System for monitoring the growth of crystalline films on stationary substrates

Title: System for monitoring the growth of crystalline films on stationary substrates

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A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and converting the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triaxial cable for improving the signal-to-noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement. 16 figs.

Inventors:: Sheldon, P.

Issue Date:: 1995-10-10

OSTI Identifier:: 119048

Assignee:: Midwest Research Inst., Kansas City, MO (United States) CHO; SCA: 360101; 360201; 360601; PA: EDB-95:149089; SN: 95001477091

Patent Number(s):: US 5,456,205/A/

Application Number:: PAN: 8-069,405

Contract Number:: AC02-83CH10093

Resource Relation:: Other Information: PBD: 10 Oct 1995

Research Org:: Midwest Research Institute; National Renewable Energy Lab. (NREL), Golden, CO (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; ON-LINE MEASUREMENT SYSTEMS; DESIGN; CRYSTAL GROWTH; MONITORING; OPERATION; PHOTODIODES; ELECTRON DIFFRACTION; OPTICAL FILTERS; COMPUTER CALCULATIONS; SIGNAL CONDITIONING

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