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Title: Zone compensated multilayer laue lens and apparatus and method of fabricating the same

Abstract

A multilayer Laue Lens includes a compensation layer formed in between a first multilayer section and a second multilayer section. Each of the first and second multilayer sections includes a plurality of alternating layers made of a pair of different materials. Also, the thickness of layers of the first multilayer section is monotonically increased so that a layer adjacent the substrate has a minimum thickness, and the thickness of layers of the second multilayer section is monotonically decreased so that a layer adjacent the compensation layer has a maximum thickness. In particular, the compensation layer of the multilayer Laue lens has an in-plane thickness gradient laterally offset by 90.degree. as compared to other layers in the first and second multilayer sections, thereby eliminating the strict requirement of the placement error.

Inventors:
; ; ; ; ; ;
Issue Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1193313
Patent Number(s):
9082522
Application Number:
13/515,780
Assignee:
Brookhaven Science Associates, LLC (Upton, NY)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
AC02-98CH10886
Resource Type:
Patent
Resource Relation:
Patent File Date: 2010 Dec 13
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING

Citation Formats

Conley, Raymond P., Liu, Chian Qian, Macrander, Albert T., Yan, Hanfei, Maser, Jorg, Kang, Hyon Chol, and Stephenson, Gregory Brian. Zone compensated multilayer laue lens and apparatus and method of fabricating the same. United States: N. p., 2015. Web.
Conley, Raymond P., Liu, Chian Qian, Macrander, Albert T., Yan, Hanfei, Maser, Jorg, Kang, Hyon Chol, & Stephenson, Gregory Brian. Zone compensated multilayer laue lens and apparatus and method of fabricating the same. United States.
Conley, Raymond P., Liu, Chian Qian, Macrander, Albert T., Yan, Hanfei, Maser, Jorg, Kang, Hyon Chol, and Stephenson, Gregory Brian. Tue . "Zone compensated multilayer laue lens and apparatus and method of fabricating the same". United States. https://www.osti.gov/servlets/purl/1193313.
@article{osti_1193313,
title = {Zone compensated multilayer laue lens and apparatus and method of fabricating the same},
author = {Conley, Raymond P. and Liu, Chian Qian and Macrander, Albert T. and Yan, Hanfei and Maser, Jorg and Kang, Hyon Chol and Stephenson, Gregory Brian},
abstractNote = {A multilayer Laue Lens includes a compensation layer formed in between a first multilayer section and a second multilayer section. Each of the first and second multilayer sections includes a plurality of alternating layers made of a pair of different materials. Also, the thickness of layers of the first multilayer section is monotonically increased so that a layer adjacent the substrate has a minimum thickness, and the thickness of layers of the second multilayer section is monotonically decreased so that a layer adjacent the compensation layer has a maximum thickness. In particular, the compensation layer of the multilayer Laue lens has an in-plane thickness gradient laterally offset by 90.degree. as compared to other layers in the first and second multilayer sections, thereby eliminating the strict requirement of the placement error.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {7}
}

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Works referenced in this record:

Nanometer Linear Focusing of Hard X Rays by a Multilayer Laue Lens
journal, March 2006


Sectioning of multilayers to make a multilayer Laue lens
journal, January 2007


11 nm hard X-ray focus from a large-aperture multilayer Laue lens
journal, December 2013


Wedged multilayer Laue lens
journal, May 2008


The NSLS-II multilayer Laue lens deposition system
conference, August 2009