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Title: Eddy current thickness measurement apparatus

Abstract

A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.

Inventors:
; ; ;
Issue Date:
Research Org.:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1184758
Patent Number(s):
9,057,146
Application Number:
12/862,187
Assignee:
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
DOE Contract Number:  
EE0000595
Resource Type:
Patent
Resource Relation:
Patent File Date: 2010 Aug 24
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 14 SOLAR ENERGY

Citation Formats

Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, and Buff, James S. Eddy current thickness measurement apparatus. United States: N. p., 2015. Web.
Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, & Buff, James S. Eddy current thickness measurement apparatus. United States.
Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, and Buff, James S. Tue . "Eddy current thickness measurement apparatus". United States. https://www.osti.gov/servlets/purl/1184758.
@article{osti_1184758,
title = {Eddy current thickness measurement apparatus},
author = {Rosen, Gary J. and Sinclair, Frank and Soskov, Alexander and Buff, James S.},
abstractNote = {A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}

Patent:

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Works referenced in this record:

Eddy current-type coating thickness gauge
journal, November 1991

  • Bunyaev, V. A.; Boldyrev, V. T.; Dolgikh, V. V.
  • Measurement Techniques, Vol. 34, Issue 11
  • DOI: 10.1007/BF00979689

Application of pulsed eddy current and ultrasonic sensors in paint film thickness measuring
conference, June 2009


Measurement of the spatio-temporal distribution of harmonic and transient eddy currents in a liquid metal
journal, February 2008


Multifrequency eddy current diagnostics of axial and radial thermal profiles during silicon crystal growth
journal, December 1990

  • Stefani, Jerry A.; Tien, John K.; Choe, Kwang Su
  • Journal of Crystal Growth, Vol. 106, Issue 4, p. 611-621
  • DOI: 10.1016/0022-0248(90)90034-I

A Contactless Inductive Velocity Reconstruction Method for Metallic and Semiconducting Melts
journal, October 2004

  • Stefani, Frank; Gerbeth, Gunter; Gundrum, Thomas
  • Materials and Manufacturing Processes, Vol. 19, Issue 4
  • DOI: 10.1081/AMP-200031872