Multilayer moisture barrier
Abstract
A moisture barrier, device or product having a moisture barrier or a method of fabricating a moisture barrier having at least a polymer layer, and interfacial layer, and a barrier layer. The polymer layer may be fabricated from any suitable polymer including, but not limited to, fluoropolymers such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), or ethylene-tetrafluoroethylene (ETFE). The interfacial layer may be formed by atomic layer deposition (ALD). In embodiments featuring an ALD interfacial layer, the deposited interfacial substance may be, but is not limited to, Al.sub.2O.sub.3, AlSiO.sub.x, TiO.sub.2, and an Al.sub.2O.sub.3/TiO.sub.2 laminate. The barrier layer associated with the interfacial layer may be deposited by plasma enhanced chemical vapor deposition (PECVD). The barrier layer may be a SiO.sub.xN.sub.y film.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1178243
- Patent Number(s):
- 9,013,018
- Application Number:
- 13/579,459
- Assignee:
- Beneq Oy (Vantaa, FI)
- DOE Contract Number:
- AC36-08GO28308
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Feb 17
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
Citation Formats
Pankow, Joel W, Jorgensen, Gary J, Terwilliger, Kent M, Glick, Stephen H, Isomaki, Nora, Harkonen, Kari, and Turkulainen, Tommy. Multilayer moisture barrier. United States: N. p., 2015.
Web.
Pankow, Joel W, Jorgensen, Gary J, Terwilliger, Kent M, Glick, Stephen H, Isomaki, Nora, Harkonen, Kari, & Turkulainen, Tommy. Multilayer moisture barrier. United States.
Pankow, Joel W, Jorgensen, Gary J, Terwilliger, Kent M, Glick, Stephen H, Isomaki, Nora, Harkonen, Kari, and Turkulainen, Tommy. Tue .
"Multilayer moisture barrier". United States. https://www.osti.gov/servlets/purl/1178243.
@article{osti_1178243,
title = {Multilayer moisture barrier},
author = {Pankow, Joel W and Jorgensen, Gary J and Terwilliger, Kent M and Glick, Stephen H and Isomaki, Nora and Harkonen, Kari and Turkulainen, Tommy},
abstractNote = {A moisture barrier, device or product having a moisture barrier or a method of fabricating a moisture barrier having at least a polymer layer, and interfacial layer, and a barrier layer. The polymer layer may be fabricated from any suitable polymer including, but not limited to, fluoropolymers such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), or ethylene-tetrafluoroethylene (ETFE). The interfacial layer may be formed by atomic layer deposition (ALD). In embodiments featuring an ALD interfacial layer, the deposited interfacial substance may be, but is not limited to, Al.sub.2O.sub.3, AlSiO.sub.x, TiO.sub.2, and an Al.sub.2O.sub.3/TiO.sub.2 laminate. The barrier layer associated with the interfacial layer may be deposited by plasma enhanced chemical vapor deposition (PECVD). The barrier layer may be a SiO.sub.xN.sub.y film.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {4}
}
Works referenced in this record:
Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers
journal, July 2006
- Carcia, P. F.; McLean, R. S.; Reilly, M. H.
- Applied Physics Letters, Vol. 89, Issue 3
Gas diffusion barriers on polymers using Al2O3 atomic layer deposition
journal, January 2006
- Groner, M. D.; George, S. M.; McLean, R. S.
- Applied Physics Letters, Vol. 88, Issue 5