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Title: Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules

Abstract

A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.

Inventors:
; ;
Issue Date:
Research Org.:
The Regents of the University of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1185298
Patent Number(s):
9,062,368
Application Number:
13/652,593
Assignee:
The Regents of the University of Michigan (Ann Arbor, MI)
DOE Contract Number:  
SC0005310
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Oct 16
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 14 SOLAR ENERGY; 47 OTHER INSTRUMENTATION

Citation Formats

Forrest, Stephen R., Vartanian, Garen, and Rolin, Cedric. Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules. United States: N. p., 2015. Web.
Forrest, Stephen R., Vartanian, Garen, & Rolin, Cedric. Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules. United States.
Forrest, Stephen R., Vartanian, Garen, and Rolin, Cedric. Tue . "Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules". United States. https://www.osti.gov/servlets/purl/1185298.
@article{osti_1185298,
title = {Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules},
author = {Forrest, Stephen R. and Vartanian, Garen and Rolin, Cedric},
abstractNote = {A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}

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Works referenced in this record:

2D Species Concentration Mapping of Thermal AP-CVD Reactors for Monitoring, Control and Design
conference, January 2009

  • Sawtell, David; Kasiutsich, Vasili; Holdsworth, Robert
  • 216th ECS Meeting, ECS Transactions
  • DOI: 10.1149/1.3207631

Diode Laser Induced Fluorescence for Gas-Phase Diagnostics
journal, December 2011

  • Burns, Iain S.; Kaminski, Clemens F.
  • Zeitschrift für Physikalische Chemie, Vol. 225, Issue 11-12
  • DOI: 10.1524/zpch.2011.0182