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Title: Liquid precursor for deposition of copper selenide and method of preparing the same

Abstract

Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.

Inventors:
; ; ; ; ; ;
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1214119
Patent Number(s):
9,130,084
Application Number:
14/026,516
Assignee:
Alliance for Substainable Energy, LLC (Golden, CO)
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Sep 13
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Curtis, Calvin J., Miedaner, Alexander, Franciscus Antonius Maria Van Hest, Marinus, Ginley, David S., Hersh, Peter A., Eldada, Louay, and Stanbery, Billy J. Liquid precursor for deposition of copper selenide and method of preparing the same. United States: N. p., 2015. Web.
Curtis, Calvin J., Miedaner, Alexander, Franciscus Antonius Maria Van Hest, Marinus, Ginley, David S., Hersh, Peter A., Eldada, Louay, & Stanbery, Billy J. Liquid precursor for deposition of copper selenide and method of preparing the same. United States.
Curtis, Calvin J., Miedaner, Alexander, Franciscus Antonius Maria Van Hest, Marinus, Ginley, David S., Hersh, Peter A., Eldada, Louay, and Stanbery, Billy J. Tue . "Liquid precursor for deposition of copper selenide and method of preparing the same". United States. https://www.osti.gov/servlets/purl/1214119.
@article{osti_1214119,
title = {Liquid precursor for deposition of copper selenide and method of preparing the same},
author = {Curtis, Calvin J. and Miedaner, Alexander and Franciscus Antonius Maria Van Hest, Marinus and Ginley, David S. and Hersh, Peter A. and Eldada, Louay and Stanbery, Billy J.},
abstractNote = {Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {9}
}

Patent:

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