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Title: Tuning method for microresonators and microresonators made thereby

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.
Inventors:
; ; ; ; ;
Issue Date:
OSTI Identifier:
1228380
Assignee:
Sandia Corporation SNL-A
Patent Number(s):
9,203,134
Application Number:
13/780,285
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2013 Feb 28
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Works referenced in this record:

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