Eddy current thickness measurement apparatus
Abstract
A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.
- Inventors:
- Issue Date:
- Research Org.:
- Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1184758
- Patent Number(s):
- 9,057,146
- Application Number:
- 12/862,187
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- DOE Contract Number:
- EE0000595
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2010 Aug 24
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 14 SOLAR ENERGY
Citation Formats
Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, and Buff, James S. Eddy current thickness measurement apparatus. United States: N. p., 2015.
Web.
Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, & Buff, James S. Eddy current thickness measurement apparatus. United States.
Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, and Buff, James S. Tue .
"Eddy current thickness measurement apparatus". United States. https://www.osti.gov/servlets/purl/1184758.
@article{osti_1184758,
title = {Eddy current thickness measurement apparatus},
author = {Rosen, Gary J. and Sinclair, Frank and Soskov, Alexander and Buff, James S.},
abstractNote = {A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}
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