High stroke pixel for a deformable mirror

Miles, Robin R.; Papavasiliou, Alexandros P.

Title: High stroke pixel for a deformable mirror

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Abstract

A mirror pixel that can be fabricated using standard MEMS methods for a deformable mirror. The pixel is electrostatically actuated and is capable of the high deflections needed for spaced-based mirror applications. In one embodiment, the mirror comprises three layers, a top or mirror layer, a middle layer which consists of flexures, and a comb drive layer, with the flexures of the middle layer attached to the mirror layer and to the comb drive layer. The comb drives are attached to a frame via spring flexures. A number of these mirror pixels can be used to construct a large mirror assembly. The actuator for the mirror pixel may be configured as a crenellated beam with one end fixedly secured, or configured as a scissor jack. The mirror pixels may be used in various applications requiring high stroke adaptive optics.

Inventors:: Miles, Robin R.; Papavasiliou, Alexandros P.

Issue Date:: 2005-09-20

Research Org.:: Univ. of California, Oakland, CA (United States); Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1175503

Patent Number(s):: 6947188

Application Number:: 10/392,594

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B2203/0109 - Bridges
B81B2203/0136 - Comb structures
B81B3/0037 - {For increasing stroke, i.e. achieve large displacement of actuated parts}
B81B2201/042 - Micromirrors, not used as optical switches

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B26/0841 - {the reflecting element being moved or deformed by electrostatic means}

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B2201/033 - Comb drives
B81B2203/053 - Translation according to an axis perpendicular to the substrate

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B26/0866 - {the reflecting means being moved or deformed by thermal means}

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION

Citation Formats


                    Miles, Robin R., and Papavasiliou, Alexandros P. High stroke pixel for a deformable mirror.  United States: N. p., 2005. 
        Web.

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                    Miles, Robin R., & Papavasiliou, Alexandros P. High stroke pixel for a deformable mirror.  United States.

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                    Miles, Robin R., and Papavasiliou, Alexandros P. Tue .  
        "High stroke pixel for a deformable mirror".  United States.  https://www.osti.gov/servlets/purl/1175503.

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@article{osti_1175503,

  title        = {High stroke pixel for a deformable mirror},

  author       = {Miles, Robin R. and Papavasiliou, Alexandros P.},

  abstractNote = {A mirror pixel that can be fabricated using standard MEMS methods for a deformable mirror. The pixel is electrostatically actuated and is capable of the high deflections needed for spaced-based mirror applications. In one embodiment, the mirror comprises three layers, a top or mirror layer, a middle layer which consists of flexures, and a comb drive layer, with the flexures of the middle layer attached to the mirror layer and to the comb drive layer. The comb drives are attached to a frame via spring flexures. A number of these mirror pixels can be used to construct a large mirror assembly. The actuator for the mirror pixel may be configured as a crenellated beam with one end fixedly secured, or configured as a scissor jack. The mirror pixels may be used in various applications requiring high stroke adaptive optics.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2005},

  month        = {9}

}

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