Synthesis of transparent conducting oxide coatings
Abstract
A method and system for preparing a light transmitting and electrically conductive oxide film. The method and system includes providing an atomic layer deposition system, providing a first precursor selected from the group of cyclopentadienyl indium, tetrakis (dimethylamino) tin and mixtures thereof, inputting to the deposition system the first precursor for reaction for a first selected time, providing a purge gas for a selected time, providing a second precursor comprised of an oxidizer, and optionally inputting a second precursor into the deposition system for reaction and alternating for a predetermined number of cycles each of the first precursor, the purge gas and the second precursor to produce the oxide film.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1176266
- Patent Number(s):
- 7709056
- Application Number:
- 11/804,059
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
Citation Formats
Elam, Jeffrey W., Martinson, Alex B. F., Pellin, Michael J., and Hupp, Joseph T. Synthesis of transparent conducting oxide coatings. United States: N. p., 2010.
Web.
Elam, Jeffrey W., Martinson, Alex B. F., Pellin, Michael J., & Hupp, Joseph T. Synthesis of transparent conducting oxide coatings. United States.
Elam, Jeffrey W., Martinson, Alex B. F., Pellin, Michael J., and Hupp, Joseph T. Tue .
"Synthesis of transparent conducting oxide coatings". United States. https://www.osti.gov/servlets/purl/1176266.
@article{osti_1176266,
title = {Synthesis of transparent conducting oxide coatings},
author = {Elam, Jeffrey W. and Martinson, Alex B. F. and Pellin, Michael J. and Hupp, Joseph T.},
abstractNote = {A method and system for preparing a light transmitting and electrically conductive oxide film. The method and system includes providing an atomic layer deposition system, providing a first precursor selected from the group of cyclopentadienyl indium, tetrakis (dimethylamino) tin and mixtures thereof, inputting to the deposition system the first precursor for reaction for a first selected time, providing a purge gas for a selected time, providing a second precursor comprised of an oxidizer, and optionally inputting a second precursor into the deposition system for reaction and alternating for a predetermined number of cycles each of the first precursor, the purge gas and the second precursor to produce the oxide film.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {5}
}
Works referenced in this record:
Atomic Layer Deposition of In 2 O 3 Using Cyclopentadienyl Indium: A New Synthetic Route to Transparent Conducting Oxide Films
journal, July 2006
- Elam, Jeffrey W.; Martinson, Alex B. F.; Pellin, Michael J.
- Chemistry of Materials, Vol. 18, Issue 15
Tin Oxide Films Deposited by Ozone-Assisted Thermal Chemical Vapor Deposition
journal, May 1999
- Bae, Jeong-Woon; Lee, Sang-Woon; Song, Kook-Hyun
- Japanese Journal of Applied Physics, Vol. 38, Issue Part 1, No. 5A
High-Mobility Ga0.47ln0.53As/lnP heterostructure by atmospheric-pressure MOVPE using cyclopentadienyl indium
journal, March 1996
- Usuda, M.; Sato, K.; Takeuchi, R.
- Journal of Electronic Materials, Vol. 25, Issue 3