Ring laser scatterometer
Abstract
A scatterometer utilizes the dead zone resulting from lockup caused by scatter from a sample located in the optical path of a ring laser at a location where counter-rotating pulses cross. The frequency of one pulse relative to the other is varied across the lockup dead zone.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175414
- Patent Number(s):
- 6912053
- Application Number:
- 10/390,508
- Assignee:
- Sandia Corporation
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01S - DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Ackermann, Mark, and Diels, Jean-Claude. Ring laser scatterometer. United States: N. p., 2005.
Web.
Ackermann, Mark, & Diels, Jean-Claude. Ring laser scatterometer. United States.
Ackermann, Mark, and Diels, Jean-Claude. Tue .
"Ring laser scatterometer". United States. https://www.osti.gov/servlets/purl/1175414.
@article{osti_1175414,
title = {Ring laser scatterometer},
author = {Ackermann, Mark and Diels, Jean-Claude},
abstractNote = {A scatterometer utilizes the dead zone resulting from lockup caused by scatter from a sample located in the optical path of a ring laser at a location where counter-rotating pulses cross. The frequency of one pulse relative to the other is varied across the lockup dead zone.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {6}
}
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