Eddy current thickness measurement apparatus

Title: Eddy current thickness measurement apparatus

A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.

Inventors:: Rosen, Gary J.; Sinclair, Frank; Soskov, Alexander; Buff, James S.

Issue Date:: 2015-06-16

OSTI Identifier:: 1184758

Assignee:: Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA) DOEEE

Patent Number(s):: 9,057,146

Application Number:: 12/862,187

Contract Number:: EE0000595

Resource Relation:: Patent File Date: 2010 Aug 24

Research Org:: Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 14 SOLAR ENERGY

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Works referenced in this record:

Multifrequency eddy current diagnostics of axial and radial thermal profiles during silicon crystal growth
journal, December 1990

Stefani, Jerry A.; Tien, John K.; Choe, Kwang Su
Journal of Crystal Growth, Vol. 106, Issue 4, p. 611-621
DOI: 10.1016/0022-0248(90)90034-I

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