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Title: Methods of fabrication of graphene nanoribbons

Abstract

Methods of fabricating graphene nanoribbons include depositing a catalyst layer on a substrate. A masking layer is deposited on the catalyst layer. The masking layer and the catalyst layer are etched to form a structure on the substrate, the structure comprising a portion of the catalyst layer and a portion of the masking layer disposed on the catalyst layer, with sidewalls of the catalyst layer being exposed. A graphene layer is formed on a sidewall of the catalyst layer with a carbon-containing gas.

Inventors:
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1185301
Patent Number(s):
9061912
Application Number:
13/910,327
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Jun 05
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Zhang, Yuegang. Methods of fabrication of graphene nanoribbons. United States: N. p., 2015. Web.
Zhang, Yuegang. Methods of fabrication of graphene nanoribbons. United States.
Zhang, Yuegang. Tue . "Methods of fabrication of graphene nanoribbons". United States. https://www.osti.gov/servlets/purl/1185301.
@article{osti_1185301,
title = {Methods of fabrication of graphene nanoribbons},
author = {Zhang, Yuegang},
abstractNote = {Methods of fabricating graphene nanoribbons include depositing a catalyst layer on a substrate. A masking layer is deposited on the catalyst layer. The masking layer and the catalyst layer are etched to form a structure on the substrate, the structure comprising a portion of the catalyst layer and a portion of the masking layer disposed on the catalyst layer, with sidewalls of the catalyst layer being exposed. A graphene layer is formed on a sidewall of the catalyst layer with a carbon-containing gas.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}

Patent:

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Works referenced in this record:

Chemically Isolated Graphene Nanoribbons Reversibly Formed in Fluorographene Using Polymer Nanowire Masks
journal, December 2011


Rational Fabrication of Graphene Nanoribbons Using a Nanowire Etch Mask
journal, May 2009


Characteristics of CVD graphene nanoribbon formed by a ZnO nanowire hardmask
journal, June 2011


Patterning of graphene
journal, January 2012


Synthesis of monolithic graphene–graphite integrated electronics
journal, November 2011


A 3D insight on the catalytic nanostructuration of few-layer graphene
journal, June 2014


Direct Growth of Graphene Nanoribbons for Large-Scale Device Fabrication
journal, February 2012


The rise of graphene
journal, March 2007


The electronic properties of graphene
journal, January 2009


Graphene transistors
journal, May 2010


Direct observation of a widely tunable bandgap in bilayer graphene
journal, June 2009


Energy gaps and a zero-field quantum Hall effect in graphene by strain engineering
journal, September 2009


Graphene nanomesh
journal, February 2010


Narrow graphene nanoribbons from carbon nanotubes
journal, April 2009


Facile synthesis of high-quality graphene nanoribbons
journal, April 2010


Chemically Derived, Ultrasmooth Graphene Nanoribbon Semiconductors
journal, February 2008


Atomically precise bottom-up fabrication of graphene nanoribbons
journal, July 2010


Scalable templated growth of graphene nanoribbons on SiC
journal, October 2010


Energy Band-Gap Engineering of Graphene Nanoribbons
journal, May 2007


Graphene nano-ribbon electronics
journal, December 2007


Site- and alignment-controlled growth of graphene nanoribbons from nickel nanobars
journal, September 2012


Energy Gaps in Graphene Nanoribbons
journal, November 2006


Quasiparticle Energies and Band Gaps in Graphene Nanoribbons
journal, November 2007


Effect of edge roughness on electronic transport in graphene nanoribbon channel metal-oxide-semiconductor field-effect transistors
journal, January 2008


Effect of edge roughness in graphene nanoribbon transistors
journal, August 2007


Raman Spectroscopy of Lithographically Patterned Graphene Nanoribbons
journal, April 2011


Raman spectroscopy on etched graphene nanoribbons
journal, April 2011


Large-Diameter Graphene Nanotubes Synthesized Using Ni Nanowire Templates
journal, December 2010


Direct Formation of Wafer Scale Graphene Thin Layers on Insulating Substrates by Chemical Vapor Deposition
journal, September 2011


Direct Chemical Vapor Deposition of Graphene on Dielectric Surfaces
journal, May 2010


Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils
journal, May 2009


Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition
journal, January 2009


Barrier-Guided Growth of Micro- and Nano-Structured Graphene
journal, January 2012


Raman Spectrum of Graphene and Graphene Layers
journal, October 2006


Raman spectroscopy in graphene
journal, April 2009


Raman Studies of Monolayer Graphene: The Substrate Effect
journal, June 2008


Phonon softening and crystallographic orientation of strained graphene studied by Raman spectroscopy
journal, April 2009


Graphene Nanoribbons from Unzipped Carbon Nanotubes: Atomic Structures, Raman Spectroscopy, and Electrical Properties
journal, July 2011


Effect of Spatial Charge Inhomogeneity on 1/ f Noise Behavior in Graphene
journal, September 2010


Transfer of CVD-Grown Monolayer Graphene onto Arbitrary Substrates
journal, August 2011


Reducing Extrinsic Performance-Limiting Factors in Graphene Grown by Chemical Vapor Deposition
journal, March 2012


Atmospheric Oxygen Binding and Hole Doping in Deformed Graphene on a SiO2 Substrate
journal, December 2010


Thermal properties of graphene and nanostructured carbon materials
journal, August 2011


Direct Growth of Graphene Nanoribbons for Large-Scale Device Fabrication
journal, February 2012