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Title: Taxel-addressable matrix of vertical nanowire piezotronic transistors

A tactile sensing matrix includes a substrate, a first plurality of elongated electrode structures, a plurality of vertically aligned piezoelectric members, an insulating layer infused into the piezoelectric members and a second plurality of elongated electrode structures. The first plurality of elongated electrode structures is disposed on the substrate along a first orientation. The vertically aligned piezoelectric members is disposed on the first plurality of elongated electrode structures and form a matrix having columns of piezoelectric members disposed along the first orientation and rows of piezoelectric members disposed along a second orientation that is transverse to the first orientation. The second plurality of elongated electrode structures is disposed on the insulating layer along the second orientation. The elongated electrode structures form a Schottky contact with the piezoelectric members. When pressure is applied to the piezoelectric members, current flow therethrough is modulated.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1179018
Assignee:
Georgia Tech Research Corporation (Atlanta, GA) CHO
Patent Number(s):
9,024,395
Application Number:
14/019,691
Contract Number:
FG02-07ER46394
Resource Relation:
Patent File Date: 2013 Sep 06
Research Org:
Georgia Tech Research Corporation, Atlanta, GA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; 47 OTHER INSTRUMENTATION

Works referenced in this record:

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Formation of double-side teethed nanocombs of ZnO and self-catalysis of Zn-terminated polar surface
journal, January 2006