skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Microwave ion source

Abstract

A compact microwave ion source has a permanent magnet dipole field, a microwave launcher, and an extractor parallel to the source axis. The dipole field is in the form of a ring. The microwaves are launched from the middle of the dipole ring using a coaxial waveguide. Electrons are heated using ECR in the magnetic field. The ions are extracted from the side of the source from the middle of the dipole perpendicular to the source axis. The plasma density can be increased by boosting the microwave ion source by the addition of an RF antenna. Higher charge states can be achieved by increasing the microwave frequency. A xenon source with a magnetic pinch can be used to produce intense EUV radiation.

Inventors:
; ;
Issue Date:
Research Org.:
Univ. of California, Oakland, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175442
Patent Number(s):
6922019
Application Number:
10/150,534
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05G - X-RAY TECHNIQUE
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Leung, Ka-Ngo, Reijonen, Jani, and Thomae, Rainer W. Microwave ion source. United States: N. p., 2005. Web.
Leung, Ka-Ngo, Reijonen, Jani, & Thomae, Rainer W. Microwave ion source. United States.
Leung, Ka-Ngo, Reijonen, Jani, and Thomae, Rainer W. Tue . "Microwave ion source". United States. https://www.osti.gov/servlets/purl/1175442.
@article{osti_1175442,
title = {Microwave ion source},
author = {Leung, Ka-Ngo and Reijonen, Jani and Thomae, Rainer W.},
abstractNote = {A compact microwave ion source has a permanent magnet dipole field, a microwave launcher, and an extractor parallel to the source axis. The dipole field is in the form of a ring. The microwaves are launched from the middle of the dipole ring using a coaxial waveguide. Electrons are heated using ECR in the magnetic field. The ions are extracted from the side of the source from the middle of the dipole perpendicular to the source axis. The plasma density can be increased by boosting the microwave ion source by the addition of an RF antenna. Higher charge states can be achieved by increasing the microwave frequency. A xenon source with a magnetic pinch can be used to produce intense EUV radiation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {7}
}

Patent:

Save / Share:

Works referenced in this record:

A neutron tube with constant output (1010 n/sec) for activation analysis and reactor applications
journal, March 1965