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Title: System and method for 2D workpiece alignment

Abstract

A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1193299
Patent Number(s):
9,082,799
Application Number:
13/623,428
Assignee:
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
DOE Contract Number:  
EE0004737
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Sep 20
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., and Simmons, Michael C. System and method for 2D workpiece alignment. United States: N. p., 2015. Web.
Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., & Simmons, Michael C. System and method for 2D workpiece alignment. United States.
Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., and Simmons, Michael C. Tue . "System and method for 2D workpiece alignment". United States. https://www.osti.gov/servlets/purl/1193299.
@article{osti_1193299,
title = {System and method for 2D workpiece alignment},
author = {Weaver, William T. and Carlson, Charles T. and Smith, Scott A. and Beck, Michael A. and Webb, Aaron P. and Strassner, James D. and Gravell, Lawrence R. and Simmons, Michael C.},
abstractNote = {A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {7}
}

Patent:

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