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Title: Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation

Abstract

A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175560
Patent Number(s):
6967757
Application Number:
10/722,237
Assignee:
Sandia Corporation
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Allen, James J., Sinclair, Michael B., and Dohner, Jeffrey L. Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation. United States: N. p., 2005. Web.
Allen, James J., Sinclair, Michael B., & Dohner, Jeffrey L. Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation. United States.
Allen, James J., Sinclair, Michael B., and Dohner, Jeffrey L. Tue . "Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation". United States. https://www.osti.gov/servlets/purl/1175560.
@article{osti_1175560,
title = {Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation},
author = {Allen, James J. and Sinclair, Michael B. and Dohner, Jeffrey L.},
abstractNote = {A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {11}
}

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Works referenced in this record:

Extending the travel range of analog-tuned electrostatic actuators
journal, January 1999