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Title: Fiber optic micro accelerometer

Abstract

An accelerometer includes a wafer, a proof mass integrated into the wafer, at least one spring member connected to the proof mass, and an optical fiber. A Fabry-Perot cavity is formed by a partially reflective surface on the proof mass and a partially reflective surface on the end of the optical fiber. The two partially reflective surfaces are used to detect movement of the proof mass through the optical fiber, using an optical detection system.

Inventors:
Issue Date:
Research Org.:
Univ. of California, Oakland, CA (United States); Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175441
Patent Number(s):
6921894
Application Number:
10/238,660
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Swierkowski, Steve P. Fiber optic micro accelerometer. United States: N. p., 2005. Web.
Swierkowski, Steve P. Fiber optic micro accelerometer. United States.
Swierkowski, Steve P. Tue . "Fiber optic micro accelerometer". United States. https://www.osti.gov/servlets/purl/1175441.
@article{osti_1175441,
title = {Fiber optic micro accelerometer},
author = {Swierkowski, Steve P.},
abstractNote = {An accelerometer includes a wafer, a proof mass integrated into the wafer, at least one spring member connected to the proof mass, and an optical fiber. A Fabry-Perot cavity is formed by a partially reflective surface on the proof mass and a partially reflective surface on the end of the optical fiber. The two partially reflective surfaces are used to detect movement of the proof mass through the optical fiber, using an optical detection system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {7}
}

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Works referenced in this record:

Stress free quad beam optical silicon accelerometer
conference, January 2002


Fiber-optic accelerometer with micro-optical shutter modulation and integrated damping
conference, January 2000