Method of fabricating high-density hermetic electrical feedthroughs
Abstract
A method of fabricating electrical feedthroughs selectively removes substrate material from a first side of an electrically conductive substrate (e.g. a bio-compatible metal) to form an array of electrically conductive posts in a substrate cavity. An electrically insulating material (e.g. a bio-compatible sealing glass) is then flowed to fill the substrate cavity and surround each post, and solidified. The solidified insulating material is then exposed from an opposite second side of the substrate so that each post is electrically isolated from each other as well as the bulk substrate. In this manner a hermetic electrically conductive feedthrough construction is formed having an array of electrical feedthroughs extending between the first and second sides of the substrate from which it was formed.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1183342
- Patent Number(s):
- 9048012
- Application Number:
- 14/009,332
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- Patent Classifications (CPCs):
-
A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61N - ELECTROTHERAPY
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES
- DOE Contract Number:
- AC52-07NA27344
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 60 APPLIED LIFE SCIENCES; 36 MATERIALS SCIENCE; 59 BASIC BIOLOGICAL SCIENCES
Citation Formats
Shah, Kedar G., Pannu, Satinderpall S., and Delima, Terri L. Method of fabricating high-density hermetic electrical feedthroughs. United States: N. p., 2015.
Web.
Shah, Kedar G., Pannu, Satinderpall S., & Delima, Terri L. Method of fabricating high-density hermetic electrical feedthroughs. United States.
Shah, Kedar G., Pannu, Satinderpall S., and Delima, Terri L. Tue .
"Method of fabricating high-density hermetic electrical feedthroughs". United States. https://www.osti.gov/servlets/purl/1183342.
@article{osti_1183342,
title = {Method of fabricating high-density hermetic electrical feedthroughs},
author = {Shah, Kedar G. and Pannu, Satinderpall S. and Delima, Terri L.},
abstractNote = {A method of fabricating electrical feedthroughs selectively removes substrate material from a first side of an electrically conductive substrate (e.g. a bio-compatible metal) to form an array of electrically conductive posts in a substrate cavity. An electrically insulating material (e.g. a bio-compatible sealing glass) is then flowed to fill the substrate cavity and surround each post, and solidified. The solidified insulating material is then exposed from an opposite second side of the substrate so that each post is electrically isolated from each other as well as the bulk substrate. In this manner a hermetic electrically conductive feedthrough construction is formed having an array of electrical feedthroughs extending between the first and second sides of the substrate from which it was formed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 02 00:00:00 EDT 2015},
month = {Tue Jun 02 00:00:00 EDT 2015}
}
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