Fiber optic micro accelerometer
Abstract
An accelerometer includes a wafer, a proof mass integrated into the wafer, at least one spring member connected to the proof mass, and an optical fiber. A Fabry-Perot cavity is formed by a partially reflective surface on the proof mass and a partially reflective surface on the end of the optical fiber. The two partially reflective surfaces are used to detect movement of the proof mass through the optical fiber, using an optical detection system.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California, Oakland, CA (United States); Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175441
- Patent Number(s):
- 6921894
- Application Number:
- 10/238,660
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Swierkowski, Steve P. Fiber optic micro accelerometer. United States: N. p., 2005.
Web.
Swierkowski, Steve P. Fiber optic micro accelerometer. United States.
Swierkowski, Steve P. Tue .
"Fiber optic micro accelerometer". United States. https://www.osti.gov/servlets/purl/1175441.
@article{osti_1175441,
title = {Fiber optic micro accelerometer},
author = {Swierkowski, Steve P.},
abstractNote = {An accelerometer includes a wafer, a proof mass integrated into the wafer, at least one spring member connected to the proof mass, and an optical fiber. A Fabry-Perot cavity is formed by a partially reflective surface on the proof mass and a partially reflective surface on the end of the optical fiber. The two partially reflective surfaces are used to detect movement of the proof mass through the optical fiber, using an optical detection system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 26 00:00:00 EDT 2005},
month = {Tue Jul 26 00:00:00 EDT 2005}
}
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Works referenced in this record:
Stress free quad beam optical silicon accelerometer
conference, January 2002
- Plaza, J. A.; Llobera, A.; Berganzo, J.
- IEEE SENSORS 2002, Proceedings of IEEE Sensors
Fiber-optic accelerometer with micro-optical shutter modulation and integrated damping
conference, January 2000
- Guldimann, B.; Clerc, P. A.; De Rooij, N. F.
- 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)