Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules
Abstract
A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Michigan, Ann Arbor, MI (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1185298
- Patent Number(s):
- 9062368
- Application Number:
- 13/652,593
- Assignee:
- The Regents of the University of Michigan (Ann Arbor, MI)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- SC0005310
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2012 Oct 16
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 14 SOLAR ENERGY; 47 OTHER INSTRUMENTATION
Citation Formats
Forrest, Stephen R., Vartanian, Garen, and Rolin, Cedric. Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules. United States: N. p., 2015.
Web.
Forrest, Stephen R., Vartanian, Garen, & Rolin, Cedric. Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules. United States.
Forrest, Stephen R., Vartanian, Garen, and Rolin, Cedric. Tue .
"Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules". United States. https://www.osti.gov/servlets/purl/1185298.
@article{osti_1185298,
title = {Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules},
author = {Forrest, Stephen R. and Vartanian, Garen and Rolin, Cedric},
abstractNote = {A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 23 00:00:00 EDT 2015},
month = {Tue Jun 23 00:00:00 EDT 2015}
}
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