Composite patterning devices for soft lithography
Abstract
The present invention provides methods, devices and device components for fabricating patterns on substrate surfaces, particularly patterns comprising structures having microsized and/or nanosized features of selected lengths in one, two or three dimensions. The present invention provides composite patterning devices comprising a plurality of polymer layers each having selected mechanical properties, such as Young's Modulus and flexural rigidity, selected physical dimensions, such as thickness, surface area and relief pattern dimensions, and selected thermal properties, such as coefficients of thermal expansion, to provide high resolution patterning on a variety of substrate surfaces and surface morphologies.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1176164
- Patent Number(s):
- 7195733
- Application Number:
- 11/115,954
- Assignee:
- The Board of Trustees of the University of Illinois (Urbana, IL)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
- DOE Contract Number:
- FG02-91ER45439
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2005 Apr 27
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Rogers, John A., and Menard, Etienne. Composite patterning devices for soft lithography. United States: N. p., 2007.
Web.
Rogers, John A., & Menard, Etienne. Composite patterning devices for soft lithography. United States.
Rogers, John A., and Menard, Etienne. Tue .
"Composite patterning devices for soft lithography". United States. https://www.osti.gov/servlets/purl/1176164.
@article{osti_1176164,
title = {Composite patterning devices for soft lithography},
author = {Rogers, John A. and Menard, Etienne},
abstractNote = {The present invention provides methods, devices and device components for fabricating patterns on substrate surfaces, particularly patterns comprising structures having microsized and/or nanosized features of selected lengths in one, two or three dimensions. The present invention provides composite patterning devices comprising a plurality of polymer layers each having selected mechanical properties, such as Young's Modulus and flexural rigidity, selected physical dimensions, such as thickness, surface area and relief pattern dimensions, and selected thermal properties, such as coefficients of thermal expansion, to provide high resolution patterning on a variety of substrate surfaces and surface morphologies.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 27 00:00:00 EDT 2007},
month = {Tue Mar 27 00:00:00 EDT 2007}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Electrical Contacts to Molecular Layers by Nanotransfer Printing
journal, July 2003
- Loo, Yueh-Lin; Lang, David V.; Rogers, John A.
- Nano Letters, Vol. 3, Issue 7, p. 913-917
Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
journal, October 2003
- Li, Xinxin; Ono, Takahito; Wang, Yuelin
- Applied Physics Letters, Vol. 83, Issue 15, p. 3081-3083
Template Synthesis of Electronically Conductive Polymer Nanostructures
journal, February 1995
- Martin, Charles R.
- Accounts of Chemical Research, Vol. 28, Issue 2, p. 61-68
Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
journal, June 2003
- Roundy, David; Joannopoulos, John
- Applied Physics Letters, Vol. 82, Issue 22, p. 3835-3837
Fabrication of periodic nanostructures by phase-controlled multiple-beam interference
journal, December 2003
- Klein-Wiele, Jan-Hendrik; Simon, Peter
- Applied Physics Letters, Vol. 83, Issue 23, p. 4707-4709
Cathodoluminescence Properties of Undoped and Zn-Doped AlxGa1-xN Grown by Metalorganic Vapor Phase Epitaxy
journal, August 1991
- Itoh, Kenji; Amano, Hiroshi; Hiramatsu, Kazumasa
- Japanese Journal of Applied Physics, Vol. 30, Issue Part 1, No. 8, p. 1604-1608
Large area, high resolution, dry printing of conducting polymers for organic electronics
journal, January 2003
- Blanchet, Graciela B.; Loo, Yueh-Lin; Rogers, J. A.
- Applied Physics Letters, Vol. 82, Issue 3, p. 463-465
Organic single-crystal field-effect transistors
journal, May 2004
- de Boer, R. W. I.; Gershenson, M. E.; Morpurgo, A. F.
- physica status solidi (a), Vol. 201, Issue 6, p. 1302-1331
Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps
journal, February 2003
- Zaumseil, Jana; Someya, Takao; Bao, Zhenan
- Applied Physics Letters, Vol. 82, Issue 5, p. 793-795
Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases
journal, December 1996
- Goldman, R. S.; Kavanagh, K. L.; Wieder, H. H.
- Journal of Applied Physics, Vol. 80, Issue 12, p. 6849-6854
Colloidal Inks for Directed Assembly of 3-D Periodic Structures
journal, July 2002
- Smay, James E.; Cesarano, Joseph; Lewis, Jennifer A.
- Langmuir, Vol. 18, Issue 14, p. 5429-5437
Direct measurement of interfacial interactions between semispherical lenses and flat sheets of poly(dimethylsiloxane) and their chemical derivatives
journal, May 1991
- Chaudhury, Manoj K.; Whitesides, George M.
- Langmuir, Vol. 7, Issue 5, p. 1013-1025
Porous silica via colloidal crystallization
journal, October 1997
- Velev, O. D.; Jede, T. A.; Lobo, R. F.
- Nature, Vol. 389, Issue 6650, p. 447-448
Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
journal, September 2004
- Meitl, Matthew A.; Zhou, Yangxin; Gaur, Anshu
- Nano Letters, Vol. 4, Issue 9, p. 1643-1647
Ultrahigh-Density Nanowire Lattices and Circuits
journal, March 2003
- Melosh, Nicholas A.; Boukai, Akram; Diana, Frederic
- Science, Vol. 300, Issue 5616, p. 112-115
Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
journal, March 2003
- Divliansky, Ivan; Mayer, Theresa S.; Holliday, Kito S.
- Applied Physics Letters, Vol. 82, Issue 11, p. 1667-1669
On-chip natural assembly of silicon photonic bandgap crystals
journal, November 2001
- Vlasov, Yurii A.; Bo, Xiang-Zheng; Sturm, James C.
- Nature, Vol. 414, Issue 6861, p. 289-293
Organic light-emitting diodes formed by soft contact lamination
journal, January 2004
- Lee, T.-W.; Zaumseil, J.; Bao, Z.
- Proceedings of the National Academy of Sciences, Vol. 101, Issue 2, p. 429-433
Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
journal, October 2004
- Sun, Yugang; Rogers, John A.
- Nano Letters, Vol. 4, Issue 10, p. 1953-1959
Solution–Liquid–Solid Growth of Soluble GaAs Nanowires
journal, March 2003
- Yu, H.; Buhro, W.E.
- Advanced Materials, Vol. 15, Issue 5, p. 416-419
Rubber Stamping for Plastic Electronics and Fiber Optics
journal, July 2001
- Rogers, John A.
- MRS Bulletin, Vol. 26, Issue 07, p. 530-534
On the aging of oxygen plasma-treated polydimethylsiloxane surfaces
journal, June 1990
- Morra, M.; Occhiello, E.; Marola, R.
- Journal of Colloid and Interface Science, Vol. 137, Issue 1, p. 11-24
A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
journal, December 2003
- Wang, Yuliang; Jiang, Xuchuan; Xia, Younan
- Journal of the American Chemical Society, Vol. 125, Issue 52, p. 16176-16177
Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
journal, January 1994
- Morkved, T. L.; Wiltzius, P.; Jaeger, H. M.
- Applied Physics Letters, Vol. 64, Issue 4, p. 422-424
Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
journal, August 1998
- Crowder, M. A.; Carey, P. G.; Smith, P. M.
- IEEE Electron Device Letters, Vol. 19, Issue 8, p. 306-308
Gallium Arsenide Transistors: Realization Through a Molecularly Designed Insulator
journal, March 1994
- Jenkins, Phillip P.; MacInnes, Andrew N.; Tabib-Azar, Massood
- Science, Vol. 263, Issue 5154, p. 1751-1753
A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics
journal, January 1978
- Mori, Yoshifumi; Watanabe, Naozo
- Journal of The Electrochemical Society, Vol. 125, Issue 9, p. 1510-1514
Luminescence Photophysics in Semiconductor Nanocrystals
journal, November 1998
- Nirmal, Manoj; Brus, Louis
- Accounts of Chemical Research, Vol. 32, Issue 5, p. 407-414
Tailored Micropatterns through Weak Polyelectrolyte Stamping
journal, March 2003
- Berg, Michael C.; Choi, Jeeyoung; Hammond, Paula T.
- Langmuir, Vol. 19, Issue 6, p. 2231-2237
Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy
journal, December 2002
- Wu, Z. H.; Mei, X. Y.; Kim, D.
- Applied Physics Letters, Vol. 81, Issue 27, p. 5177-5179
Semiconductor nanotube formation by a two-step template process
journal, October 1996
- Hoyer, Patrick
- Advanced Materials, Vol. 8, Issue 10, p. 857-859
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997
- Park, Miri; Harrison, Christopher; Chaikin, Paul M.
- Science, Vol. 276, Issue 5317, p. 1401-1404
Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires
journal, October 2003
- Wu, Z. H.; Mei, X.; Kim, D.
- Applied Physics Letters, Vol. 83, Issue 16, p. 3368-3370
Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
journal, October 2004
- Meisel, D. C.; Wegener, M.; Busch, K.
- Physical Review B, Vol. 70, Issue 16, Article No. 165104
An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
journal, July 1992
- Luan, Shengwen; Neudeck, Gerold W.
- Journal of Applied Physics, Vol. 72, Issue 2, p. 766-772
From Micro- to Nanofabrication with Soft Materials
journal, November 2000
- Quake, Stephen R.; Scherer, Axel
- Science, Vol. 290, Issue 5496, p. 1536-1540
High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
journal, September 2002
- Loo, Yueh-Lin; Hsu, Julia W. P.; Willett, Robert L.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856
Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
journal, June 2003
- Toader, Ovidiu; Berciu, Mona; John, Sajeev
- Physical Review Letters, Vol. 90, Issue 23, Article No. 233901
Polymer-Polymer Phase Behavior
journal, February 1991
- Bates, Frank S.
- Science, Vol. 251, Issue 4996, p. 898-905
Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer
journal, May 1998
- Whitesides, George M.; Bowden, Ned; Brittain, Scott
- Nature, Vol. 393, Issue 6681, p. 146-149
Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy
journal, September 2003
- Tao, Andrea; Kim, Franklin; Hess, Christian
- Nano Letters, Vol. 3, Issue 9, p. 1229-1233
Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
journal, February 2005
- Menard, E.; Nuzzo, R. G.; Rogers, J. A.
- Applied Physics Letters, Vol. 86, Issue 9, Article No. 093507
Colloidal nanocrystal heterostructures with linear and branched topology
journal, July 2004
- Milliron, Delia J.; Hughes, Steven M.; Cui, Yi
- Nature, Vol. 430, Issue 6996, p. 190-195
Patterning organic–inorganic thin-film transistors using microcontact printed templates
journal, November 2001
- Kagan, C. R.; Breen, T. L.; Kosbar, L. L.
- Applied Physics Letters, Vol. 79, Issue 21, p. 3536-3538
Electric-field assisted assembly and alignment of metallic nanowires
journal, August 2000
- Smith, Peter A.; Nordquist, Christopher D.; Jackson, Thomas N.
- Applied Physics Letters, Vol. 77, Issue 9, p. 1399-1401
Nanowire Arrays Defined by Nanoimprint Lithography
journal, April 2004
- Martensson, Thomas; Carlberg, Patrick; Borgstrom, Magnus
- Nano Letters, Vol. 4, Issue 4, p. 699-702
Large Area Submicrometer Contact Printing Using a Contact Aligner
journal, June 2000
- Burgin, Timothy; Choong, Vi-En; Maracas, George
- Langmuir, Vol. 16, Issue 12, p. 5371-5375
Architectonic Quantum Dot Solids
journal, January 1999
- Markovich, Gil; Collier, C. Patrick; Henrichs, Sven E.
- Accounts of Chemical Research, Vol. 32, Issue 5, p. 415-423
High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics
journal, December 2004
- Menard, E.; Podzorov, V.; Hur, S.-H.
- Advanced Materials, Vol. 16, Issue 23-24, p. 2097-2101
Fabrication of photonic crystals for the visible spectrum by holographic lithography
journal, March 2000
- Campbell, M.; Sharp, D. N.; Harrison, M. T.
- Nature, Vol. 404, Issue 6773, p. 53-56
Scalable Interconnection and Integration of Nanowire Devices without Registration
journal, May 2004
- Jin, Song; Whang, Dongmok; McAlpine, Michael C.
- Nano Letters, Vol. 4, Issue 5, p. 915-919
Block copolymers as photonic bandgap materials
journal, November 1999
- Fink, Y.; Urbas, A. M.; Bawendi, M. G.
- Journal of Lightwave Technology, Vol. 17, Issue 11, p. 1963-1969
An improved GaAs device model for the simulation of analog integrated circuit
journal, May 2003
- Matsunaga, N.; Yamamoto, M.; Hatta, Y.
- IEEE Transactions on Electron Devices, Vol. 50, Issue 5, p. 1194-1199
Mesoporous silica with micrometer-scale designs
journal, January 1997
- Yang, Hong; Coombs, Neil; Ozin, Geoffrey A.
- Advanced Materials, Vol. 9, Issue 10, p. 811-814
Silicon nanowire devices
journal, April 2000
- Chung, Sung-Wook; Yu, Jae-Young; Heath, James R.
- Applied Physics Letters, Vol. 76, Issue 15, p. 2068-2070
An analytical back-gate bias effect model for ultrathin SOI CMOS devices
journal, April 1993
- Sim, J.; Kuo, J. B.
- IEEE Transactions on Electron Devices, Vol. 40, Issue 4, p. 755-765
Printable organic and polymeric semiconducting materials and devices
journal, January 1999
- Bao, Zhenan; Rogers, John A.; Katz, Howard E.
- Journal of Materials Chemistry, Vol. 9, Issue 9, p. 1895-1904
Chemical Etching of InGaAsP/InP DH Wafer
journal, January 1982
- Adachi, Sadao; Noguchi, Yoshio; Kawaguchi, Hitoshi
- Journal of The Electrochemical Society, Vol. 129, Issue 5, p. 1053-1062
Toward Paperlike Displays
journal, February 2001
- Rogers, John A.
- Science, Vol. 291, Issue 5508, p. 1502-1503
Cheap and cheerful circuits
journal, September 2000
- Voss, David
- Nature, Vol. 407, Issue 6803, p. 442-444
The formation of controlled-porosity membranes from anodically oxidized aluminium
journal, January 1989
- Furneaux, R. C.; Rigby, W. R.; Davidson, A. P.
- Nature, Vol. 337, Issue 6203, p. 147-149
Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
journal, July 2002
- Loo, Y.-L.; Someya, T.; Baldwin, K. W.
- Proceedings of the National Academy of Sciences, Vol. 99, Issue 16, p. 10252-10256
Quantifying distortions in soft lithography
journal, June 1998
- Rogers, John A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 88-97
High-power laser diodes based on InGaAsP alloys
journal, June 1994
- Razeghi, Manijeh
- Nature, Vol. 369, Issue 6482, p. 631-633
Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
journal, June 2002
- Yang, Shu; Megens, Mischa; Aizenberg, Joanna
- Chemistry of Materials, Vol. 14, Issue 7, p. 2831-2833
Emerging Methods for Micro- and Nanofabrication
journal, July 2001
- Mirkin, Chad A.; Rogers, John A.
- MRS Bulletin, Vol. 26, Issue 07, p. 506-509
Measurement of nanomechanical resonant structures in single-crystal silicon
journal, December 1998
- Carr, D. W.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6, p. 3821-3824
Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks
journal, April 2001
- Rogers, J. A.; Bao, Z.; Baldwin, K.
- Proceedings of the National Academy of Sciences, Vol. 98, Issue 9, p. 4835-4840
Printing Patterns of Proteins
journal, April 1998
- Bernard, Andre; Delamarche, Emmanuel; Schmid, Heinz
- Langmuir, Vol. 14, Issue 9, p. 2225-2229
Patterned Protein Layers on Solid Substrates by Thin Stamp Microcontact Printing
journal, February 1998
- James, C. D.; Davis, R. C.; Kam, L.
- Langmuir, Vol. 14, Issue 4, p. 741-744
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003
- Ouk Kim, Sang; Solak, Harun H.; Stoykovich, Mark P.
- Nature, Vol. 424, Issue 6947, p. 411-414
Interfacial Chemistries for Nanoscale Transfer Printing
journal, July 2002
- Loo, Yueh-Lin; Willett, Robert L.; Baldwin, Kirk W.
- Journal of the American Chemical Society, Vol. 124, Issue 26, p. 7654-7655
Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
journal, August 2004
- Menard, Etienne; Bilhaut, Lise; Zaumseil, Jana
- Langmuir, Vol. 20, Issue 16, p. 6871-6878
Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
journal, January 1989
- Ramam, A.; Kapoor, S.; Prabhakar, S.
- Journal of The Electrochemical Society, Vol. 136, Issue 8, p. 2405-2410
Plastic transistors in active-matrix displays
journal, December 2001
- Huitema, H. E. A.; Gelinck, G. H.; van der Putten, J. B. P. H.
- Nature, Vol. 414, Issue 6864, Article No. 599
Nanobelts of Semiconducting Oxides
journal, March 2001
- Pan, Z. W.
- Science, Vol. 291, Issue 5510, p. 1947-1949
Nanolithography based on patterned metal transfer and its application to organic electronic devices
journal, May 2002
- Kim, Changsoon; Shtein, Max; Forrest, Stephen R.
- Applied Physics Letters, Vol. 80, Issue 21, p. 4051-4053
Soft Lithography
journal, August 1998
- Xia, Younan; Whitesides, George M.
- Annual Review of Materials Science, Vol. 28, Issue 1, p. 153-184
Hole mobility in organic single crystals measured by a “flip-crystal” field-effect technique
journal, August 2004
- Goldmann, C.; Haas, S.; Krellner, C.
- Journal of Applied Physics, Vol. 96, Issue 4, p. 2080-2086
Preparation of Macroporous Metal Films from Colloidal Crystals
journal, September 1999
- Jiang, Peng; Cizeron, Joel; Bertone, Jane F.
- Journal of the American Chemical Society, Vol. 121, Issue 34, p. 7957-7958
Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
journal, June 1998
- Rogers, John A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68
Microscopic patterning of orientated mesoscopic silica through guided growth
journal, December 1997
- Trau, M.; Yao, N.; Kim, E.
- Nature, Vol. 390, Issue 6661, p. 674-676
Colloidal Two-Dimensional Systems: CdSe Quantum Shells and Wells
journal, October 2003
- Battaglia, David; Li, Jack J.; Wang, Yunjun
- Angewandte Chemie International Edition, Vol. 42, Issue 41, p. 5035-5039
Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate
journal, January 2004
- Won, Sung Hwan; Chung, Jang Kyun; Lee, Chang Bin
- Journal of The Electrochemical Society, Vol. 151, Issue 3, p. G167-G170
Inkjet Printing of Functional Materials
journal, November 2003
- Sirringhaus, Henning; Shimoda, Tatsuya
- MRS Bulletin, Vol. 28, Issue 11, p. 802-806
One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
journal, March 2003
- Xia, Y.; Yang, P.; Sun, Y.
- Advanced Materials, Vol. 15, Issue 5, p. 353-389
High-mobility polymer gate dielectric pentacene thin film transistors
journal, November 2002
- Klauk, Hagen; Halik, Marcus; Zschieschang, Ute
- Journal of Applied Physics, Vol. 92, Issue 9, p. 5259-5263
Directed Assembly of One-Dimensional Nanostructures into Functional Networks
journal, January 2001
- Huang, Yu; Duan, Xiangfeng; Wei, Qingqiao
- Science, Vol. 291, Issue 5504, p. 630-633
Holographic photonic crystals with diamond symmetry
journal, November 2003
- Sharp, D. N.; Turberfield, A. J.; Denning, R. G.
- Physical Review B, Vol. 68, Issue 20, Article No. 205102
Decal Transfer Microlithography: A New Soft-Lithographic Patterning Method
journal, November 2002
- Childs, William R.; Nuzzo, Ralph G.
- Journal of the American Chemical Society, Vol. 124, Issue 45, p. 13583-13596
Analog and digital circuits using organic thin-film transistors on polyester substrates
journal, November 2000
- Kane, M. G.; Campi, J.; Hammond, M. S.
- IEEE Electron Device Letters, Vol. 21, Issue 11, p. 534-536
Supercritical Fluid–Liquid–Solid Synthesis of Gallium Arsenide Nanowires Seeded by Alkanethiol-Stabilized Gold Nanocrystals
journal, April 2004
- Davidson, F. M.; Schricker, A. D.; Wiacek, R. J.
- Advanced Materials, Vol. 16, Issue 7, p. 646-649
Invention of the integrated circuit
journal, July 1976
- Kilby, J. S.
- IEEE Transactions on Electron Devices, Vol. 23, Issue 7, p. 648-654
Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates
journal, March 2005
- Zhu, Z.-T.; Menard, E.; Hurley, K.
- Applied Physics Letters, Vol. 86, Issue 13, Article No. 133507
Microporous materials: Electrochemically grown photonic crystals
journal, December 1999
- Braun, Paul V.; Wiltzius, Pierre
- Nature, Vol. 402, Issue 6762, p. 603-604
Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
journal, February 2004
- Kong, Xiang Yang; Ding, Yong; Yang, Rusen
- Science, Vol. 303, Issue 5662, p. 1348-1351
Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks
journal, August 2004
- Jeon, S.; Menard, E.; Park, J.-U.
- Advanced Materials, Vol. 16, Issue 15, p. 1369-1373
Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth
journal, December 1995
- Trentler, Timothy J.; Hickman, Kathleen M.; Goel, Subhash C.
- Science, Vol. 270, Issue 5243, p. 1791-1794
Printed plastic electronics and paperlike displays
journal, August 2002
- Rogers, John A.; Bao, Zhenan
- Journal of Polymer Science Part A: Polymer Chemistry, Vol. 40, Issue 20, p. 3327-3334
Chemical Etching Characteristics of (001)GaAs
journal, January 1983
- Adachi, Sadao; Oe, Kunishige
- Journal of The Electrochemical Society, Vol. 130, Issue 12, p. 2427-2435
High-performance all-polymer integrated circuits
journal, September 2000
- Gelinck, G. H.; Geuns, T. C. T.; de Leeuw, D. M.
- Applied Physics Letters, Vol. 77, Issue 10, p. 1487-1489
Room-Temperature Ultraviolet Nanowire Nanolasers
journal, June 2001
- Huang, Michael H.; Mao, Samuel; Feick, Henning
- Science, Vol. 292, Issue 5523, p. 1897-1899
Ordered Mesoporous Polymers of Tunable Pore Size from Colloidal Silica Templates
journal, February 1999
- Johnson, Stacy A.; Ollivier, Patricia J.; Mallouk, Thomas E.
- Science, Vol. 283, Issue 5404, p. 963-965
Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths
journal, October 1998
- Zakhidov, Anvar A.; Baughman, Ray H.; Iqbal, Zafar
- Science, Vol. 282, Issue 5390, p. 897-901
Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
journal, September 1998
- Rogers, John A.; Meier, Martin; Dodabalapur, Ananth
- Applied Physics Letters, Vol. 73, Issue 13, p. 1766-1768
Photonic Band Gap Architectures for Holographic Lithography
journal, January 2004
- Toader, Ovidiu; Chan, Timothy Y. M.; John, Sajeev
- Physical Review Letters, Vol. 92, Issue 4, Article No. 043905
Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates
journal, February 2002
- Sheraw, C. D.; Zhou, L.; Huang, J. R.
- Applied Physics Letters, Vol. 80, Issue 6, p. 1088-1090
Nature of electrical contacts in a metal–molecule–semiconductor system
journal, March 2003
- Hsu, J. W. P.; Loo, Y. L.; Lang, D. V.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 4, p. 1928-1935
Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics
journal, July 2002
- Loo, Yueh-Lin; Willett, Robert L.; Baldwin, Kirk W.
- Applied Physics Letters, Vol. 81, Issue 3, p. 562-564
The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
journal, July 1998
- Schreiber, H. P.; Qin, Renyan; Sengupta, Ashok
- The Journal of Adhesion, Vol. 68, Issue 1-2, p. 31-44
Free-standing and vertically aligned InP nanowires grown by metalorganic vapor phase epitaxy
journal, March 2004
- Bhunia, S.; Kawamura, T.; Fujikawa, S.
- Physica E: Low-dimensional Systems and Nanostructures, Vol. 21, Issue 2-4, p. 583-587
Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes
journal, February 1999
- Hu, Jiangtao; Odom, Teri Wang; Lieber, Charles M.
- Accounts of Chemical Research, Vol. 32, Issue 5, p. 435-445
High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes
journal, January 1995
- Morkoc, H.; Mohammad, S. N.
- Science, Vol. 267, Issue 5194, p. 51-55
Finer features for functional microdevices
journal, August 2001
- Kawata, Satoshi; Sun, Hong-Bo; Tanaka, Tomokazu
- Nature, Vol. 412, Issue 6848, p. 697-698
High-performance thin-film transistors using semiconductor nanowires and nanoribbons
journal, September 2003
- Duan, Xiangfeng; Niu, Chunming; Sahi, Vijendra
- Nature, Vol. 425, Issue 6955, p. 274-278
Preparation of thin-film transistors with chemical bath deposited CdSe and CdS thin films
journal, January 2002
- Gan, F. Y.; Shih, I.
- IEEE Transactions on Electron Devices, Vol. 49, Issue 1, p. 15-18
An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication
journal, May 2002
- Zhou, Wenhui; Kuebler, Stephen M.; Braun, Kevin L.
- Science, Vol. 296, Issue 5570, p. 1106-1109
High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
journal, January 2003
- Lee, Y.; Li, Handong; Fonash, S. J.
- IEEE Electron Device Letters, Vol. 24, Issue 1, p. 19-21
Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays
journal, September 2001
- Harada, Yoshiko; Li, Xiuling; Bohn, Paul W.
- Journal of the American Chemical Society, Vol. 123, Issue 36, p. 8709-8717
Stability of molded polydimethylsiloxane microstructures
journal, January 1997
- Delamarche, Emmanuel; Schmid, Heinz; Michel, Bruno
- Advanced Materials, Vol. 9, Issue 9, p. 741-746
Self-aligned self-assembly process for fabricating organic thin-film transistors
journal, September 2004
- Ando, Masahiko; Kawasaki, Masahiro; Imazeki, Shuji
- Applied Physics Letters, Vol. 85, Issue 10, p. 1849-1851
Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
journal, September 2003
- Zaumseil, Jana; Meitl, Matthew A.; Hsu, Julia W. P.
- Nano Letters, Vol. 3, Issue 9, p. 1223-1227
Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching
journal, October 1993
- Kumar, Amit; Whitesides, George M.
- Applied Physics Letters, Vol. 63, Issue 14, p. 2002-2004
Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors
journal, January 2005
- Sun, Y.; Khang, D.-Y.; Hua, F.
- Advanced Functional Materials, Vol. 15, Issue 1, p. 30-40
Sharp exciton emission from single InAs quantum dots in GaAs nanowires
journal, September 2003
- Panev, Nikolay; Persson, Ann I.; Sköld, Niklas
- Applied Physics Letters, Vol. 83, Issue 11, p. 2238-2240
Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching
journal, February 1999
- Goetting, Laura B.; Deng, Tao; Whitesides, George M.
- Langmuir, Vol. 15, Issue 4, p. 1182-1191
A printable form of silicon for high performance thin film transistors on plastic substrates
journal, June 2004
- Menard, E.; Lee, K. J.; Khang, D.-Y.
- Applied Physics Letters, Vol. 84, Issue 26, p. 5398-5400
Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998
- Duffy, David C.; McDonald, J. Cooper; Schueller, Olivier J. A.
- Analytical Chemistry, Vol. 70, Issue 23, p. 4974-4984
Thin film transistors for displays on plastic substrates
journal, August 2000
- Lee, M. J.; Judge, C. P.; Wright, S. W.
- Solid-State Electronics, Vol. 44, Issue 8, p. 1431-1434
Wafer-level in-registry microstamping
journal, March 1999
- Folch, A.; Schmidt, M. A.
- Journal of Microelectromechanical Systems, Vol. 8, Issue 1, p. 85-89
Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
journal, February 1998
- Ribas, R. P.; Leclercq, J. L.; Karam, J. M.
- Materials Science and Engineering: B, Vol. 51, Issue 1-3, p. 267-273
All-Polymer Field-Effect Transistor Realized by Printing Techniques
journal, September 1994
- Garnier, Francis; Hajlaoui, Ryad; Yassar, Abderrahim
- Science, Vol. 265, Issue 5179, p. 1684-1686
Universal description of channel conductivity for nanotube and nanowire transistors
journal, August 2003
- Rotkin, S. V.; Ruda, H. E.; Shik, A.
- Applied Physics Letters, Vol. 83, Issue 8, p. 1623-1625
Micromachined silicon suspended wires with submicrometric dimensions
journal, September 2001
- Bruschi, P.; Diligenti, A.; Piotto, M.
- Microelectronic Engineering, Vol. 57-58, p. 959-965
Aluminum metallization—Advantages and limitations for integrated circuit applications
journal, January 1969
- Schnable, G. L.; Keen, R. S.
- Proceedings of the IEEE, Vol. 57, Issue 9, p. 1570-1580
Fabrication of a Cylindrical Display by Patterned Assembly
journal, April 2002
- Jacobs, Heiko O.; Tao, Andrea R.; Schwartz, Alexander
- Science, Vol. 296, Issue 5566, p. 323-325
Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000
- Koide, Yoshihiro; Wang, Qingwu; Cui, Ji
- Journal of the American Chemical Society, Vol. 122, Issue 45, p. 11266-11267
Colloidosomes: Selectively Permeable Capsules Composed of Colloidal Particles
journal, November 2002
- Dinsmore, A. D.; Hsu, M. F.; Nikolaides, M. G.
- Science, Vol. 298, Issue 5595, p. 1006-1009
All-Inorganic Field Effect Transistors Fabricated by Printing
journal, October 1999
- Ridley, Brent A.; Nivi, Babak; Jacobson, Joseph M.
- Science, Vol. 286, Issue 5440, p. 746-749
Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems
journal, September 2003
- Whang, Dongmok; Jin, Song; Wu, Yue
- Nano Letters, Vol. 3, Issue 9, p. 1255-1259
The Incredible Shrinking Circuit
journal, September 2001
- Lieber, Charles M.
- Scientific American, Vol. 285, Issue 3, p. 58-64
Semiconductor Clusters, Nanocrystals, and Quantum Dots
journal, February 1996
- Alivisatos, A. P.
- Science, Vol. 271, Issue 5251, p. 933-937
Two-versus three-dimensional quantum confinement in indium phosphide wires and dots
journal, July 2003
- Yu, Heng; Li, Jingbo; Loomis, Richard A.
- Nature Materials, Vol. 2, Issue 8, p. 517-520
Printing meets lithography: Soft approaches to high-resolution patterning
journal, September 2001
- Michel, B.; Bernard, A.; Bietsch, A.
- IBM Journal of Research and Development, Vol. 45, Issue 5, p. 697-719
Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits
journal, December 1971
- McCaldin, J. O.; Sankur, H.
- Applied Physics Letters, Vol. 19, Issue 12, p. 524-527
Molecular control over Au/GaAs diodes
journal, March 2000
- Vilan, Ayelet; Shanzer, Abraham; Cahen, David
- Nature, Vol. 404, Issue 6774, p. 166-168
High-Resolution Contact Printing with Dendrimers
journal, April 2002
- Li, Hongwei; Kang, Dae-Joon; Blamire, Mark G.
- Nano Letters, Vol. 2, Issue 4, p. 347-349
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
journal, August 2004
- Jeon, S.; Park, J.-U.; Cirelli, R.
- Proceedings of the National Academy of Sciences, Vol. 101, Issue 34, p. 12428-12433
Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
journal, February 2003
- Schmid, H.; Wolf, H.; Allenspach, R.
- Advanced Functional Materials, Vol. 13, Issue 2, p. 145-153
High-mobility ultrathin semiconducting films prepared by spin coating
journal, March 2004
- Mitzi, David B.; Kosbar, Laura L.; Murray, Conal E.
- Nature, Vol. 428, Issue 6980, p. 299-303
Mechanically Strained Strained-Si NMOSFETs
journal, January 2004
- Maikap, S.; Yu, C. -Y.; Jan, S. -R.
- IEEE Electron Device Letters, Vol. 25, Issue 1, p. 40-42
Improved Pattern Transfer in Soft Lithography Using Composite Stamps
journal, June 2002
- Odom, Teri W.; Love, J. Christopher; Wolfe, Daniel B.
- Langmuir, Vol. 18, Issue 13, p. 5314-5320
III–V micromachined devices for microsystems
journal, September 1998
- Leclercq, J. L.; Ribas, R. P.; Karam, J. M.
- Microelectronics Journal, Vol. 29, Issue 9, p. 613-619
Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces
journal, April 2002
- Jiang, Xueping; Zheng, Haipeng; Gourdin, Shoshana
- Langmuir, Vol. 18, Issue 7, p. 2607-2615
Diamond-structured photonic crystals
journal, September 2004
- Maldovan, Martin; Thomas, Edwin L.
- Nature Materials, Vol. 3, Issue 9, p. 593-600
Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994
- Yeh, H. -J. J.; Smith, J. S.
- IEEE Photonics Technology Letters, Vol. 6, Issue 6, p. 706-708
Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors
journal, October 1997
- Hu, Junmin; Beck, R. G.; Deng, Tao
- Applied Physics Letters, Vol. 71, Issue 14, p. 2020-2022
Surface-induced structure formation of polymer blends on patterned substrates
journal, February 1998
- Böltau, Martin; Walheim, Stefan; Mlynek, Jürgen
- Nature, Vol. 391, Issue 6670, p. 877-879
GaAs Readied for High-Speed Microcircuits
journal, January 1983
- ROBINSON, A. L.
- Science, Vol. 219, Issue 4582, p. 275-277
Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
journal, June 1998
- Park, Sang Hyun; Xia, Younan
- Chemistry of Materials, Vol. 10, Issue 7, p. 1745-1747
Silicon for thin-film transistors
journal, April 2003
- Wagner, Sigurd; Gleskova, Helena; Cheng, I-Chun
- Thin Solid Films, Vol. 430, Issue 1-2, p. 15-19
Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
journal, April 2002
- Haisma, Jan; Spierings, G. A. C. M.
- Materials Science and Engineering: R: Reports, Vol. 37, Issue 1-2, p. 1-60
Guided molecular self-assembly: a review of recent efforts
journal, March 2003
- Huie, Jiyun C.
- Smart Materials and Structures, Vol. 12, Issue 2, p. 264-271
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
journal, December 2000
- Namazu, T.; Isono, Y.; Tanaka, T.
- Journal of Microelectromechanical Systems, Vol. 9, Issue 4, p. 450-459
Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999
- Xia, Younan; Rogers, John A.; Paul, Kateri E.
- Chemical Reviews, Vol. 99, Issue 7, p. 1823-1848
Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors
journal, October 1999
- Kagan, C. R.; Mitzi, D. B.; Dimitrakopoulos, C. D.
- Science, Vol. 286, Issue 5441, p. 945-947
Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers
journal, December 1995
- Jeon, N. L.; Clem, P. G.; Nuzzo, R. G.
- Journal of Materials Research, Vol. 10, Issue 12, p. 2996-2999
Applications
book, January 1991
- Givargizov, E. I.
- Oriented Crystallization on Amorphous Substrates, p. 341-363
Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000
- Bowden, Ned B.; Weck, Marcus; Choi, Insung S.
- Accounts of Chemical Research, Vol. 34, Issue 3, p. 231-238
p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks
journal, October 2004
- Zhou, Yangxin; Gaur, Anshu; Hur, Seung-Hyun
- Nano Letters, Vol. 4, Issue 10, p. 2031-2035