skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Optical systems fabricated by printing-based assembly

Abstract

Provided are optical devices and systems fabricated, at least in part, via printing-based assembly and integration of device components. In specific embodiments the present invention provides light emitting systems, light collecting systems, light sensing systems and photovoltaic systems comprising printable semiconductor elements, including large area, high performance macroelectronic devices. Optical systems of the present invention comprise semiconductor elements assembled, organized and/or integrated with other device components via printing techniques that exhibit performance characteristics and functionality comparable to single crystalline semiconductor based devices fabricated using conventional high temperature processing methods. Optical systems of the present invention have device geometries and configurations, such as form factors, component densities, and component positions, accessed by printing that provide a range of useful device functionalities. Optical systems of the present invention include devices and device arrays exhibiting a range of useful physical and mechanical properties including flexibility, shapeability, conformability and stretchablity.

Inventors:
; ; ; ; ; ; ; ; ; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1212396
Patent Number(s):
9117940
Application Number:
14/209,481
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Mar 13
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Rogers, John, Nuzzo, Ralph, Meitl, Matthew, Menard, Etienne, Baca, Alfred, Motala, Michael, Ahn, Jong -Hyun, Park, Sang -Il, Yu, Chang -Jae, Ko, Heung Cho, Stoykovich, Mark, and Yoon, Jongseung. Optical systems fabricated by printing-based assembly. United States: N. p., 2015. Web.
Rogers, John, Nuzzo, Ralph, Meitl, Matthew, Menard, Etienne, Baca, Alfred, Motala, Michael, Ahn, Jong -Hyun, Park, Sang -Il, Yu, Chang -Jae, Ko, Heung Cho, Stoykovich, Mark, & Yoon, Jongseung. Optical systems fabricated by printing-based assembly. United States.
Rogers, John, Nuzzo, Ralph, Meitl, Matthew, Menard, Etienne, Baca, Alfred, Motala, Michael, Ahn, Jong -Hyun, Park, Sang -Il, Yu, Chang -Jae, Ko, Heung Cho, Stoykovich, Mark, and Yoon, Jongseung. Tue . "Optical systems fabricated by printing-based assembly". United States. https://www.osti.gov/servlets/purl/1212396.
@article{osti_1212396,
title = {Optical systems fabricated by printing-based assembly},
author = {Rogers, John and Nuzzo, Ralph and Meitl, Matthew and Menard, Etienne and Baca, Alfred and Motala, Michael and Ahn, Jong -Hyun and Park, Sang -Il and Yu, Chang -Jae and Ko, Heung Cho and Stoykovich, Mark and Yoon, Jongseung},
abstractNote = {Provided are optical devices and systems fabricated, at least in part, via printing-based assembly and integration of device components. In specific embodiments the present invention provides light emitting systems, light collecting systems, light sensing systems and photovoltaic systems comprising printable semiconductor elements, including large area, high performance macroelectronic devices. Optical systems of the present invention comprise semiconductor elements assembled, organized and/or integrated with other device components via printing techniques that exhibit performance characteristics and functionality comparable to single crystalline semiconductor based devices fabricated using conventional high temperature processing methods. Optical systems of the present invention have device geometries and configurations, such as form factors, component densities, and component positions, accessed by printing that provide a range of useful device functionalities. Optical systems of the present invention include devices and device arrays exhibiting a range of useful physical and mechanical properties including flexibility, shapeability, conformability and stretchablity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {8}
}

Patent:

Save / Share:

Works referenced in this record:

High pressure–high temperature growth of diamond crystals using split sphere apparatus
journal, November 2005


Aligned growth of isolated single-walled carbon nanotubes programmed by atomic arrangement of substrate surface
journal, June 2005


Synthesis of horizontally-aligned single-walled carbon nanotubes with controllable density on sapphire surface and polarized Raman spectroscopy
journal, April 2006


Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films
journal, February 2006


A review of 3-D packaging technology
journal, February 1998

  • Al-Sarawi, S. F.; Abbott, D.; Franzon, P. D.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B, Vol. 21, Issue 1, p. 2-14
  • https://doi.org/10.1109/96.659500

Silicon motherboards for multichannel optical modules
journal, March 1996

  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40
  • https://doi.org/10.1109/95.486559

Microassembly of semiconductor three-dimensional photonic crystals
journal, January 2003


Semiconductor Wires and Ribbons for High‐ Performance Flexible Electronics
journal, July 2008


Diffusion of Alkanethiols in PDMS and Its Implications on Microcontact Printing (μCP)
journal, January 2005


3-D ICs: a novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration
journal, May 2001


High-Performance Plastic Transistors Fabricated by Printing Techniques
journal, June 1997


Printable organic and polymeric semiconducting materials and devices
journal, January 1999


Adherence, friction and wear of rubber-like materials
journal, October 1992


Biological applications of high aspect ratio nanoparticles
journal, January 2004


Tailored Micropatterns through Weak Polyelectrolyte Stamping
journal, March 2003


Printing Patterns of Proteins
journal, April 1998


III-V compounds for solar cell applications
journal, June 1999


Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures
journal, November 2004


Conformal contact and pattern stability of stamps used for soft lithography
journal, June 2000


Temperature coefficient of the surface resistivity of two-dimensional island gold films
journal, September 2000


Preparation of Ceramic Inks for Solid Freeforming Using a Continuous Jet Printer
journal, November 1999


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000


Flexible Nanotube Electronics
journal, October 2003


Microporous materials: Electrochemically grown photonic crystals
journal, December 1999


High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film
journal, July 2001


Single Etch Patterning of Stacked Silver and Molybdenum Alloy Layers on Glass Using Microcontact Wave Printing
journal, August 2005

  • Burdinski, Dirk; Brans, Harold J. A.; Decre, Michel M. J.
  • Journal of the American Chemical Society, Vol. 127, Issue 31, p. 10786-10787
  • https://doi.org/10.1021/ja0523791

Large Area Submicrometer Contact Printing Using a Contact Aligner
journal, June 2000


Characterization of Pd–GaAs Schottky diodes prepared by the electroless plating technique
journal, May 2003


Electronic paper: Flexible active-matrix electronic ink display
journal, May 2003


Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
journal, June 2002


Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature
journal, February 2005


Decal Transfer Microlithography: A New Soft-Lithographic Patterning Method
journal, November 2002


Masterless Soft Lithography:  Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces
journal, October 2005


Biaxially Stretchable “Wavy” Silicon Nanomembranes
journal, June 2007


Silicon nanowire devices
journal, April 2000


Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
journal, August 1998


Gallium Oxide Nanoribbons and Nanosheets
journal, February 2002


Organic single-crystal field-effect transistors
journal, May 2004


Carbon Nanotube Inter- and Intramolecular Logic Gates
journal, September 2001


Nanopore Technology for Biomedical Applications
journal, February 1999


Organic and polymer transistors for electronics
journal, April 2006


Polarized Raman Spectroscopy on Isolated Single-Wall Carbon Nanotubes
journal, December 2000


Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998


Free standing single-crystal silicon microstructures
journal, March 1995


Wafer-level in-registry microstamping
journal, March 1999


Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes
journal, October 2004


Flexible a-Si:H Position-Sensitive Detectors
journal, July 2005


High-Performance Flexible Hybrid Field-Effect Transistors Based on Cellulose Fiber Paper
journal, September 2008


The formation of controlled-porosity membranes from anodically oxidized aluminium
journal, January 1989


Preparation of thin-film transistors with chemical bath deposited CdSe and CdS thin films
journal, January 2002


Etchant Anisotropy Controls the Step Bunching Instability in KOH Etching of Silicon
journal, October 2004


Fabrication of Metal Nanowires Using Microcontact Printing
journal, July 2003


High-performance all-polymer integrated circuits
journal, September 2000


Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching
journal, February 1999


Optimization, Constraint, and History in the Evolution of Eyes
journal, September 1990


Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
journal, March 1994


Synthetic Control of the Diameter and Length of Single Crystal Semiconductor Nanowires
journal, May 2001


Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
journal, April 2002


Low-voltage organic transistors with an amorphous molecular gate dielectric
journal, October 2004


Field-Effect Mobility of Organic Polymer Thin-Film Transistors
journal, October 2004


Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays
journal, September 2001


4 W single-transverse mode VECSEL utilising intra-cavity diamond heat spreader
journal, January 2006


Nanoscale Hydrophobic Recovery: A Chemical Force Microscopy Study of UV/Ozone-Treated Cross-Linked Poly(dimethylsiloxane)
journal, February 2004


Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors
journal, October 1997


Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates
journal, May 2003


Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition
journal, October 2004


Self-organizing high-density single-walled carbon nanotube arrays from surfactant suspensions
journal, August 2004


Stamp Collapse in Soft Lithography
journal, August 2005


Ordering of Spontaneously Formed Buckles on Planar Surfaces
journal, April 2000


Guided molecular self-assembly: a review of recent efforts
journal, March 2003


Plastic transistors in active-matrix displays
journal, December 2001


Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
journal, October 2005


Screen printing for the fabrication of organic light-emitting devices
journal, January 2001


Patterned Protein Layers on Solid Substrates by Thin Stamp Microcontact Printing
journal, February 1998


High Performance n-Type Carbon Nanotube Field-Effect Transistors with Chemically Doped Contacts
journal, February 2005


Preparation of Macroporous Metal Films from Colloidal Crystals
journal, September 1999


Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces
journal, April 2002


Scalable Interconnection and Integration of Nanowire Devices without Registration
journal, May 2004


Low-Temperature Solution-Phase Synthesis of Quantum Well Structured CdSe Nanoribbons
journal, May 2006


Vectorial Growth of Metallic and Semiconducting Single-Wall Carbon Nanotubes
journal, October 2002


Analog and digital circuits using organic thin-film transistors on polyester substrates
journal, November 2000


Synthesis and Optical Properties of CdS Nanoribbons
journal, October 2005


Shape Selective Growth of CdS One-Dimensional Nanostructures by a Thermal Evaporation Process
journal, March 2006


Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics
journal, October 2004


Finer features for functional microdevices
journal, August 2001


Lateral growth of single wall carbon nanotubes on various substrates by means of an “all-laser” synthesis approach
journal, April 2006


Optimized Structural Designs for Stretchable Silicon Integrated Circuits
journal, December 2009


Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon
journal, January 2008


Organic TFT Array on a Paper Substrate
journal, October 2004


Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper
journal, September 2009


Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers
journal, October 2006


Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements
journal, October 2009


Aligned Arrays of Single-Walled Carbon Nanotubes Generated from Random Networks by Orientationally Selective Laser Ablation
journal, December 2004


Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices
journal, April 2006


Control of Si Nanowire Growth by Oxygen
journal, June 2006


Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000


A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques
journal, October 2006


Percolating Conduction in Finite Nanotube Networks
journal, August 2005


Crystallographic alignment of high-density gallium nitride nanowire arrays
journal, July 2004


Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits
journal, April 2004


An Elastically Stretchable TFT Circuit
journal, December 2004


Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
journal, August 2004


Simple Route to Large-Scale Ordered Arrays of Liquid-Deposited Carbon Nanotubes
journal, April 2004


High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
journal, January 2003


A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005


The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
journal, December 1999


High-Resolution Contact Printing with Dendrimers
journal, April 2002


Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
journal, April 2006


Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors
journal, October 2004


Interfacial Chemistries for Nanoscale Transfer Printing
journal, July 2002


Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
journal, July 2002


Electrical Contacts to Molecular Layers by Nanotransfer Printing
journal, July 2003


Electronic materials: Buckling down for flexible electronics
journal, December 2006


Single-Crystal CdSe Nanosaws
journal, December 2003


Mechanically Strained Strained-Si NMOSFETs
journal, January 2004


Fully elastic interconnects on nanopatterned elastomeric substrates
journal, August 2006


Architectonic Quantum Dot Solids
journal, January 1999


Conducting elastomer surface texturing: a path to electrode spotting
journal, September 2004


Nanowire Arrays Defined by Nanoimprint Lithography
journal, April 2004


Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
journal, November 2005


High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates
journal, November 2003


High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
journal, July 2005


Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
journal, October 2004


Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
journal, September 2004


Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
journal, August 2004


Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation
journal, October 2002


Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
journal, January 1994


On the aging of oxygen plasma-treated polydimethylsiloxane surfaces
journal, June 1990


Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes
journal, March 2005


Luminescence Photophysics in Semiconductor Nanocrystals
journal, November 1998


Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale
journal, May 2004


Ordering of microwrinkle patterns by compressive strain
journal, April 2004


Geometry-Dependent Stripe Rearrangement Processes Induced by Strain on Preordered Microwrinkle Patterns
journal, August 2005


High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
journal, March 2004


Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
journal, August 2005


Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes
journal, June 2000


Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
journal, June 1998


Effect of diamondlike carbon coating and surface topography on the performance of metal evaporated magnetic tapes
journal, March 1998


Protective diamond-like carbon coatings for future optical storage disks
journal, March 2005


Nanotube electronics: Large-scale assembly of carbon nanotubes
journal, September 2003


High-power laser diodes based on InGaAsP alloys
journal, June 1994


Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field
journal, May 1997


Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
journal, September 1998


Printed plastic electronics and paperlike displays
journal, August 2002


Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
journal, March 2000


Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
journal, August 2005


Thin-film GaAs epitaxial lift-off solar cells for space applications
journal, April 2005

  • Schermer, J. J.; Mulder, P.; Bauhuis, G. J.
  • Progress in Photovoltaics: Research and Applications, Vol. 13, Issue 7, p. 587-596
  • https://doi.org/10.1002/pip.616

Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography
journal, April 2000


The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
journal, July 1998


High-Current Nanotube Transistors
journal, May 2004


Functional Pixel Circuits for Elastic AMOLED Displays
journal, July 2005


From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach
journal, November 2004


Holographic photonic crystals with diamond symmetry
journal, November 2003


Free-standing Single Crystal Silicon Nanoribbons
journal, November 2001


An analytical back-gate bias effect model for ultrathin SOI CMOS devices
journal, April 1993


InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications
journal, March 1991


Nanotube Optoelectronic Memory Devices
journal, September 2004


Lattice-Oriented Growth of Single-Walled Carbon Nanotubes
journal, July 2000


Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
journal, October 2004


Advances in organic field-effect transistors
journal, November 2004


Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics
journal, January 2007


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Polysilicon thin film transistors fabricated at 100°C on a flexible plastic substrate
conference, December 1998


Photonic Band Gap Architectures for Holographic Lithography
journal, January 2004


Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
journal, June 2003


Microscopic patterning of orientated mesoscopic silica through guided growth
journal, December 1997


Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology
journal, December 2003


Compliant substrate technology: Integration of mismatched materials for opto-electronic applications
journal, January 2000


Porous silica via colloidal crystallization
journal, October 1997


Cheap and cheerful circuits
journal, September 2000


A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
journal, December 2003


Electronically Selective Chemical Functionalization of Carbon Nanotubes: Correlation between Raman Spectral and Electrical Responses
journal, August 2005


Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly
journal, August 2005


A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell
journal, January 2004


Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires
journal, January 2005


Growth and properties of nanocrystalline diamond films
journal, October 2006


Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond
journal, April 2006


Direct Observation of Vapor−Liquid−Solid Nanowire Growth
journal, April 2001


Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric
journal, June 2001


Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires
journal, February 2002


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics
journal, July 2005


Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties
journal, December 2000


Two-versus three-dimensional quantum confinement in indium phosphide wires and dots
journal, July 2003


Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
journal, September 2003


Electric-field-directed growth of aligned single-walled carbon nanotubes
journal, November 2001


Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons
journal, October 2005


Anomalous Coiling of SiGe/Si and SiGe/Si/Cr Helical Nanobelts
journal, July 2006


Electronic transport in nanometre-scale silicon-on-insulator membranes
journal, February 2006


Improved field emission properties from metal-coated diamond films
journal, March 2007


p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks
journal, October 2004


Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors
journal, September 2005