Title: Taxel-addressable matrix of vertical nanowire piezotronic transistors

Abstract

A tactile sensing matrix includes a substrate, a first plurality of elongated electrode structures, a plurality of vertically aligned piezoelectric members, an insulating layer infused into the piezoelectric members and a second plurality of elongated electrode structures. The first plurality of elongated electrode structures is disposed on the substrate along a first orientation. The vertically aligned piezoelectric members is disposed on the first plurality of elongated electrode structures and form a matrix having columns of piezoelectric members disposed along the first orientation and rows of piezoelectric members disposed along a second orientation that is transverse to the first orientation. The second plurality of elongated electrode structures is disposed on the insulating layer along the second orientation. The elongated electrode structures form a Schottky contact with the piezoelectric members. When pressure is applied to the piezoelectric members, current flow therethrough is modulated.

Inventors:

Wang, Zhong Lin; Wu, Wenzhuo; Wen, Xiaonan

Issue Date:

2015-05-05

Research Org.:

Georgia Institute of Technology, Atlanta, GA (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1179018

Patent Number(s):

9024395

Application Number:

14/019,691

Assignee:

Georgia Tech Research Corporation (Atlanta, GA)

Patent Classifications (CPCs):

G - PHYSICS G06 - COMPUTING G06F - ELECTRIC DIGITAL DATA PROCESSING

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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G - PHYSICS G06 - COMPUTING G06F - ELECTRIC DIGITAL DATA PROCESSING

G06F2203/04103 - Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L29/84 - controllable by variation of applied mechanical force, e.g. of pressure

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DOE Contract Number:  

FG02-07ER46394

Resource Type:

Patent

Resource Relation:

Patent File Date: 2013 Sep 06

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; 47 OTHER INSTRUMENTATION