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Title: Fabrication of small-scale structures with non-planar features

Abstract

The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.

Inventors:
;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1226228
Patent Number(s):
9190736
Application Number:
13/324,052
Assignee:
Sandia Corporation
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Dec 13
Country of Publication:
United States
Language:
English
Subject:
72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS

Citation Formats

Burckel, David B., and Ten Eyck, Gregory A. Fabrication of small-scale structures with non-planar features. United States: N. p., 2015. Web.
Burckel, David B., & Ten Eyck, Gregory A. Fabrication of small-scale structures with non-planar features. United States.
Burckel, David B., and Ten Eyck, Gregory A. Thu . "Fabrication of small-scale structures with non-planar features". United States. https://www.osti.gov/servlets/purl/1226228.
@article{osti_1226228,
title = {Fabrication of small-scale structures with non-planar features},
author = {Burckel, David B. and Ten Eyck, Gregory A.},
abstractNote = {The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {11}
}

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