Liquid precursor for deposition of indium selenide and method of preparing the same
Abstract
Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1215624
- Patent Number(s):
- 9142408
- Application Number:
- 13/136,982
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC36-08GO28308
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Aug 16
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Curtis, Calvin J., Miedaner, Alexander, van Hest, Marinus Franciscus Antonius Maria, Ginley, David S., Hersh, Peter A., Eldada, Louay, and Stanbery, Billy J. Liquid precursor for deposition of indium selenide and method of preparing the same. United States: N. p., 2015.
Web.
Curtis, Calvin J., Miedaner, Alexander, van Hest, Marinus Franciscus Antonius Maria, Ginley, David S., Hersh, Peter A., Eldada, Louay, & Stanbery, Billy J. Liquid precursor for deposition of indium selenide and method of preparing the same. United States.
Curtis, Calvin J., Miedaner, Alexander, van Hest, Marinus Franciscus Antonius Maria, Ginley, David S., Hersh, Peter A., Eldada, Louay, and Stanbery, Billy J. Tue .
"Liquid precursor for deposition of indium selenide and method of preparing the same". United States. https://www.osti.gov/servlets/purl/1215624.
@article{osti_1215624,
title = {Liquid precursor for deposition of indium selenide and method of preparing the same},
author = {Curtis, Calvin J. and Miedaner, Alexander and van Hest, Marinus Franciscus Antonius Maria and Ginley, David S. and Hersh, Peter A. and Eldada, Louay and Stanbery, Billy J.},
abstractNote = {Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {9}
}
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