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Title: Wet-chemical systems and methods for producing black silicon substrates

Abstract

A wet-chemical method of producing a black silicon substrate. The method comprising soaking single crystalline silicon wafers in a predetermined volume of a diluted inorganic compound solution. The substrate is combined with an etchant solution that forms a uniform noble metal nanoparticle induced Black Etch of the silicon wafer, resulting in a nanoparticle that is kinetically stabilized. The method comprising combining with an etchant solution having equal volumes acetonitrile/acetic acid:hydrofluoric acid:hydrogen peroxide.

Inventors:
; ;
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1179804
Patent Number(s):
9,034,216
Application Number:
13/825,541
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 36 MATERIALS SCIENCE; 14 SOLAR ENERGY

Citation Formats

Yost, Vernon, Yuan, Hao-Chih, and Page, Matthew. Wet-chemical systems and methods for producing black silicon substrates. United States: N. p., 2015. Web.
Yost, Vernon, Yuan, Hao-Chih, & Page, Matthew. Wet-chemical systems and methods for producing black silicon substrates. United States.
Yost, Vernon, Yuan, Hao-Chih, and Page, Matthew. Tue . "Wet-chemical systems and methods for producing black silicon substrates". United States. https://www.osti.gov/servlets/purl/1179804.
@article{osti_1179804,
title = {Wet-chemical systems and methods for producing black silicon substrates},
author = {Yost, Vernon and Yuan, Hao-Chih and Page, Matthew},
abstractNote = {A wet-chemical method of producing a black silicon substrate. The method comprising soaking single crystalline silicon wafers in a predetermined volume of a diluted inorganic compound solution. The substrate is combined with an etchant solution that forms a uniform noble metal nanoparticle induced Black Etch of the silicon wafer, resulting in a nanoparticle that is kinetically stabilized. The method comprising combining with an etchant solution having equal volumes acetonitrile/acetic acid:hydrofluoric acid:hydrogen peroxide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {5}
}

Patent:

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Works referenced in this record:

Nanostructured black silicon and the optical reflectance of graded-density surfaces
journal, June 2009

  • Branz, Howard M.; Yost, Vernon E.; Ward, Scott
  • Applied Physics Letters, Vol. 94, Issue 23
  • DOI: 10.1063/1.3152244

Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules
journal, September 2009

  • Yuan, Hao-Chih; Yost, Vernon E.; Page, Matthew R.
  • Applied Physics Letters, Vol. 95, Issue 12
  • DOI: 10.1063/1.3231438

Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells
journal, September 2011

  • Toor, Fatima; Branz, Howard M.; Page, Matthew R.
  • Applied Physics Letters, Vol. 99, Issue 10
  • DOI: 10.1063/1.3636105

Extremely Superhydrophobic Surfaces with Micro- and Nanostructures Fabricated by Copper Catalytic Etching
journal, January 2011

  • Lee, Jung-Pil; Choi, Sinho; Park, Soojin
  • Langmuir, Vol. 27, Issue 2
  • DOI: 10.1021/la1045354

Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006

  • Peng, K. Q.; Hu, J. J.; Yan, Y. J.
  • Advanced Functional Materials, Vol. 16, Issue 3, p. 387-394
  • DOI: 10.1002/adfm.200500392

Patterning of various silicon structures via polymer lithography and catalytic chemical etching
journal, May 2011


Efficient SERS substrates made by electroless silver deposition into patterned silicon structures
journal, January 2004

  • Liu, Feng-Ming; Green, Mino
  • Journal of Materials Chemistry, Vol. 14, Issue 10
  • DOI: 10.1039/B400488B

Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst
journal, January 2006

  • Tsujino, K.; Matsumura, M.; Nishimoto, Y.
  • Solar Energy Materials and Solar Cells, Vol. 90, Issue 1, p. 100-110
  • DOI: 10.1016/j.solmat.2005.02.019

Metal-assisted chemical etching in HF/H2O2 produces porous silicon
journal, October 2000

  • Li, X.; Bohn, P. W.
  • Applied Physics Letters, Vol. 77, Issue 16
  • DOI: 10.1063/1.1319191

Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle
journal, August 2008

  • Nishioka, Kensuke; Horita, Susumu; Ohdaira, Keisuke
  • Solar Energy Materials and Solar Cells, Vol. 92, Issue 8, p. 919-922
  • DOI: 10.1016/j.solmat.2008.02.017

10 μm minority-carrier diffusion lengths in Si wires synthesized by Cu-catalyzed vapor-liquid-solid growth
journal, October 2009

  • Putnam, Morgan C.; Turner-Evans, Daniel B.; Kelzenberg, Michael D.
  • Applied Physics Letters, Vol. 95, Issue 16, 163116
  • DOI: 10.1063/1.3247969

>16% thin-film epitaxial silicon solar cells on 70-cm 2 area with 30-µm active layer, porous silicon back reflector, and Cu-based top-contact metallization : Silicon solar cells, silicon reflector, metallization
journal, September 2011

  • Kuzma-Filipek, Izabela; Dross, Frederic; Baert, Kris
  • Progress in Photovoltaics: Research and Applications, Vol. 20, Issue 3
  • DOI: 10.1002/pip.1146

Nano-sized Taper Structure Formed by Wet Process Using Catalysis of Gold Nanoparticle
journal, January 2007


Black multi-crystalline silicon solar cells
journal, March 2007

  • Koynov, Svetoslav; Brandt, Martin S.; Stutzmann, Martin
  • physica status solidi (RRL) – Rapid Research Letters, Vol. 1, Issue 2
  • DOI: 10.1002/pssr.200600064

Black nonreflecting silicon surfaces for solar cells
journal, May 2006

  • Koynov, Svetoslav; Brandt, Martin S.; Stutzmann, Martin
  • Applied Physics Letters, Vol. 88, Issue 20
  • DOI: 10.1063/1.2204573

Surface texturing for silicon solar cells using reactive ion etching technique
conference, January 2002

  • Kumaravelu, G.; Alkaisi, M. M.; Bittar, A.
  • Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference 2002, Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002.
  • DOI: 10.1109/PVSC.2002.1190507