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Title: Liquid precursor for deposition of indium selenide and method of preparing the same

Abstract

Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.

Inventors:
; ; ; ; ; ;
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1215624
Patent Number(s):
9,142,408
Application Number:
13/136,982
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Aug 16
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Curtis, Calvin J., Miedaner, Alexander, van Hest, Marinus Franciscus Antonius Maria, Ginley, David S., Hersh, Peter A., Eldada, Louay, and Stanbery, Billy J. Liquid precursor for deposition of indium selenide and method of preparing the same. United States: N. p., 2015. Web.
Curtis, Calvin J., Miedaner, Alexander, van Hest, Marinus Franciscus Antonius Maria, Ginley, David S., Hersh, Peter A., Eldada, Louay, & Stanbery, Billy J. Liquid precursor for deposition of indium selenide and method of preparing the same. United States.
Curtis, Calvin J., Miedaner, Alexander, van Hest, Marinus Franciscus Antonius Maria, Ginley, David S., Hersh, Peter A., Eldada, Louay, and Stanbery, Billy J. Tue . "Liquid precursor for deposition of indium selenide and method of preparing the same". United States. https://www.osti.gov/servlets/purl/1215624.
@article{osti_1215624,
title = {Liquid precursor for deposition of indium selenide and method of preparing the same},
author = {Curtis, Calvin J. and Miedaner, Alexander and van Hest, Marinus Franciscus Antonius Maria and Ginley, David S. and Hersh, Peter A. and Eldada, Louay and Stanbery, Billy J.},
abstractNote = {Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {9}
}

Patent:

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