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Title: Fabrication of small-scale structures with non-planar features

The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.
Inventors:
;
Issue Date:
OSTI Identifier:
1226228
Assignee:
Sandia Corporation SNL-A
Patent Number(s):
9,190,736
Application Number:
13/324,052
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2011 Dec 13
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS

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