High-resolution parallel-detection sensor array using piezo-phototronics effect
Abstract
A pressure sensor element includes a substrate, a first type of semiconductor material layer and an array of elongated light-emitting piezoelectric nanostructures extending upwardly from the first type of semiconductor material layer. A p-n junction is formed between each nanostructure and the first type semiconductor layer. An insulative resilient medium layer is infused around each of the elongated light-emitting piezoelectric nanostructures. A transparent planar electrode, disposed on the resilient medium layer, is electrically coupled to the top of each nanostructure. A voltage source is coupled to the first type of semiconductor material layer and the transparent planar electrode and applies a biasing voltage across each of the nanostructures. Each nanostructure emits light in an intensity that is proportional to an amount of compressive strain applied thereto.
- Inventors:
- Issue Date:
- Research Org.:
- Georgia Institute of Technology, Atlanta, GA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1202316
- Patent Number(s):
- 9093355
- Application Number:
- 13/748,737
- Assignee:
- Georgia Tech Research Corporation (Atlanta, GA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G01 - MEASURING G01L - MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- DOE Contract Number:
- FG02-07ER46394
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013 Jan 24
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Wang, Zhong L., and Pan, Caofeng. High-resolution parallel-detection sensor array using piezo-phototronics effect. United States: N. p., 2015.
Web.
Wang, Zhong L., & Pan, Caofeng. High-resolution parallel-detection sensor array using piezo-phototronics effect. United States.
Wang, Zhong L., and Pan, Caofeng. Tue .
"High-resolution parallel-detection sensor array using piezo-phototronics effect". United States. https://www.osti.gov/servlets/purl/1202316.
@article{osti_1202316,
title = {High-resolution parallel-detection sensor array using piezo-phototronics effect},
author = {Wang, Zhong L. and Pan, Caofeng},
abstractNote = {A pressure sensor element includes a substrate, a first type of semiconductor material layer and an array of elongated light-emitting piezoelectric nanostructures extending upwardly from the first type of semiconductor material layer. A p-n junction is formed between each nanostructure and the first type semiconductor layer. An insulative resilient medium layer is infused around each of the elongated light-emitting piezoelectric nanostructures. A transparent planar electrode, disposed on the resilient medium layer, is electrically coupled to the top of each nanostructure. A voltage source is coupled to the first type of semiconductor material layer and the transparent planar electrode and applies a biasing voltage across each of the nanostructures. Each nanostructure emits light in an intensity that is proportional to an amount of compressive strain applied thereto.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {7}
}
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