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Title: Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump

Abstract

An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.

Inventors:
Issue Date:
Research Org.:
Universities Research Association, Inc., Washington, DC (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175684
Patent Number(s):
7021888
Application Number:
10/737,570
Assignee:
Universities Research Association, Inc. (Washington, DC)
Patent Classifications (CPCs):
F - MECHANICAL ENGINEERING F04 - POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS F04D - NON-POSITIVE-DISPLACEMENT PUMPS
DOE Contract Number:  
AC02-76CH03000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Jostlein, Hans. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump. United States: N. p., 2006. Web.
Jostlein, Hans. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump. United States.
Jostlein, Hans. Tue . "Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump". United States. https://www.osti.gov/servlets/purl/1175684.
@article{osti_1175684,
title = {Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump},
author = {Jostlein, Hans},
abstractNote = {An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 04 00:00:00 EDT 2006},
month = {Tue Apr 04 00:00:00 EDT 2006}
}