Solar cells utilizing pulsed-energy crystallized microcrystalline/polycrystalline silicon

Title: Solar cells utilizing pulsed-energy crystallized microcrystalline/polycrystalline silicon

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A process for producing multi-terminal devices such as solar cells wherein a pulsed high energy source is used to melt and crystallize amorphous silicon deposited on a substrate which is intolerant to high processing temperatures, whereby the amorphous silicon is converted into a microcrystalline/polycrystalline phase. Dopant and hydrogenation can be added during the fabrication process which provides for fabrication of extremely planar, ultra shallow contacts which results in reduction of non-current collecting contact volume. The use of the pulsed energy beams results in the ability to fabricate high efficiency microcrystalline/polycrystalline solar cells on the so-called low-temperature, inexpensive plastic substrates which are intolerant to high processing temperatures.

Inventors:: Kaschmitter, J.L.; Sigmon, T.W.

Issue Date:: 1995-10-10

OSTI Identifier:: 119047

Assignee:: Univ. of California, Oakland, CA (United States) PTO; SCA: 140501; 360601; 360602; PA: EDB-95:147020; SN: 95001477087

Patent Number(s):: US 5,456,763/A/

Application Number:: PAN: 8-219,487

Contract Number:: W-7405-ENG-48

Resource Relation:: Other Information: PBD: 10 Oct 1995

Research Org:: University of California

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY; 36 MATERIALS SCIENCE; SILICON SOLAR CELLS; FABRICATION; SILICON; MELTING; CRYSTALLIZATION; TEMPERATURE CONTROL

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A process for producing multi-terminal devices such as solar cells wherein a pulsed high energy source is used to melt and crystallize amorphous silicon deposited on a substrate which is intolerant to high processing temperatures, whereby to amorphous silicon is converted into a microcrystalline/polycrystalline phase. Dopant and hydrogenization can be added during the fabrication process which provides for fabrication of extremely planar, ultra shallow contacts which results in reduction of non-current collecting contact volume. The use of the pulsed energy beams results in the ability to fabricate high efficiency microcrystalline/polycrystalline solar cells on the so-called low-temperature, inexpensive plastic substrates whichmore »« less
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