Title: Nanofabrication

Abstract

Pathways to rapid and reliable fabrication of three-dimensional nanostructures are provided. Simple methods are described for the production of well-ordered, multilevel nanostructures. This is accomplished by patterning block copolymer templates with selective exposure to a radiation source. The resulting multi-scale lithographic template can be treated with post-fabrication steps to produce multilevel, three-dimensional, integrated nanoscale media, devices, and systems.

Inventors:

Tuominen, Mark; Bal, Mustafa; Russell, Thomas P.; Ursache, Andrei

Issue Date:

2007-03-13

Research Org.:

Univ. of Massachusetts, Amherst, MA (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1176141

Patent Number(s):

7189435

Application Number:

10/098,222

Assignee:

University of Massachusetts (Boston, MA)

Patent Classifications (CPCs):

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES

G03F7/164 - {using electric, electrostatic or magnetic means

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

H01J1/3048 - {Distributed particle emitters}
H01J1/53 - Electrodes intimately associated with a screen on or from which an image or pattern is formed, picked up, converted, or stored {
H01J2201/30469 - Carbon nanotubes

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L23/48 - Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements
H01L2924/00 - Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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DOE Contract Number:  

FG02-96ERA45612; DMR-9809365; CTS-9871782

Resource Type:

Patent

Resource Relation:

Patent File Date: 2002 Mar 14

Country of Publication:

United States

Language:

English

Subject:

77 NANOSCIENCE AND NANOTECHNOLOGY; 36 MATERIALS SCIENCE