Zone compensated multilayer laue lens and apparatus and method of fabricating the same
Abstract
A multilayer Laue Lens includes a compensation layer formed in between a first multilayer section and a second multilayer section. Each of the first and second multilayer sections includes a plurality of alternating layers made of a pair of different materials. Also, the thickness of layers of the first multilayer section is monotonically increased so that a layer adjacent the substrate has a minimum thickness, and the thickness of layers of the second multilayer section is monotonically decreased so that a layer adjacent the compensation layer has a maximum thickness. In particular, the compensation layer of the multilayer Laue lens has an in-plane thickness gradient laterally offset by 90.degree. as compared to other layers in the first and second multilayer sections, thereby eliminating the strict requirement of the placement error.
- Inventors:
- Issue Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1193313
- Patent Number(s):
- 9082522
- Application Number:
- 13/515,780
- Assignee:
- Brookhaven Science Associates, LLC (Upton, NY)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- AC02-98CH10886
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2010 Dec 13
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING
Citation Formats
Conley, Raymond P., Liu, Chian Qian, Macrander, Albert T., Yan, Hanfei, Maser, Jorg, Kang, Hyon Chol, and Stephenson, Gregory Brian. Zone compensated multilayer laue lens and apparatus and method of fabricating the same. United States: N. p., 2015.
Web.
Conley, Raymond P., Liu, Chian Qian, Macrander, Albert T., Yan, Hanfei, Maser, Jorg, Kang, Hyon Chol, & Stephenson, Gregory Brian. Zone compensated multilayer laue lens and apparatus and method of fabricating the same. United States.
Conley, Raymond P., Liu, Chian Qian, Macrander, Albert T., Yan, Hanfei, Maser, Jorg, Kang, Hyon Chol, and Stephenson, Gregory Brian. Tue .
"Zone compensated multilayer laue lens and apparatus and method of fabricating the same". United States. https://www.osti.gov/servlets/purl/1193313.
@article{osti_1193313,
title = {Zone compensated multilayer laue lens and apparatus and method of fabricating the same},
author = {Conley, Raymond P. and Liu, Chian Qian and Macrander, Albert T. and Yan, Hanfei and Maser, Jorg and Kang, Hyon Chol and Stephenson, Gregory Brian},
abstractNote = {A multilayer Laue Lens includes a compensation layer formed in between a first multilayer section and a second multilayer section. Each of the first and second multilayer sections includes a plurality of alternating layers made of a pair of different materials. Also, the thickness of layers of the first multilayer section is monotonically increased so that a layer adjacent the substrate has a minimum thickness, and the thickness of layers of the second multilayer section is monotonically decreased so that a layer adjacent the compensation layer has a maximum thickness. In particular, the compensation layer of the multilayer Laue lens has an in-plane thickness gradient laterally offset by 90.degree. as compared to other layers in the first and second multilayer sections, thereby eliminating the strict requirement of the placement error.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {7}
}
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Works referenced in this record:
Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses
patent, October 2009
- Shu, Deming; Yan, Hanfei; Maser, Jorg M.
- US Patent Document 7,597,475
Sectioning of multilayers to make a multilayer Laue lens
journal, January 2007
- Kang, Hyon Chol; Stephenson, G. Brian; Liu, Chian
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11 nm hard X-ray focus from a large-aperture multilayer Laue lens
journal, December 2013
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Wedged multilayer Laue lens
journal, May 2008
- Conley, Ray; Liu, Chian; Qian, Jun
- Review of Scientific Instruments, Vol. 79, Issue 5
The NSLS-II multilayer Laue lens deposition system
conference, August 2009
- Conley, Ray; Bouet, Nathalie; Biancarosa, James
- SPIE Optical Engineering + Applications, SPIE Proceedings