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Title: Methods and apparatus for mid-infrared sensing

Abstract

A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum, to probe the absorption spectrum of fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.

Inventors:
; ; ;
Issue Date:
Research Org.:
The Massachusetts Institute of Technology, Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1183347
Patent Number(s):
9,046,650
Application Number:
14/076,655
Assignee:
The Massachusetts Institute of Technology (Cambridge, MA)
DOE Contract Number:  
NA000421
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 54 ENVIRONMENTAL SCIENCES

Citation Formats

Lin, Pao Tai, Cai, Yan, Agarwal, Anuradha Murthy, and Kimerling, Lionel C. Methods and apparatus for mid-infrared sensing. United States: N. p., 2015. Web.
Lin, Pao Tai, Cai, Yan, Agarwal, Anuradha Murthy, & Kimerling, Lionel C. Methods and apparatus for mid-infrared sensing. United States.
Lin, Pao Tai, Cai, Yan, Agarwal, Anuradha Murthy, and Kimerling, Lionel C. Tue . "Methods and apparatus for mid-infrared sensing". United States. https://www.osti.gov/servlets/purl/1183347.
@article{osti_1183347,
title = {Methods and apparatus for mid-infrared sensing},
author = {Lin, Pao Tai and Cai, Yan and Agarwal, Anuradha Murthy and Kimerling, Lionel C.},
abstractNote = {A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum, to probe the absorption spectrum of fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}

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Works referenced in this record:

Single polarization transmission in pedestal-supported silicon waveguides
journal, January 2011

  • Cheng, Jierong; Zhang, Wei; Zhou, Qiang
  • Optics Letters, Vol. 36, Issue 10
  • DOI: 10.1364/OL.36.001797