Methods and systems for positioning micro elements

Stalford, Harold L

Title: Methods and systems for positioning micro elements

Abstract

A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.

Inventors:: Stalford, Harold L

Issue Date:: 2015-04-28

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1178747

Patent Number(s):: 9015933

Application Number:: 13/417,564

Assignee:: MicroZeus, LLC (Dallas, TX)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B2201/037 - Microtransmissions
B81B2203/06 - Devices comprising elements which are movable in relation to each other, e.g. slidable or rotatable
B81B3/0059 - {Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/49009 - Dynamoelectric machine
Y10T29/49124 - On flat or curved insulated base, e.g., printed circuit, etc.
Y10T29/49133 - with component orienting

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2012 Mar 12

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; 36 MATERIALS SCIENCE

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                    Stalford, Harold L. Methods and systems for positioning micro elements.  United States: N. p., 2015. 
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                    Stalford, Harold L. Methods and systems for positioning micro elements.  United States.

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        "Methods and systems for positioning micro elements".  United States.  https://www.osti.gov/servlets/purl/1178747.

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@article{osti_1178747,

  title        = {Methods and systems for positioning micro elements},

  author       = {Stalford, Harold L},

  abstractNote = {A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2015},

  month        = {4}

}

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patent-application, July 2012

Stalford, Harold L.
US Patent Application 13/417564; 20120167377
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120167377

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Title: Methods and systems for positioning micro elements

Abstract

Citation Formats

Out-of-plane rotary micromirrors for reconfigurable photonic applications conference, January 2003

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion journal, January 2006

Laterally actuated torsional micromirrors for large static deflection journal, February 2003

Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope conference, January 2003

Single mask, large force, and large displacement electrostatic linear inchworm motors journal, August 2002

Tensile Strength of Cell Walls of Living Cells journal, October 1985

Development and Characterization of Microfluidic Devices and Systems for Magnetic Bead-Based Biochemical Detection journal, January 2001

A 64-site multishank CMOS low-profile neural stimulating probe journal, January 1996

Regeneration microelectrode array for peripheral nerve recording and stimulation journal, September 1992

Manipulation of biological cells using a microelectromagnet matrix journal, August 2004

A finite element model of cell deformation during magnetic bead twisting journal, October 2002

Applications of MEMS in Surgery journal, January 2004

A long-term in vitro silicon-based microelectrode-neuron connection journal, January 1988

Direct mechanical measurements of the elasticity of single DNA molecules by using magnetic beads journal, November 1992

Microfluidic devices for cellomics: a review journal, July 2003

Compact and precise positioner based on the Inchworm principle journal, November 2000

Large-output-force out-of-plane MEMS actuator array conference, April 2004

Characterization of a micromachined inchworm motor with thermoelastic linkage actuators conference, January 2002

Numerical simulation of microassembly of MEMS devices and post-assembly electromechanical actuation conference, October 2000

Out-of-plane mems shutter with continuous motion capability for voa application conference, January 2003

Development of surface micromachining technologies for microfluidics and bioMEMS conference, September 2001

An Application Of Mechanical Leverage To Microactuation conference, January 1995

Micro and Mesoscale Robotic Assembly journal, January 2004

Electrostatic microactuators with integrated gear linkages for mechanical power transmission conference, January 1996

Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots conference, January 2004

Magnetic bead handling on-chip: new opportunities for analytical applications journal, October 2004

Medical applications of MEMS conference, January 1995

Recent advances in medical applications of MEMS conference, January 1996

Solid-state microsensors for cortical nerve recordings journal, July 1994

Remote Control Valve Operator patent, September 1961

Monitoring Devices for Detecting Fission Products in a Gaseous Stream patent, June 1964

Cassette tape recorder patent, February 1979

Direct current micromotor patent, April 1982

Analog-display electronic watch with stator mounted rotor, hand spindles and gear train patent, January 1984

Rotary, vertical-drive, tethered micromotor patent, February 1993

Shaft support assembly for use in a polygon mirror drive motor patent, October 1993

Cooling microfan arrangements and process patent, March 1994

Stirring device patent, September 1995

Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process patent, May 1997

Fully integrated magnetic micromotors and methods for their fabrication patent, January 1998

Process to destroy biological activity in protein-containing feed patent, July 1998

Micro-turbo generator device patent, February 1999

Microelectromechanical reciprocating-tooth indexing apparatus patent, September 1999

Circuit boards using heat resistant resin for adhesive layers patent, September 2000

Compliant displacement-multiplying apparatus for microelectromechanical systems patent, January 2001

Micromotor and micropump patent, January 2001

Microelectromechanical ratcheting apparatus patent, April 2001

Remote-controllable, micro-scale device for use in in vivo medical diagnosis and/or treatment patent, May 2001

Microelectromechanical ratcheting apparatus patent, November 2001

Mems magnetically actuated switches and associated switching arrays patent, April 2002

Microturbomachinery patent, May 2002

Shaft sealing assembly having replaceable sealing sleeve patent, September 2003

Low cost integrated out-of-plane micro-device structures and method of making patent, December 2003

Method of forming an out-of-plane structure patent, February 2005

Erected mirror optical switch patent, June 2005

Photolithographically-patterned variable capacitor structures and method of making patent, July 2005

System and method for handling microcomponent parts for performing assembly of micro-devices patent, December 2005

Piezoelectric motors and motor driving configurations patent, December 2005

Method for assembly of complementary-shaped receptacle site and device microstructures patent, March 2006

Sockets for microassembly patent, April 2006

Microstructures using carbon fiber composite honeycomb beams patent, May 2006

Microassembly and method for using same patent, May 2006

Method of manufacturing a microcomponent assembly patent, August 2006

Piezoelectric actuator, timepiece, and electronic device patent, September 2006

Magnetically-coupled actuating valve assembly patent, January 2007

Positioning device for microscopic motion patent, March 2007

Coupled drive multi-position fluid valve apparatus and method patent, April 2007

Modular manipulation system for manipulating a sample under study with a microscope patent, May 2007

Drive apparatus and device with same patent, May 2008

Sealed mover assembly patent, September 2008

MEMS micromotor and timepiece equipped with this micromotor patent, March 2009

Drive device, particularly for a clockwork mechanism patent, December 2009

Method for assembling precision miniature bearings for minisystems and microsystems patent, April 2010

Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly patent-application, April 2002

Bi-directional micromechanical latching linear actuator patent-application, December 2002

Shaped microcomponent via reactive conversion of biologically-derived microtemplates patent-application, May 2003

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices patent-application, October 2003

Out-of-plane rotary micromirrors for reconfigurable photonic applications
conference, January 2003

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion
journal, January 2006

Laterally actuated torsional micromirrors for large static deflection
journal, February 2003

Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope
conference, January 2003

Single mask, large force, and large displacement electrostatic linear inchworm motors
journal, August 2002

Tensile Strength of Cell Walls of Living Cells
journal, October 1985

Development and Characterization of Microfluidic Devices and Systems for Magnetic Bead-Based Biochemical Detection
journal, January 2001

A 64-site multishank CMOS low-profile neural stimulating probe
journal, January 1996

Regeneration microelectrode array for peripheral nerve recording and stimulation
journal, September 1992

Manipulation of biological cells using a microelectromagnet matrix
journal, August 2004

A finite element model of cell deformation during magnetic bead twisting
journal, October 2002

Applications of MEMS in Surgery
journal, January 2004

A long-term in vitro silicon-based microelectrode-neuron connection
journal, January 1988

Direct mechanical measurements of the elasticity of single DNA molecules by using magnetic beads
journal, November 1992

Microfluidic devices for cellomics: a review
journal, July 2003

Compact and precise positioner based on the Inchworm principle
journal, November 2000

Large-output-force out-of-plane MEMS actuator array
conference, April 2004

Characterization of a micromachined inchworm motor with thermoelastic linkage actuators
conference, January 2002

Numerical simulation of microassembly of MEMS devices and post-assembly electromechanical actuation
conference, October 2000

Out-of-plane mems shutter with continuous motion capability for voa application
conference, January 2003

Development of surface micromachining technologies for microfluidics and bioMEMS
conference, September 2001

An Application Of Mechanical Leverage To Microactuation
conference, January 1995

Micro and Mesoscale Robotic Assembly
journal, January 2004

Electrostatic microactuators with integrated gear linkages for mechanical power transmission
conference, January 1996

Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots
conference, January 2004

Magnetic bead handling on-chip: new opportunities for analytical applications
journal, October 2004

Medical applications of MEMS
conference, January 1995

Recent advances in medical applications of MEMS
conference, January 1996

Solid-state microsensors for cortical nerve recordings
journal, July 1994

Remote Control Valve Operator
patent, September 1961

Monitoring Devices for Detecting Fission Products in a Gaseous Stream
patent, June 1964

Cassette tape recorder
patent, February 1979

Direct current micromotor
patent, April 1982

Analog-display electronic watch with stator mounted rotor, hand spindles and gear train
patent, January 1984

Rotary, vertical-drive, tethered micromotor
patent, February 1993

Shaft support assembly for use in a polygon mirror drive motor
patent, October 1993

Cooling microfan arrangements and process
patent, March 1994

Stirring device
patent, September 1995

Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
patent, May 1997

Fully integrated magnetic micromotors and methods for their fabrication
patent, January 1998

Process to destroy biological activity in protein-containing feed
patent, July 1998

Micro-turbo generator device
patent, February 1999

Microelectromechanical reciprocating-tooth indexing apparatus
patent, September 1999

Circuit boards using heat resistant resin for adhesive layers
patent, September 2000

Compliant displacement-multiplying apparatus for microelectromechanical systems
patent, January 2001

Micromotor and micropump
patent, January 2001

Microelectromechanical ratcheting apparatus
patent, April 2001

Remote-controllable, micro-scale device for use in in vivo medical diagnosis and/or treatment
patent, May 2001

Microelectromechanical ratcheting apparatus
patent, November 2001

Mems magnetically actuated switches and associated switching arrays
patent, April 2002

Microturbomachinery
patent, May 2002

Shaft sealing assembly having replaceable sealing sleeve
patent, September 2003

Low cost integrated out-of-plane micro-device structures and method of making
patent, December 2003

Method of forming an out-of-plane structure
patent, February 2005

Erected mirror optical switch
patent, June 2005

Photolithographically-patterned variable capacitor structures and method of making
patent, July 2005

System and method for handling microcomponent parts for performing assembly of micro-devices
patent, December 2005

Piezoelectric motors and motor driving configurations
patent, December 2005

Method for assembly of complementary-shaped receptacle site and device microstructures
patent, March 2006

Sockets for microassembly
patent, April 2006

Microstructures using carbon fiber composite honeycomb beams
patent, May 2006

Microassembly and method for using same
patent, May 2006

Method of manufacturing a microcomponent assembly
patent, August 2006

Piezoelectric actuator, timepiece, and electronic device
patent, September 2006

Magnetically-coupled actuating valve assembly
patent, January 2007

Positioning device for microscopic motion
patent, March 2007

Coupled drive multi-position fluid valve apparatus and method
patent, April 2007

Modular manipulation system for manipulating a sample under study with a microscope
patent, May 2007

Drive apparatus and device with same
patent, May 2008

Sealed mover assembly
patent, September 2008

MEMS micromotor and timepiece equipped with this micromotor
patent, March 2009

Drive device, particularly for a clockwork mechanism
patent, December 2009

Method for assembling precision miniature bearings for minisystems and microsystems
patent, April 2010

Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
patent-application, April 2002

Bi-directional micromechanical latching linear actuator
patent-application, December 2002

Shaped microcomponent via reactive conversion of biologically-derived microtemplates
patent-application, May 2003

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices
patent-application, October 2003

Low cost integrated out-of-plane micro-device structures and method of making
patent-application,

MEMS based motor
patent-application, June 2004

Surface micromachined mechanical micropumps and fluid shear mixing, lysing, and separation microsystems
patent-application, July 2004