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Title: Processing of insulators and semiconductors

Abstract

A method is disclosed for processing an insulator material or a semiconductor material. The method includes pulsing a plasma lamp onto the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a large area region of the material. The method may further include pulsing a laser onto a selected region of the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a selected region of the material.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1184555
Patent Number(s):
9059079
Application Number:
14/036,925
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE

Citation Formats

Quick, Nathaniel R., Joshi, Pooran C., Duty, Chad Edward, Jellison, Jr., Gerald Earle, and Angelini, Joseph Attilio. Processing of insulators and semiconductors. United States: N. p., 2015. Web.
Quick, Nathaniel R., Joshi, Pooran C., Duty, Chad Edward, Jellison, Jr., Gerald Earle, & Angelini, Joseph Attilio. Processing of insulators and semiconductors. United States.
Quick, Nathaniel R., Joshi, Pooran C., Duty, Chad Edward, Jellison, Jr., Gerald Earle, and Angelini, Joseph Attilio. Tue . "Processing of insulators and semiconductors". United States. https://www.osti.gov/servlets/purl/1184555.
@article{osti_1184555,
title = {Processing of insulators and semiconductors},
author = {Quick, Nathaniel R. and Joshi, Pooran C. and Duty, Chad Edward and Jellison, Jr., Gerald Earle and Angelini, Joseph Attilio},
abstractNote = {A method is disclosed for processing an insulator material or a semiconductor material. The method includes pulsing a plasma lamp onto the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a large area region of the material. The method may further include pulsing a laser onto a selected region of the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a selected region of the material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}

Patent:

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