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Title: Tuning method for microresonators and microresonators made thereby

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.
Inventors:
; ; ; ; ;
Issue Date:
OSTI Identifier:
1228380
Assignee:
Sandia Corporation SNL-A
Patent Number(s):
9,203,134
Application Number:
13/780,285
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2013 Feb 28
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

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AlN Microresonator-Based Filters With Multiple Bandwidths at Low Intermediate Frequencies
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  • Kim, Bongsang; Olsson, Roy H.; Wojciechowski, Ken E.
  • Journal of Microelectromechanical Systems, Vol. 22, Issue 4, p. 949-961
  • DOI: 10.1109/JMEMS.2013.2251414

CDATA[Ovenized and thermally tunable aluminum nitride microresonators
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A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
journal, March 2014
  • Olsson, Roy H.; Hattar, Khalid; Homeijer, Sara J.
  • Sensors and Actuators A: Physical, Vol. 209, p. 183-190
  • DOI: 10.1016/j.sna.2014.01.033

Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
conference, June 2009
  • Wojciechowski, K. E.; Olsson, R. H.; Tuck, M. R.
  • Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • DOI: 10.1109/SENSOR.2009.5285626

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