skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Tuning method for microresonators and microresonators made thereby

Abstract

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1228380
Patent Number(s):
9203134
Application Number:
13/780,285
Assignee:
Sandia Corporation
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01P - WAVEGUIDES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Feb 28
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, and Stevens, James E. Tuning method for microresonators and microresonators made thereby. United States: N. p., 2015. Web.
Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, & Stevens, James E. Tuning method for microresonators and microresonators made thereby. United States.
Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, and Stevens, James E. Tue . "Tuning method for microresonators and microresonators made thereby". United States. https://www.osti.gov/servlets/purl/1228380.
@article{osti_1228380,
title = {Tuning method for microresonators and microresonators made thereby},
author = {Henry, Michael David and Olsson, Roy H. and Greth, Karl Douglas and Young, Travis Ryan and Nguyen, Janet and Stevens, James E.},
abstractNote = {A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {12}
}

Patent:

Save / Share:

Works referenced in this record:

Oven-Based Thermally Tunable Aluminum Nitride Microresonators
journal, April 2013


A new wafer-level packaging technology for MEMS with hermetic micro-environment
conference, May 2011


Thermal Conductivity of AlN and SiC Thin Films
journal, May 2006


Technologies for Cofabricating MEMS and Electronics
journal, February 2008


Frequency Trimming of Aluminum Nitride Microresonators Using Rapid Thermal Annealing
journal, June 2014


Hermetic wafer-level packaging for RF MEMs: Effects on resonator performance
conference, May 2012


Platinum Diffusion Barrier Breakdown in a-Si/Au Eutectic Wafer Bonding
journal, June 2013


Frequency Trimming for MEMS Resonator Oscillators
conference, May 2007


Fully monolithic CMOS nickel micromechanical resonator oscillator
conference, January 2008


Thermal Isolation of Encapsulated MEMS Resonators
journal, February 2008


The Bond Strength of Au/Si Eutectic Bonding Studied by IR Microscope
journal, January 2010


AlN Microresonator-Based Filters With Multiple Bandwidths at Low Intermediate Frequencies
journal, August 2013


Ovenized and thermally tunable aluminum nitride microresonators
conference, October 2010


Effects of stress on the temperature coefficient of frequency in double clamped resonators
conference, January 2005

  • Melamud, R.; Hoperoft, M.; Jha, C.
  • The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
  • https://doi.org/10.1109/SENSOR.2005.1496438

A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
journal, March 2014


Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers
journal, June 2009


Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
conference, May 2007

  • Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E.
  • 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum
  • https://doi.org/10.1109/FREQ.2007.4319108

VHF and UHF mechanically coupled aluminum nitride MEMS filters
conference, May 2008


Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
journal, January 2006


Scandium aluminum nitride: Highly piezoelectric thin film for RF SAW devices in multi GHz range
conference, October 2012


High-performance crystal oscillator circuits: theory and application
journal, June 1988


Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
conference, June 2009


Super high frequency width extensional aluminum nitride (AlN) MEMS resonators
conference, September 2009


Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films
journal, October 2004