Optical fiber pressure and acceleration sensor fabricated on a fiber endface
Abstract
A fiber optic sensor has a hollow tube bonded to the endface of an optical fiber, and a diaphragm bonded to the hollow tube. The fiber endface and diaphragm comprise an etalon cavity. The length of the etalon cavity changes when applied pressure or acceleration flexes the diaphragm. The entire structure can be made of fused silica. The fiber, tube, and diaphragm can be bonded with a fusion splice. The present sensor is particularly well suited for measuring pressure or acceleration in high temperature, high pressure and corrosive environments (e.g., oil well downholes and jet engines). The present sensors are also suitable for use in biological and medical applications.
- Inventors:
- Issue Date:
- Research Org.:
- Virginia Tech Intellectual Properties, Inc., Blacksburg, VA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175769
- Patent Number(s):
- 7054011
- Application Number:
- 10/911,635
- Assignee:
- Virginia Tech Intellectual Properties, Inc.
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G01 - MEASURING G01H - MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- DOE Contract Number:
- FC36-01G011050
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Zhu, Yizheng, Wang, Xingwei, Xu, Juncheng, and Wang, Anbo. Optical fiber pressure and acceleration sensor fabricated on a fiber endface. United States: N. p., 2006.
Web.
Zhu, Yizheng, Wang, Xingwei, Xu, Juncheng, & Wang, Anbo. Optical fiber pressure and acceleration sensor fabricated on a fiber endface. United States.
Zhu, Yizheng, Wang, Xingwei, Xu, Juncheng, and Wang, Anbo. Tue .
"Optical fiber pressure and acceleration sensor fabricated on a fiber endface". United States. https://www.osti.gov/servlets/purl/1175769.
@article{osti_1175769,
title = {Optical fiber pressure and acceleration sensor fabricated on a fiber endface},
author = {Zhu, Yizheng and Wang, Xingwei and Xu, Juncheng and Wang, Anbo},
abstractNote = {A fiber optic sensor has a hollow tube bonded to the endface of an optical fiber, and a diaphragm bonded to the hollow tube. The fiber endface and diaphragm comprise an etalon cavity. The length of the etalon cavity changes when applied pressure or acceleration flexes the diaphragm. The entire structure can be made of fused silica. The fiber, tube, and diaphragm can be bonded with a fusion splice. The present sensor is particularly well suited for measuring pressure or acceleration in high temperature, high pressure and corrosive environments (e.g., oil well downholes and jet engines). The present sensors are also suitable for use in biological and medical applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {5}
}
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Works referenced in this record:
Deep wet etching on fused silica material for fiber optic sensors
conference, January 2004
- Chen, Xiaopei; Yu, Bing; Zhu, YiZheng
- Micromachining and Microfabrication, SPIE Proceedings