Tuning method for microresonators and microresonators made thereby

Title: Tuning method for microresonators and microresonators made thereby

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.

Inventors:: Henry, Michael David; Olsson, Roy H.; Greth, Karl Douglas; Young, Travis Ryan; Nguyen, Janet; Stevens, James E.

Issue Date:: 2015-12-01

OSTI Identifier:: 1228380

Assignee:: Sandia Corporation SNL-A

Patent Number(s):: 9,203,134

Application Number:: 13/780,285

Contract Number:: AC04-94AL85000

Resource Relation:: Patent File Date: 2013 Feb 28

Research Org:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

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Other works cited in this record:

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Olsson, Roy; Fleming, James; Tuck, Melanie
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Nano-optomechanical transducer
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Rakich, Peter T.; El-Kady, Ihab F.; Olsson, Roy H.
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patent, March 2014

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AlN Microresonator-Based Filters With Multiple Bandwidths at Low Intermediate Frequencies
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Kim, Bongsang; Olsson, Roy H.; Wojciechowski, Ken E.
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CDATA[Ovenized and thermally tunable aluminum nitride microresonators
conference, October 2010

Kim, Bongsang; Olsson, Roy H.; Wojciechowski, Kenneth E.
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A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
journal, March 2014

Olsson, Roy H.; Hattar, Khalid; Homeijer, Sara J.
Sensors and Actuators A: Physical, Vol. 209, p. 183-190
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Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
conference, June 2009

Wojciechowski, K. E.; Olsson, R. H.; Tuck, M. R.
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
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