Extended surface parallel coating inspection method
Abstract
Techniques for rapidly characterizing reflective surfaces and especially multi-layer EUV reflective surfaces of optical components involve illuminating the entire reflective surface instantaneously and detecting the image far field. The technique provides a mapping of points on the reflective surface to corresponding points on a detector, e.g., CCD. This obviates the need to scan a probe over the entire surface of the optical component. The reflective surface can be flat, convex, or concave.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175677
- Patent Number(s):
- 7016030
- Application Number:
- 10/689,171
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Naulleau, Patrick P. Extended surface parallel coating inspection method. United States: N. p., 2006.
Web.
Naulleau, Patrick P. Extended surface parallel coating inspection method. United States.
Naulleau, Patrick P. Tue .
"Extended surface parallel coating inspection method". United States. https://www.osti.gov/servlets/purl/1175677.
@article{osti_1175677,
title = {Extended surface parallel coating inspection method},
author = {Naulleau, Patrick P.},
abstractNote = {Techniques for rapidly characterizing reflective surfaces and especially multi-layer EUV reflective surfaces of optical components involve illuminating the entire reflective surface instantaneously and detecting the image far field. The technique provides a mapping of points on the reflective surface to corresponding points on a detector, e.g., CCD. This obviates the need to scan a probe over the entire surface of the optical component. The reflective surface can be flat, convex, or concave.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {3}
}
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