Layered CU-based electrode for high-dielectric constant oxide thin film-based devices
Abstract
A layered device including a substrate; an adhering layer thereon. An electrical conducting layer such as copper is deposited on the adhering layer and then a barrier layer of an amorphous oxide of TiAl followed by a high dielectric layer are deposited to form one or more of an electrical device such as a capacitor or a transistor or MEMS and/or a magnetic device.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1176291
- Patent Number(s):
- 7714405
- Application Number:
- 11/073,263
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-31-109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Auciello, Orlando. Layered CU-based electrode for high-dielectric constant oxide thin film-based devices. United States: N. p., 2010.
Web.
Auciello, Orlando. Layered CU-based electrode for high-dielectric constant oxide thin film-based devices. United States.
Auciello, Orlando. Tue .
"Layered CU-based electrode for high-dielectric constant oxide thin film-based devices". United States. https://www.osti.gov/servlets/purl/1176291.
@article{osti_1176291,
title = {Layered CU-based electrode for high-dielectric constant oxide thin film-based devices},
author = {Auciello, Orlando},
abstractNote = {A layered device including a substrate; an adhering layer thereon. An electrical conducting layer such as copper is deposited on the adhering layer and then a barrier layer of an amorphous oxide of TiAl followed by a high dielectric layer are deposited to form one or more of an electrical device such as a capacitor or a transistor or MEMS and/or a magnetic device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {5}
}
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