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Title: Nanolaminate deformable mirrors

Abstract

A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.

Inventors:
;
Issue Date:
Research Org.:
Lawrence Livermore National Security, LLC, Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1176220
Patent Number(s):
7692838
Application Number:
12/362,758
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Papavasiliou, Alexandros P., and Olivier, Scot S. Nanolaminate deformable mirrors. United States: N. p., 2010. Web.
Papavasiliou, Alexandros P., & Olivier, Scot S. Nanolaminate deformable mirrors. United States.
Papavasiliou, Alexandros P., and Olivier, Scot S. Tue . "Nanolaminate deformable mirrors". United States. https://www.osti.gov/servlets/purl/1176220.
@article{osti_1176220,
title = {Nanolaminate deformable mirrors},
author = {Papavasiliou, Alexandros P. and Olivier, Scot S.},
abstractNote = {A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {4}
}

Works referenced in this record:

Performance of flexure-hinged substrate-nanolaminate deformable mirror through modeling and simulation
conference, January 2004


Hinged substrate for large-aperture lightweight deformable mirrors: a novel concept
conference, December 2002