Eddy current thickness measurement apparatus

Title: Eddy current thickness measurement apparatus

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Abstract

A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.

Inventors:: Rosen, Gary J.; Sinclair, Frank; Soskov, Alexander; Buff, James S.

Issue Date:: 2015-06-16

Research Org.:: Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1184758

Patent Number(s):: 9057146

Application Number:: 12/862,187

Assignee:: Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

B - PERFORMING OPERATIONS B22 - CASTING B22D - CASTING OF METALS

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B7/107 - {for measuring objects while moving

B - PERFORMING OPERATIONS B22 - CASTING B22D - CASTING OF METALS
B22D11/1206 - {for plastic shaping of strands

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T117/1008 - with responsive control means

G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B7/105 - {for measuring thickness of coating}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T117/1044 - including means forming a flat shape [e.g., ribbon]

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B11/00 - Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T117/1048 - Pulling includes a horizontal component

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B15/00 - Single-crystal growth by pulling from a melt, e.g. Czochralski method
C30B35/00 - Apparatus in general, specially adapted for the growth, production or after-treatment of single crystals or a homogeneous polycrystalline material with defined structure

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T117/1068 - including heating or cooling details [e.g., shield configuration]
Y10T117/1088 - including heating or cooling details

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B29/08 - Germanium

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T117/1004 - with means for measuring, testing, or sensing

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B29/64 - Flat crystals, e.g. plates, strips or discs

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T117/1032 - Seed pulling

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B29/36 - Carbides

B - PERFORMING OPERATIONS B22 - CASTING B22D - CASTING OF METALS
B22D11/143 - {for horizontal casting}

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B29/06 - Silicon
C30B29/406 - {Gallium nitride}

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DOE Contract Number:: EE0000595

Resource Type:: Patent

Resource Relation:: Patent File Date: 2010 Aug 24

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 14 SOLAR ENERGY

Citation Formats


                    Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, and Buff, James S. Eddy current thickness measurement apparatus.  United States: N. p., 2015. 
        Web.

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                    Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, & Buff, James S. Eddy current thickness measurement apparatus.  United States.

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                    Rosen, Gary J., Sinclair, Frank, Soskov, Alexander, and Buff, James S. Tue .  
        "Eddy current thickness measurement apparatus".  United States.  https://www.osti.gov/servlets/purl/1184758.

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@article{osti_1184758,

  title        = {Eddy current thickness measurement apparatus},

  author       = {Rosen, Gary J. and Sinclair, Frank and Soskov, Alexander and Buff, James S.},

  abstractNote = {A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2015},

  month        = {6}

}

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