Tuning method for microresonators and microresonators made thereby

Title: Tuning method for microresonators and microresonators made thereby

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.

Inventors:: Henry, Michael David; Olsson, Roy H.; Greth, Karl Douglas; Young, Travis Ryan; Nguyen, Janet; Stevens, James E.

Issue Date:: 2015-12-01

OSTI Identifier:: 1228380

Assignee:: Sandia Corporation SNL-A

Patent Number(s):: 9,203,134

Application Number:: 13/780,285

Contract Number:: AC04-94AL85000

Resource Relation:: Patent File Date: 2013 Feb 28

Research Org:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

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Works referenced in this record:

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A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
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