Microwave ion source
Abstract
A compact microwave ion source has a permanent magnet dipole field, a microwave launcher, and an extractor parallel to the source axis. The dipole field is in the form of a ring. The microwaves are launched from the middle of the dipole ring using a coaxial waveguide. Electrons are heated using ECR in the magnetic field. The ions are extracted from the side of the source from the middle of the dipole perpendicular to the source axis. The plasma density can be increased by boosting the microwave ion source by the addition of an RF antenna. Higher charge states can be achieved by increasing the microwave frequency. A xenon source with a magnetic pinch can be used to produce intense EUV radiation.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California, Oakland, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175442
- Patent Number(s):
- 6922019
- Application Number:
- 10/150,534
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05G - X-RAY TECHNIQUE
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Leung, Ka-Ngo, Reijonen, Jani, and Thomae, Rainer W. Microwave ion source. United States: N. p., 2005.
Web.
Leung, Ka-Ngo, Reijonen, Jani, & Thomae, Rainer W. Microwave ion source. United States.
Leung, Ka-Ngo, Reijonen, Jani, and Thomae, Rainer W. Tue .
"Microwave ion source". United States. https://www.osti.gov/servlets/purl/1175442.
@article{osti_1175442,
title = {Microwave ion source},
author = {Leung, Ka-Ngo and Reijonen, Jani and Thomae, Rainer W.},
abstractNote = {A compact microwave ion source has a permanent magnet dipole field, a microwave launcher, and an extractor parallel to the source axis. The dipole field is in the form of a ring. The microwaves are launched from the middle of the dipole ring using a coaxial waveguide. Electrons are heated using ECR in the magnetic field. The ions are extracted from the side of the source from the middle of the dipole perpendicular to the source axis. The plasma density can be increased by boosting the microwave ion source by the addition of an RF antenna. Higher charge states can be achieved by increasing the microwave frequency. A xenon source with a magnetic pinch can be used to produce intense EUV radiation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {7}
}
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Works referenced in this record:
A neutron tube with constant output (1010 n/sec) for activation analysis and reactor applications
journal, March 1965
- Bounden, J. E.; Lomer, P. D.; Wood, J. D. L. H.
- Nuclear Instruments and Methods, Vol. 33, Issue 2