High-efficiency neutron detectors and methods of making same
Abstract
Neutron detectors, advanced detector process techniques and advanced compound film designs have greatly increased neutron-detection efficiency. One embodiment of the detectors utilizes a semiconductor wafer with a matrix of spaced cavities filled with one or more types of neutron reactive material such as 10B or 6LiF. The cavities are etched into both the front and back surfaces of the device such that the cavities from one side surround the cavities from the other side. The cavities may be etched via holes or etched slots or trenches. In another embodiment, the cavities are different-sized and the smaller cavities extend into the wafer from the lower surfaces of the larger cavities. In a third embodiment, multiple layers of different neutron-responsive material are formed on one or more sides of the wafer. The new devices operate at room temperature, are compact, rugged, and reliable in design.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Michigan, Ann Arbor, MI (United States); Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1176074
- Patent Number(s):
- 7164138
- Application Number:
- 10/695,019
- Assignee:
- The Regents of the University of Michigan (Ann Arbor, MI)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01T - MEASUREMENT OF NUCLEAR OR X-RADIATION
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2003 Oct 29
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
Citation Formats
McGregor, Douglas S., and Klann, Raymond. High-efficiency neutron detectors and methods of making same. United States: N. p., 2007.
Web.
McGregor, Douglas S., & Klann, Raymond. High-efficiency neutron detectors and methods of making same. United States.
McGregor, Douglas S., and Klann, Raymond. Tue .
"High-efficiency neutron detectors and methods of making same". United States. https://www.osti.gov/servlets/purl/1176074.
@article{osti_1176074,
title = {High-efficiency neutron detectors and methods of making same},
author = {McGregor, Douglas S. and Klann, Raymond},
abstractNote = {Neutron detectors, advanced detector process techniques and advanced compound film designs have greatly increased neutron-detection efficiency. One embodiment of the detectors utilizes a semiconductor wafer with a matrix of spaced cavities filled with one or more types of neutron reactive material such as 10B or 6LiF. The cavities are etched into both the front and back surfaces of the device such that the cavities from one side surround the cavities from the other side. The cavities may be etched via holes or etched slots or trenches. In another embodiment, the cavities are different-sized and the smaller cavities extend into the wafer from the lower surfaces of the larger cavities. In a third embodiment, multiple layers of different neutron-responsive material are formed on one or more sides of the wafer. The new devices operate at room temperature, are compact, rugged, and reliable in design.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 16 00:00:00 EST 2007},
month = {Tue Jan 16 00:00:00 EST 2007}
}
Works referenced in this record:
High-efficiency semiconductor theramal-neutron detectors
journal, April 1987
- Muminov, R. A.; Tsvang, L. D.
- Soviet Atomic Energy, Vol. 62, Issue 4
Der Gd-neutronenzähler
journal, May 1968
- Feigl, B.; Rauch, H.
- Nuclear Instruments and Methods, Vol. 61, Issue 3
Self-biased boron-10 coated high-purity epitaxial GaAs thermal neutron detectors
journal, January 2000
- McGregor, D. S.; Vernon, S. M.; Gersch, H. K.
- IEEE Transactions on Nuclear Science, Vol. 47, Issue 4
Design considerations for thin film coated semiconductor thermal neutron detectors—I: basics regarding alpha particle emitting neutron reactive films
journal, March 2003
- McGregor, D. S.; Hammig, M. D.; Yang, Y.-H.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 500, Issue 1-3, p. 272-308
New surface morphology for low stress thin-film-coated thermal neutron detectors
journal, August 2002
- McGregor, D. S.; Klann, R. T.; Gersch, H. K.
- IEEE Transactions on Nuclear Science, Vol. 49, Issue 4, p. 1999-2004
Recent results from thin-film-coated semiconductor neutron detectors
conference, January 2003
- McGregor, Douglas S.; Klann, Raymond T.; Sanders, Jeffrey D.
- International Symposium on Optical Science and Technology, Vol. 4784
Semi-insulating bulk GaAs thermal neutron imaging arrays
journal, June 1996
- McGregor, D. S.; Lindsay, J. T.; Brannon, C. C.
- IEEE Transactions on Nuclear Science, Vol. 43, Issue 3
High efficiency neutron sensitive amorphous silicon pixel detectors
journal, January 1994
- Mireshghi, A.; Cho, G.; Drewery, J. S.
- IEEE Transactions on Nuclear Science, Vol. 41, Issue 4
Neutron Detectors Made From Chemically Vapour Deposited Semiconductors
journal, January 1997
- Foulon, F.; Bergonzo, P.; Brambilla, A.
- MRS Proceedings, Vol. 487
Thin-film-coated bulk GaAs detectors for thermal and fast neutron measurements
journal, June 2001
- McGregor, D. S.; Klann, R. T.; Gersch, H. K.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 466, Issue 1, p. 126-141
A new neutron detector development based on silicon semiconductor and 6LiF converter
journal, June 1997
- Schelten, J.; Balzhäuser, M.; Höngesberg, F.
- Physica B: Condensed Matter, Vol. 234-236, p. 1084-1086
Development of semiconductor detectors for fast neutron radiography
conference, January 2001
- Klann, R. T.
- The CAARI 2000: Sixteenth international conference on the application of accelerators in research and industry, AIP Conference Proceedings
Sputtered boron films on silicon surface barrier detectors
journal, June 1967
- Rose, A.
- Nuclear Instruments and Methods, Vol. 52, Issue 1, p. 166-170
Designs for thin-film-coated semiconductor thermal neutron detectors
conference, January 2002
- McGregor, D. S.; Klann, R. T.; Gersch, H. K.
A neutron detector to monitor the intensity of transmitted neutrons for small-angle neutron scattering instruments
journal, June 2003
- De Lurgio, Patrick M.; Klann, Raymond T.; Fink, Charles L.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 505, Issue 1-2, p. 46-49
The effect of incremental gamma-ray doses and incremental neutron fluences upon the performance of self-biased 10B-coated high-purity epitaxial GaAs thermal neutron detectors
journal, August 2002
- Gersch, H. K.; McGregor, D. S.; Simpson, P. A.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 489, Issue 1-3, p. 85-98