Power spectrum analysis for defect screening in integrated circuit devices
Abstract
A device sample is screened for defects using its power spectrum in response to a dynamic stimulus. The device sample receives a time-varying electrical signal. The power spectrum of the device sample is measured at one of the pins of the device sample. A defect in the device sample can be identified based on results of comparing the power spectrum with one or more power spectra of the device that have a known defect status.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1226447
- Patent Number(s):
- 9188622
- Application Number:
- 13/309,281
- Assignee:
- SSO
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01R - MEASURING ELECTRIC VARIABLES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 30 DIRECT ENERGY CONVERSION
Citation Formats
Tangyunyong, Paiboon, Cole Jr., Edward I., and Stein, David J. Power spectrum analysis for defect screening in integrated circuit devices. United States: N. p., 2011.
Web.
Tangyunyong, Paiboon, Cole Jr., Edward I., & Stein, David J. Power spectrum analysis for defect screening in integrated circuit devices. United States.
Tangyunyong, Paiboon, Cole Jr., Edward I., and Stein, David J. Thu .
"Power spectrum analysis for defect screening in integrated circuit devices". United States. https://www.osti.gov/servlets/purl/1226447.
@article{osti_1226447,
title = {Power spectrum analysis for defect screening in integrated circuit devices},
author = {Tangyunyong, Paiboon and Cole Jr., Edward I. and Stein, David J.},
abstractNote = {A device sample is screened for defects using its power spectrum in response to a dynamic stimulus. The device sample receives a time-varying electrical signal. The power spectrum of the device sample is measured at one of the pins of the device sample. A defect in the device sample can be identified based on results of comparing the power spectrum with one or more power spectra of the device that have a known defect status.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Dec 01 00:00:00 EST 2011},
month = {Thu Dec 01 00:00:00 EST 2011}
}
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