Multilayer composites and manufacture of same
Abstract
The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segments with differing compositions, and a multilayer thin film structure having alternating layers of a first composition and a second composition, a pair of the alternating layers defining a bi-layer wherein the thin film structure includes at least 20 bi-layers per micron of thin film such that an individual bi-layer has a thickness of less than about 100 nanometers.
- Inventors:
- Issue Date:
- Research Org.:
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175638
- Patent Number(s):
- 6994775
- Application Number:
- 10/209,391
- Assignee:
- The Regents of the University of California (Los Alamos, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Holesinger, Terry G., and Jia, Quanxi. Multilayer composites and manufacture of same. United States: N. p., 2006.
Web.
Holesinger, Terry G., & Jia, Quanxi. Multilayer composites and manufacture of same. United States.
Holesinger, Terry G., and Jia, Quanxi. Tue .
"Multilayer composites and manufacture of same". United States. https://www.osti.gov/servlets/purl/1175638.
@article{osti_1175638,
title = {Multilayer composites and manufacture of same},
author = {Holesinger, Terry G. and Jia, Quanxi},
abstractNote = {The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segments with differing compositions, and a multilayer thin film structure having alternating layers of a first composition and a second composition, a pair of the alternating layers defining a bi-layer wherein the thin film structure includes at least 20 bi-layers per micron of thin film such that an individual bi-layer has a thickness of less than about 100 nanometers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {2}
}
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