials with High Figure of Merit
journal, February 2004


Quantum Dot Superlattice Thermoelectric Materials and Devices
journal, September 2002


Thin-film thermoelectric devices with high room-temperature figures of merit
journal, October 2001

  • Venkatasubramanian, Rama; Siivola, Edward; Colpitts, Thomas
  • Nature, Vol. 413, Issue 6856, p. 597-602
  • DOI: 10.1038/35098012

Thermal Conductivity Reduction and Thermoelectric Figure of Merit Increase by Embedding Nanoparticles in Crystalline Semiconductors
journal, February 2006


Phonon heat conduction in a semiconductor nanowire
journal, March 2001

  • Zou, Jie; Balandin, Alexander
  • Journal of Applied Physics, Vol. 89, Issue 5
  • DOI: 10.1063/1.1345515

Thermal conductivity and thermoelectric power of heavily doped n-type silicon
journal, March 1970


Thermal conductivity of isotopically enriched silicon
journal, June 2000


Thermal conductivity of amorphous solids above the plateau
journal, March 1987


Seebeck Effect in Silicon
journal, May 1955


The seebeck effect in silicon ICs
journal, December 1984


Cooling, Heating, Generating Power, and Recovering Waste Heat with Thermoelectric Systems
journal, September 2008


Hopping transport on a fractal: ac conductivity of porous silicon
journal, January 1995


MEMS applications of porous silicon
conference, November 2001

  • Benecke, Wolfgang; Splinter, Alexandra
  • International Symposium on Microelectronics and MEMS, SPIE Proceedings
  • DOI: 10.1117/12.449009

Preparation of monodisperse silica particles: Control of size and mass fraction
journal, August 1988

  • Bogush, G. H.; Tracy, M. A.; Zukoski, C. F.
  • Journal of Non-Crystalline Solids, Vol. 104, Issue 1, p. 95-106
  • DOI: 10.1016/0022-3093(88)90187-1

Silicon nanowires as efficient thermoelectric materials
journal, January 2008

  • Boukai, Akram I.; Bunimovich, Yuri; Tahir-Kheli, Jamil
  • Nature, Vol. 451, Issue 7175, p. 168-171
  • DOI: 10.1038/nature06458

Nanostructured Bulk Silicon as an Effective Thermoelectric Material
journal, August 2009

  • Bux, Sabah K.; Blair, Richard G.; Gogna, Pawan K.
  • Advanced Functional Materials, Vol. 19, Issue 15, p. 2445-2452
  • DOI: 10.1002/adfm.200900250

Lower limit to the thermal conductivity of disordered crystals
journal, September 1992

  • Cahill, David G.; Watson, S. K.; Pohl, R. O.
  • Physical Review B, Vol. 46, Issue 10, p. 6131-6140
  • DOI: 10.1103/PhysRevB.46.6131

Metal-assisted chemical etching of silicon in HF–H2O2
journal, July 2008


Thermal Conductance of Thin Silicon Nanowires
journal, September 2008


Wafer-Scale Synthesis of Single-Crystal Zigzag Silicon Nanowire Arrays with Controlled Turning Angles
journal, March 2010

  • Chen, Huan; Wang, Hui; Zhang, Xiao-Hong
  • Nano Letters, Vol. 10, Issue 3
  • DOI: 10.1021/nl903391x

Vertically-Aligned of Sub-Millimeter Ultralong Si Nanowire Arrays and Its Reduced Phonon Thermal Conductivity
journal, January 2011

  • Chen, Chia-Yun; Phan, Duong Hong; Wong, Cheng-Chou
  • Journal of The Electrochemical Society, Vol. 158, Issue 5
  • DOI: 10.1149/1.3569752

Fabrication of Vertically Aligned Silicon Nanowire Arrays and Investigation on the Formation of the Nickel Silicide Nanowires
conference, December 2007

  • Cheng, S. L.; Chung, C. H.; Lee, H. C.
  • 2007 IEEE Conference on Electron Devices and Solid-State Circuits
  • DOI: 10.1109/EDSSC.2007.4450077

Biodegradable Porous Silicon Barcode Nanowires with Defined Geometry
journal, June 2010

  • Chiappini, Ciro; Liu, Xuewu; Fakhoury, Jean Raymond
  • Advanced Functional Materials, Vol. 20, Issue 14, p. 2231-2239
  • DOI: 10.1002/adfm.201000360

Ultralow Thermal Conductivity in Disordered, Layered WSe2 Crystals
journal, January 2007


High Performance Silicon Nanowire Field Effect Transistors
journal, February 2003

  • Cui, Yi; Zhong, Zhaohui; Wang, Deli
  • Nano Letters, Vol. 3, Issue 2
  • DOI: 10.1021/nl025875l

Formation of a-Si:H and a-Si1-xCx :H nanowires by Ag-assisted electroless etching in aqueous HF/AgNO3 solution
journal, June 2011

  • Douani, Rachida; Piret, Gaëlle; Hadjersi, Toufik
  • Thin Solid Films, Vol. 519, Issue 16, p. 5383-5387
  • DOI: 10.1016/j.tsf.2011.02.047

Synthesis and Optical Properties of Silver Nanoparticles and Arrays
journal, July 2005


Silver catalysis in the fabrication of silicon nanowire arrays
journal, July 2006


Selective Growth of Si Nanowire Arrays via Galvanic Displacement Processes in Water-in-Oil Microemulsions
journal, April 2005

  • Gao, Di; He, Rongrui; Carraro, Carlo
  • Journal of the American Chemical Society, Vol. 127, Issue 13
  • DOI: 10.1021/ja043645y

Temperature-dependent thermal conductivity of porous silicon
journal, November 1997


Electrical Characteristics and Chemical Stability of Non-Oxidized, Methyl-Terminated Silicon Nanowires
journal, June 2006

  • Haick, Hossam; Hurley, Patrick T.; Hochbaum, Allon I.
  • Journal of the American Chemical Society, Vol. 128, Issue 28, p. 8990-8991
  • DOI: 10.1021/ja056785w

Frequency-dependent Monte Carlo simulations of phonon transport in two-dimensional porous silicon with aligned pores
journal, December 2009

  • Hao, Qing; Chen, Gang; Jeng, Ming-Shan
  • Journal of Applied Physics, Vol. 106, Issue 11
  • DOI: 10.1063/1.3266169

Solution−Liquid−Solid (SLS) Growth of Silicon Nanowires
journal, April 2008

  • Heitsch, Andrew T.; Fanfair, Dayne D.; Tuan, Hsing-Yu
  • Journal of the American Chemical Society, Vol. 130, Issue 16
  • DOI: 10.1021/ja8011353

Enhanced thermoelectric performance of rough silicon nanowires
journal, January 2008

  • Hochbaum, Allon I.; Chen, Renkun; Delgado, Raul Diaz
  • Nature, Vol. 451, Issue 7175, p. 163-167
  • DOI: 10.1038/nature06381

Single Crystalline Mesoporous Silicon Nanowires
journal, October 2009

  • Hochbaum, Allon I.; Gargas, Daniel; Hwang, Yun Jeong
  • Nano Letters, Vol. 9, Issue 10
  • DOI: 10.1021/nl9017594

Metal-Assisted Chemical Etching of Silicon: A Review
journal, September 2010

  • Huang, Zhipeng; Geyer, Nadine; Werner, Peter
  • Advanced Materials, Vol. 23, Issue 2, p. 285-308
  • DOI: 10.1002/adma.201001784

Oxidation Rate Effect on the Direction of Metal-Assisted Chemical and Electrochemical Etching of Silicon
journal, May 2010

  • Huang, Zhipeng; Shimizu, Tomohiro; Senz, Stephan
  • The Journal of Physical Chemistry C, Vol. 114, Issue 24
  • DOI: 10.1021/jp911121q

Synthesis of uniform, spherical sub-100nm silica particles using a conceptual modification of the classic LaMer model
journal, May 2010

  • Huang, Yuan; Pemberton, Jeanne E.
  • Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 360, Issue 1-3, p. 175-183
  • DOI: 10.1016/j.colsurfa.2010.02.031

Curved Silicon Nanowires with Ribbon-like Cross Sections by Metal-Assisted Chemical Etching
journal, May 2011

  • Kim, Jungkil; Kim, Young Heon; Choi, Suk-Ho
  • ACS Nano, Vol. 5, Issue 6
  • DOI: 10.1021/nn2014358

Thermal transport properties of thin films of small molecule organic semiconductors
journal, December 2005

  • Kim, Namsu; Domercq, Benoit; Yoo, Seunghyup
  • Applied Physics Letters, Vol. 87, Issue 24
  • DOI: 10.1063/1.2140478

Silicon nanostructures from electroless electrochemical etching
journal, February 2005


Scalable Nanopillar Arrays with Layer-by-Layer Patterned Overt and Covert Images
journal, August 2014

  • Lee, Kyoung G.; Choi, Bong Gill; Kim, Byeong Il
  • Advanced Materials, Vol. 26, Issue 35, p. 6119-6124
  • DOI: 10.1002/adma.201401246

Lower Limit of Thermal Conductivity: Diffusion Versus Localization
journal, February 1998


Modeling of carrier mobility against carrier concentration in arsenic-, phosphorus-, and boron-doped silicon
journal, July 1983

  • Masetti, G.; Severi, M.; Solmi, S.
  • IEEE Transactions on Electron Devices, Vol. 30, Issue 7
  • DOI: 10.1109/T-ED.1983.21207

Thermoelectric power in porous silicon
journal, June 1998

  • Mathur, R. G.; Mehra, R. M.; Mathur, P. C.
  • Journal of Applied Physics, Vol. 83, Issue 11
  • DOI: 10.1063/1.367444

Predicting the Thermal Conductivity of Si and Ge Nanowires
journal, December 2003

  • Mingo, Natalio; Yang, Liu; Li, Deyu
  • Nano Letters, Vol. 3, Issue 12
  • DOI: 10.1021/nl034721i

Mechanism of Metallic Particle Growth and Metal-Induced Pitting on Si Wafer Surface in Wet Chemical Processing
journal, January 1994

  • Morinaga, Hitoshi
  • Journal of The Electrochemical Society, Vol. 141, Issue 10
  • DOI: 10.1149/1.2059240

Mechanism of silicon etching in HF-KMnO4-H2O solution
journal, April 1995

  • Nahm, Kee Suk; Seo, Young Hun
  • Korean Journal of Chemical Engineering, Vol. 12, Issue 2
  • DOI: 10.1007/BF02705641

Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films
journal, February 2008


Oscillations of open-circuit potential during immersion plating of silicon in CuSO4/HF solutions
journal, May 2006


Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006

  • Peng, K. Q.; Hu, J. J.; Yan, Y. J.
  • Advanced Functional Materials, Vol. 16, Issue 3, p. 387-394
  • DOI: 10.1002/adfm.200500392

Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching
journal, October 2008

  • Peng, Kuiqing; Lu, Aijiang; Zhang, Ruiqin
  • Advanced Functional Materials, Vol. 18, Issue 19
  • DOI: 10.1002/adfm.200800371

An Etchant System, Ag[sub 2]CrO[sub 4]–HF–H[sub 2]O, for Highly Aligned Si Nanowire Fabrication
journal, January 2010

  • Rokugawa, Hiroshi; Adachi, Sadao
  • Journal of The Electrochemical Society, Vol. 157, Issue 8
  • DOI: 10.1149/1.3436643

Direct Imprinting of Porous Substrates: A Rapid and Low-Cost Approach for Patterning Porous Nanomaterials
journal, May 2011

  • Ryckman, Judson D.; Liscidini, Marco; Sipe, J. E.
  • Nano Letters, Vol. 11, Issue 5
  • DOI: 10.1021/nl1028073

Monte Carlo Simulation of Phonon Backscattering in a Nanowire
conference, January 2006

  • Saha, Sanjoy; Shi, Li; Prasher, Ravi S.
  • ASME 2006 International Mechanical Engineering Congress and Exposition, Heat Transfer, Volume 1
  • DOI: 10.1115/IMECE2006-15668

Measuring Thermal and Thermoelectric Properties of One-Dimensional Nanostructures Using a Microfabricated Device
journal, September 2003

  • Shi, Li; Li, Deyu; Yu, Choongho
  • Journal of Heat Transfer, Vol. 125, Issue 5
  • DOI: 10.1115/1.1597619

Realization of Vertical and Zigzag Single Crystalline Silicon Nanowire Architectures
journal, February 2010

  • Sivakov, V. A.; Brönstrup, G.; Pecz, B.
  • The Journal of Physical Chemistry C, Vol. 114, Issue 9
  • DOI: 10.1021/jp909946x

Complex thermoelectric materials
journal, February 2008

  • Snyder, G. Jeffrey; Toberer, Eric S.
  • Nature Materials, Vol. 7, Issue 2, p. 105-114
  • DOI: 10.1038/nmat2090

Nanostructured Plasmonic Sensors
journal, February 2008

  • Stewart, Matthew E.; Anderton, Christopher R.; Thompson, Lucas B.
  • Chemical Reviews, Vol. 108, Issue 2
  • DOI: 10.1021/cr068126n

Controlled growth of monodisperse silica spheres in the micron size range
journal, January 1968

  • Stöber, Werner; Fink, Arthur; Bohn, Ernst
  • Journal of Colloid and Interface Science, Vol. 26, Issue 1, p. 62-69
  • DOI: 10.1016/0021-9797(68)90272-5

Thermal boundary resistance
journal, July 1989


Holey Silicon as an Efficient Thermoelectric Material
journal, October 2010

  • Tang, Jinyao; Wang, Hung-Ta; Lee, Dong Hyun
  • Nano Letters, Vol. 10, Issue 10
  • DOI: 10.1021/nl102931z

Thermoelectrics: Direct Solar Thermal Energy Conversion
journal, April 2008

  • Tritt, Terry M.; Böttner, Harald; Chen, Lidong
  • MRS Bulletin, Vol. 33, Issue 4
  • DOI: 10.1557/mrs2008.73

Metallic Nanowires by Full Wafer Stencil Lithography
journal, November 2008

  • Vazquez-Mena, O.; Villanueva, G.; Savu, V.
  • Nano Letters, Vol. 8, Issue 11, p. 3675-3682
  • DOI: 10.1021/nl801778t

Complementary Symmetry Silicon Nanowire Logic: Power‐Efficient Inverters with Gain
journal, August 2006


A new type of low power thermoelectric micro-generator fabricated by nanowire array thermoelectric material
journal, April 2005

  • Wang, Wei; Jia, Falong; Huang, Qinghua
  • Microelectronic Engineering, Vol. 77, Issue 3-4, p. 223-229
  • DOI: 10.1016/j.mee.2004.11.005

Nanoparticle-Textured Surfaces from Spin Coating
journal, May 2008

  • Weiss, R. A.; Zhai, X.; Dobrynin, A. V.
  • Langmuir, Vol. 24, Issue 10
  • DOI: 10.1021/la8001509

Thermoelectric transport properties of porous silicon nanostructure
conference, January 1999

  • Yamamoto, A.; Takazawa, H.; Ohta, T.
  • Eighteenth International Conference on Thermoelectrics. Proceedings, ICT'99 (Cat. No.99TH8407)
  • DOI: 10.1109/ICT.1999.843422

Thermoelectric Materials for Space and Automotive Power Generation
journal, March 2006


Study of bulk micromachining for 〈100〉 silicon
journal, July 2006

  • Zandi, K.; Arzi, E.; Izadi, N.
  • The European Physical Journal Applied Physics, Vol. 35, Issue 1
  • DOI: 10.1051/epjap:2006072