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Title: Wet-chemical systems and methods for producing black silicon substrates

Abstract

A wet-chemical method of producing a black silicon substrate. The method comprising soaking single crystalline silicon wafers in a predetermined volume of a diluted inorganic compound solution. The substrate is combined with an etchant solution that forms a uniform noble metal nanoparticle induced Black Etch of the silicon wafer, resulting in a nanoparticle that is kinetically stabilized. The method comprising combining with an etchant solution having equal volumes acetonitrile/acetic acid:hydrofluoric acid:hydrogen peroxide.

Inventors:
; ;
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1179804
Patent Number(s):
9034216
Application Number:
13/825,541
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 36 MATERIALS SCIENCE; 14 SOLAR ENERGY

Citation Formats

Yost, Vernon, Yuan, Hao-Chih, and Page, Matthew. Wet-chemical systems and methods for producing black silicon substrates. United States: N. p., 2015. Web.
Yost, Vernon, Yuan, Hao-Chih, & Page, Matthew. Wet-chemical systems and methods for producing black silicon substrates. United States.
Yost, Vernon, Yuan, Hao-Chih, and Page, Matthew. Tue . "Wet-chemical systems and methods for producing black silicon substrates". United States. https://www.osti.gov/servlets/purl/1179804.
@article{osti_1179804,
title = {Wet-chemical systems and methods for producing black silicon substrates},
author = {Yost, Vernon and Yuan, Hao-Chih and Page, Matthew},
abstractNote = {A wet-chemical method of producing a black silicon substrate. The method comprising soaking single crystalline silicon wafers in a predetermined volume of a diluted inorganic compound solution. The substrate is combined with an etchant solution that forms a uniform noble metal nanoparticle induced Black Etch of the silicon wafer, resulting in a nanoparticle that is kinetically stabilized. The method comprising combining with an etchant solution having equal volumes acetonitrile/acetic acid:hydrofluoric acid:hydrogen peroxide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {5}
}

Works referenced in this record:

Nanostructured black silicon and the optical reflectance of graded-density surfaces
journal, June 2009


Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules
journal, September 2009


Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells
journal, September 2011


Extremely Superhydrophobic Surfaces with Micro- and Nanostructures Fabricated by Copper Catalytic Etching
journal, January 2011


Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006


Patterning of various silicon structures via polymer lithography and catalytic chemical etching
journal, May 2011


Efficient SERS substrates made by electroless silver deposition into patterned silicon structures
journal, January 2004


Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst
journal, January 2006


Metal-assisted chemical etching in HF/H2O2 produces porous silicon
journal, October 2000


Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle
journal, August 2008


10 μm minority-carrier diffusion lengths in Si wires synthesized by Cu-catalyzed vapor-liquid-solid growth
journal, October 2009


Nano-sized Taper Structure Formed by Wet Process Using Catalysis of Gold Nanoparticle
journal, January 2007


Black multi-crystalline silicon solar cells
journal, March 2007


Black nonreflecting silicon surfaces for solar cells
journal, May 2006


Surface texturing for silicon solar cells using reactive ion etching technique
conference, January 2002

  • Kumaravelu, G.; Alkaisi, M. M.; Bittar, A.
  • Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference 2002, Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002.
  • https://doi.org/10.1109/PVSC.2002.1190507