Tuning method for microresonators and microresonators made thereby
Abstract
A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1228380
- Patent Number(s):
- 9203134
- Application Number:
- 13/780,285
- Assignee:
- Sandia Corporation
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01P - WAVEGUIDES
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013 Feb 28
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, and Stevens, James E. Tuning method for microresonators and microresonators made thereby. United States: N. p., 2015.
Web.
Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, & Stevens, James E. Tuning method for microresonators and microresonators made thereby. United States.
Henry, Michael David, Olsson, Roy H., Greth, Karl Douglas, Young, Travis Ryan, Nguyen, Janet, and Stevens, James E. Tue .
"Tuning method for microresonators and microresonators made thereby". United States. https://www.osti.gov/servlets/purl/1228380.
@article{osti_1228380,
title = {Tuning method for microresonators and microresonators made thereby},
author = {Henry, Michael David and Olsson, Roy H. and Greth, Karl Douglas and Young, Travis Ryan and Nguyen, Janet and Stevens, James E.},
abstractNote = {A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {12}
}
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