Eddy current thickness measurement apparatus

Rosen, Gary J.; Sinclair, Frank; Soskov, Alexander; Buff, James S.

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Title: Eddy current thickness measurement apparatus

Abstract

A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.

Inventors:: Rosen, Gary J.; Sinclair, Frank; Soskov, Alexander; Buff, James S.

Issue Date:: Tue Jun 16 00:00:00 EDT 2015

Research Org.:: Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1184758

Patent Number(s):: 9057146

Application Number:: 12/862,187

Assignee:: Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B22 - CASTING B22D - CASTING OF METALS

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

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B - PERFORMING OPERATIONS B22 - CASTING B22D - CASTING OF METALS
B22D11/1206 - {for plastic shaping of strands
B22D11/143 - {for horizontal casting}

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B11/00 - Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
C30B15/00 - Single-crystal growth by pulling from a melt, e.g. Czochralski method
C30B29/06 - Silicon
C30B29/08 - Germanium
C30B29/36 - Carbides
C30B29/406 - {Gallium nitride}
C30B29/64 - Flat crystals, e.g. plates, strips or discs
C30B35/00 - Apparatus in general, specially adapted for the growth, production or after-treatment of single crystals or a homogeneous polycrystalline material with defined structure

G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B7/105 - {for measuring thickness of coating}
G01B7/107 - {for measuring objects while moving

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T117/1004 - with means for measuring, testing, or sensing
Y10T117/1008 - with responsive control means
Y10T117/1032 - Seed pulling
Y10T117/1044 - including means forming a flat shape [e.g., ribbon]
Y10T117/1048 - Pulling includes a horizontal component
Y10T117/1068 - including heating or cooling details [e.g., shield configuration]
Y10T117/1088 - including heating or cooling details

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DOE Contract Number:: EE0000595

Resource Type:: Patent

Resource Relation:: Patent File Date: 2010 Aug 24

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 14 SOLAR ENERGY

Citation Formats


                    Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, and Buff, James S. Eddy current thickness measurement apparatus.  United States: N. p., 2015. 
        Web.

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                    Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, & Buff, James S. Eddy current thickness measurement apparatus.  United States.

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                    Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, and Buff, James S. Tue .  
        "Eddy current thickness measurement apparatus".  United States.  https://www.osti.gov/servlets/purl/1184758.

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@article{osti_1184758,

  title        = {Eddy current thickness measurement apparatus},

  author       = {Rosen, Gary J. and Sinclair, Frank and Soskov, Alexander and Buff, James S.},

  abstractNote = {A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Jun 16 00:00:00 EDT 2015},

  month        = {Tue Jun 16 00:00:00 EDT 2015}

}

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Works referenced in this record:

Dual purpose electromagnetic thickness gauge
patent, October 1976

Nix, Hans F.; Steingroever, Erich
US Patent Document 3,986,105
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3986105

Lateral pulling growth of crystal ribbons and apparatus therefor
patent, April 1981

Shudo, Taro; Kudo, Bosshi; Tamai, Yasuhiro
US Patent Document 4,264,407
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4264407

Method and apparatus for supplying molten metal in the manufacture of amorphous metal ribbons
patent, May 1986

Fukuoka, Hiromi; Asano, Keisuke; Ide, Hideo
US Patent Document 4,590,988
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4590988

Guidance system for low angle silicon ribbon growth
patent, July 1986

Jewett, David N.; Bates, Herbert Ellsworth; Milstein, Joseph B.
US Patent Document 4,599,132
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4599132

Coriolis mass flow rate meter
patent, September 1995

Cage, Donald R.; Campbell, Steven Wayne; Hahn, David T.
US Patent Document 5,448,921
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5448921

Eddy current testing system with scanning probe head having parallel and normal sensing coils
patent, January 1996

Gulliver, James Andrew; Holt, Christopher C.; Boness, Kenneth D.
US Patent Document 5,483,160
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5483160

Instantaneous slag thickness measuring device
patent, July 1998

Muller, Joachim; Haubrich, Hartmut
US Patent Document 5,781,008
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5781008

Method and apparatus for measuring thickness of conductive films with the use of inductive and capacitive sensors
patent, July 2003

Kesil, Boris; Margulis, David; Gershenzon, Elik
US Patent Document 6,593,738
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6593738

Floating Sheet Production Apparatus and Method
patent-application, September 2009

Kellerman, Peter L.; Sinclair, Frank
US Patent Document 12/403206; 20090233396
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090233396

Method and Apparatus for Producing a Dislocation-Free Crystalline Sheet
patent-application, December 2009

Kellerman, Peter L.; Sinclair, Frank; Carlson, Frederick
US Patent Document 12/478513; 20090302281
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090302281

Eddy current-type coating thickness gauge
journal, November 1991

Bunyaev, V. A.; Boldyrev, V. T.; Dolgikh, V. V.
Measurement Techniques, Vol. 34, Issue 11
https://doi.org/10.1007/BF00979689

Application of pulsed eddy current and ultrasonic sensors in paint film thickness measuring
conference, June 2009

Dengfeng Chen,
2009 Chinese Control and Decision Conference (CCDC)
https://doi.org/10.1109/CCDC.2009.5192349

Measurement of the spatio-temporal distribution of harmonic and transient eddy currents in a liquid metal
journal, February 2008

Forbriger, J.; Galindo, V.; Gerbeth, G.
Measurement Science and Technology, Vol. 19, Issue 4
https://doi.org/10.1088/0957-0233/19/4/045704

Multifrequency eddy current diagnostics of axial and radial thermal profiles during silicon crystal growth
journal, December 1990

Stefani, Jerry A.; Tien, John K.; Choe, Kwang Su
Journal of Crystal Growth, Vol. 106, Issue 4, p. 611-621
https://doi.org/10.1016/0022-0248(90)90034-I

A Contactless Inductive Velocity Reconstruction Method for Metallic and Semiconducting Melts
journal, October 2004

Stefani, Frank; Gerbeth, Gunter; Gundrum, Thomas
Materials and Manufacturing Processes, Vol. 19, Issue 4
https://doi.org/10.1081/AMP-200031872

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Similar Records

Title: Eddy current thickness measurement apparatus

Abstract

Citation Formats

Dual purpose electromagnetic thickness gauge patent, October 1976

Lateral pulling growth of crystal ribbons and apparatus therefor patent, April 1981

Method and apparatus for supplying molten metal in the manufacture of amorphous metal ribbons patent, May 1986

Guidance system for low angle silicon ribbon growth patent, July 1986

Coriolis mass flow rate meter patent, September 1995

Eddy current testing system with scanning probe head having parallel and normal sensing coils patent, January 1996

Instantaneous slag thickness measuring device patent, July 1998

Method and apparatus for measuring thickness of conductive films with the use of inductive and capacitive sensors patent, July 2003

Floating Sheet Production Apparatus and Method patent-application, September 2009

Method and Apparatus for Producing a Dislocation-Free Crystalline Sheet patent-application, December 2009

Eddy current-type coating thickness gauge journal, November 1991

Application of pulsed eddy current and ultrasonic sensors in paint film thickness measuring conference, June 2009

Measurement of the spatio-temporal distribution of harmonic and transient eddy currents in a liquid metal journal, February 2008

Multifrequency eddy current diagnostics of axial and radial thermal profiles during silicon crystal growth journal, December 1990

A Contactless Inductive Velocity Reconstruction Method for Metallic and Semiconducting Melts journal, October 2004

Dual purpose electromagnetic thickness gauge
patent, October 1976

Lateral pulling growth of crystal ribbons and apparatus therefor
patent, April 1981

Method and apparatus for supplying molten metal in the manufacture of amorphous metal ribbons
patent, May 1986

Guidance system for low angle silicon ribbon growth
patent, July 1986

Coriolis mass flow rate meter
patent, September 1995

Eddy current testing system with scanning probe head having parallel and normal sensing coils
patent, January 1996

Instantaneous slag thickness measuring device
patent, July 1998

Method and apparatus for measuring thickness of conductive films with the use of inductive and capacitive sensors
patent, July 2003

Floating Sheet Production Apparatus and Method
patent-application, September 2009

Method and Apparatus for Producing a Dislocation-Free Crystalline Sheet
patent-application, December 2009

Eddy current-type coating thickness gauge
journal, November 1991

Application of pulsed eddy current and ultrasonic sensors in paint film thickness measuring
conference, June 2009

Measurement of the spatio-temporal distribution of harmonic and transient eddy currents in a liquid metal
journal, February 2008

Multifrequency eddy current diagnostics of axial and radial thermal profiles during silicon crystal growth
journal, December 1990

A Contactless Inductive Velocity Reconstruction Method for Metallic and Semiconducting Melts
journal, October 2004