Methods and apparatus for mid-infrared sensing
Abstract
A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum, to probe the absorption spectrum of fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.
- Inventors:
- Issue Date:
- Research Org.:
- The Massachusetts Institute of Technology, Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1183347
- Patent Number(s):
- 9046650
- Application Number:
- 14/076,655
- Assignee:
- The Massachusetts Institute of Technology (Cambridge, MA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- NA000421
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 54 ENVIRONMENTAL SCIENCES
Citation Formats
Lin, Pao Tai, Cai, Yan, Agarwal, Anuradha Murthy, and Kimerling, Lionel C. Methods and apparatus for mid-infrared sensing. United States: N. p., 2015.
Web.
Lin, Pao Tai, Cai, Yan, Agarwal, Anuradha Murthy, & Kimerling, Lionel C. Methods and apparatus for mid-infrared sensing. United States.
Lin, Pao Tai, Cai, Yan, Agarwal, Anuradha Murthy, and Kimerling, Lionel C. Tue .
"Methods and apparatus for mid-infrared sensing". United States. https://www.osti.gov/servlets/purl/1183347.
@article{osti_1183347,
title = {Methods and apparatus for mid-infrared sensing},
author = {Lin, Pao Tai and Cai, Yan and Agarwal, Anuradha Murthy and Kimerling, Lionel C.},
abstractNote = {A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum, to probe the absorption spectrum of fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}
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