Liquid precursor for deposition of copper selenide and method of preparing the same
Abstract
Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1214119
- Patent Number(s):
- 9130084
- Application Number:
- 14/026,516
- Assignee:
- Alliance for Substainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC36-08GO28308
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013 Sep 13
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Curtis, Calvin J., Miedaner, Alexander, Franciscus Antonius Maria Van Hest, Marinus, Ginley, David S., Hersh, Peter A., Eldada, Louay, and Stanbery, Billy J. Liquid precursor for deposition of copper selenide and method of preparing the same. United States: N. p., 2015.
Web.
Curtis, Calvin J., Miedaner, Alexander, Franciscus Antonius Maria Van Hest, Marinus, Ginley, David S., Hersh, Peter A., Eldada, Louay, & Stanbery, Billy J. Liquid precursor for deposition of copper selenide and method of preparing the same. United States.
Curtis, Calvin J., Miedaner, Alexander, Franciscus Antonius Maria Van Hest, Marinus, Ginley, David S., Hersh, Peter A., Eldada, Louay, and Stanbery, Billy J. Tue .
"Liquid precursor for deposition of copper selenide and method of preparing the same". United States. https://www.osti.gov/servlets/purl/1214119.
@article{osti_1214119,
title = {Liquid precursor for deposition of copper selenide and method of preparing the same},
author = {Curtis, Calvin J. and Miedaner, Alexander and Franciscus Antonius Maria Van Hest, Marinus and Ginley, David S. and Hersh, Peter A. and Eldada, Louay and Stanbery, Billy J.},
abstractNote = {Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 08 00:00:00 EDT 2015},
month = {Tue Sep 08 00:00:00 EDT 2015}
}
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