System and method for 2D workpiece alignment

Weaver, William T.; Carlson, Charles T.; Smith, Scott A.; Beck, Michael A.; Webb, Aaron P.; Strassner, James D.; Gravell, Lawrence R.; Simmons, Michael C.

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A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
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C06 - explosives
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C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
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C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
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F99 - subject matter not otherwise provided for in this section
G - physics
G01 - measuring
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G12 - instrument details
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H01 - basic electric elements
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Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

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Title: System and method for 2D workpiece alignment

Abstract

A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.

Inventors:: Weaver, William T.; Carlson, Charles T.; Smith, Scott A.; Beck, Michael A.; Webb, Aaron P.; Strassner, James D.; Gravell, Lawrence R.; Simmons, Michael C.

Issue Date:: 2015-07-14

Research Org.:: Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1193299

Patent Number(s):: 9082799

Application Number:: 13/623,428

Assignee:: Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/042 - {using masks}
C23C14/48 - Ion implantation
C23C14/50 - Substrate holders

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/67333 - {Trays for chips
H01L21/68728 - {characterised by a plurality of separate clamping members, e.g. clamping fingers}
H01L21/68735 - {characterised by edge profile or support profile}
H01L21/68778 - {characterised by supporting substrates others than wafers, e.g. chips}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/49899 - by multiple cooperating aligning means

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DOE Contract Number:: EE0004737

Resource Type:: Patent

Resource Relation:: Patent File Date: 2012 Sep 20

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., and Simmons, Michael C.. System and method for 2D workpiece alignment.  United States: N. p., 2015. 
        Web.

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                    Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., & Simmons, Michael C.. System and method for 2D workpiece alignment.  United States.

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                    Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., and Simmons, Michael C.. Tue .  
        "System and method for 2D workpiece alignment".  United States.  https://www.osti.gov/servlets/purl/1193299.

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@article{osti_1193299,

  title        = {System and method for 2D workpiece alignment},

  author       = {Weaver, William T. and Carlson, Charles T. and Smith, Scott A. and Beck, Michael A. and Webb, Aaron P. and Strassner, James D. and Gravell, Lawrence R. and Simmons, Michael C.},

  abstractNote = {A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2015},

  month        = {7}

}

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