DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Synthesis of transparent conducting oxide coatings

Abstract

A method and system for preparing a light transmitting and electrically conductive oxide film. The method and system includes providing an atomic layer deposition system, providing a first precursor selected from the group of cyclopentadienyl indium, tetrakis (dimethylamino) tin and mixtures thereof, inputting to the deposition system the first precursor for reaction for a first selected time, providing a purge gas for a selected time, providing a second precursor comprised of an oxidizer, and optionally inputting a second precursor into the deposition system for reaction and alternating for a predetermined number of cycles each of the first precursor, the purge gas and the second precursor to produce the oxide film.

Inventors:
; ; ;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1176266
Patent Number(s):
7709056
Application Number:
11/804,059
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Elam, Jeffrey W., Martinson, Alex B. F., Pellin, Michael J., and Hupp, Joseph T. Synthesis of transparent conducting oxide coatings. United States: N. p., 2010. Web.
Elam, Jeffrey W., Martinson, Alex B. F., Pellin, Michael J., & Hupp, Joseph T. Synthesis of transparent conducting oxide coatings. United States.
Elam, Jeffrey W., Martinson, Alex B. F., Pellin, Michael J., and Hupp, Joseph T. Tue . "Synthesis of transparent conducting oxide coatings". United States. https://www.osti.gov/servlets/purl/1176266.
@article{osti_1176266,
title = {Synthesis of transparent conducting oxide coatings},
author = {Elam, Jeffrey W. and Martinson, Alex B. F. and Pellin, Michael J. and Hupp, Joseph T.},
abstractNote = {A method and system for preparing a light transmitting and electrically conductive oxide film. The method and system includes providing an atomic layer deposition system, providing a first precursor selected from the group of cyclopentadienyl indium, tetrakis (dimethylamino) tin and mixtures thereof, inputting to the deposition system the first precursor for reaction for a first selected time, providing a purge gas for a selected time, providing a second precursor comprised of an oxidizer, and optionally inputting a second precursor into the deposition system for reaction and alternating for a predetermined number of cycles each of the first precursor, the purge gas and the second precursor to produce the oxide film.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {5}
}

Works referenced in this record:

Atomic Layer Deposition of In 2 O 3 Using Cyclopentadienyl Indium:  A New Synthetic Route to Transparent Conducting Oxide Films
journal, July 2006


Tin Oxide Films Deposited by Ozone-Assisted Thermal Chemical Vapor Deposition
journal, May 1999


High-Mobility Ga0.47ln0.53As/lnP heterostructure by atmospheric-pressure MOVPE using cyclopentadienyl indium
journal, March 1996