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Title: Eddy current thickness measurement apparatus

A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.
Inventors:
; ; ;
Issue Date:
OSTI Identifier:
1184758
Assignee:
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA) DOEEE
Patent Number(s):
9,057,146
Application Number:
12/862,187
Contract Number:
EE0000595
Resource Relation:
Patent File Date: 2010 Aug 24
Research Org:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 14 SOLAR ENERGY

Other works cited in this record:

Multifrequency eddy current diagnostics of axial and radial thermal profiles during silicon crystal growth
journal, December 1990
  • Stefani, Jerry A.; Tien, John K.; Choe, Kwang Su
  • Journal of Crystal Growth, Vol. 106, Issue 4, p. 611-621
  • DOI: 10.1016/0022-0248(90)90034-I

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