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Title: Tuning method for microresonators and microresonators made thereby

Abstract

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1228380
Patent Number(s):
9,203,134
Application Number:
13/780,285
Assignee:
Sandia Corporation
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Feb 28
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, and Stevens, James E. Tuning method for microresonators and microresonators made thereby. United States: N. p., 2015. Web.
Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, & Stevens, James E. Tuning method for microresonators and microresonators made thereby. United States.
Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, and Stevens, James E. Tue . "Tuning method for microresonators and microresonators made thereby". United States. https://www.osti.gov/servlets/purl/1228380.
@article{osti_1228380,
title = {Tuning method for microresonators and microresonators made thereby},
author = {Henry, Michael David and Olsson, Roy H. and Greth, Karl Douglas and Young, Travis Ryan and Nguyen, Janet and Stevens, James E.},
abstractNote = {A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {12}
}

Patent:

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