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Title: In-situ sputtering apparatus

Abstract

A sputtering apparatus that includes at least a target presented as an inner surface of a confinement structure, the inner surface of the confinement structure is preferably an internal wall of a circular tube. A cathode is disposed adjacent the internal wall of the circular tube. The cathode preferably provides a hollow core, within which a magnetron is disposed. Preferably, an actuator is attached to the magnetron, wherein a position of the magnetron within the hollow core is altered upon activation of the actuator. Additionally, a carriage supporting the cathode and communicating with the target is preferably provided, and a cable bundle interacting with the cathode and linked to a cable bundle take up mechanism provided power and coolant to the cathode, magnetron, actuator and an anode of the sputtering apparatus.

Inventors:
; ; ;
Issue Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1183936
Patent Number(s):
9,051,638
Application Number:
13/782,270
Assignee:
Brookhaven Science Associates, LLC (Upton, NY)
DOE Contract Number:  
AC02-98CH10886
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 42 ENGINEERING

Citation Formats

Erickson, Mark R., Poole, Henry J., Custer, III, Arthur W., and Hershcovitch, Ady. In-situ sputtering apparatus. United States: N. p., 2015. Web.
Erickson, Mark R., Poole, Henry J., Custer, III, Arthur W., & Hershcovitch, Ady. In-situ sputtering apparatus. United States.
Erickson, Mark R., Poole, Henry J., Custer, III, Arthur W., and Hershcovitch, Ady. Tue . "In-situ sputtering apparatus". United States. https://www.osti.gov/servlets/purl/1183936.
@article{osti_1183936,
title = {In-situ sputtering apparatus},
author = {Erickson, Mark R. and Poole, Henry J. and Custer, III, Arthur W. and Hershcovitch, Ady},
abstractNote = {A sputtering apparatus that includes at least a target presented as an inner surface of a confinement structure, the inner surface of the confinement structure is preferably an internal wall of a circular tube. A cathode is disposed adjacent the internal wall of the circular tube. The cathode preferably provides a hollow core, within which a magnetron is disposed. Preferably, an actuator is attached to the magnetron, wherein a position of the magnetron within the hollow core is altered upon activation of the actuator. Additionally, a carriage supporting the cathode and communicating with the target is preferably provided, and a cable bundle interacting with the cathode and linked to a cable bundle take up mechanism provided power and coolant to the cathode, magnetron, actuator and an anode of the sputtering apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}

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